Connection Overview - VAT 650 Series Installation, Operating, & Maintenance Instructions
Pendulum control & isolation valve with devicenet interface
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4.2.2
Connection overview
System:
Controller:
DeviceNet® Interface connector
18/91
INSTALLATION
2
1
M
6
9
Edition 2012-05-02
1
Valve
2
Process chamber
3
3
Gas inlet
4
Pressure sensor(s)
4
5
Sensor cable(s)
6
Controller and actuator
7
Cable to remote control unit
5
8
Cable to power supply
9
Pump
7
8
Ground connection
Series 650
294290EA
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