VAT 615 Series Installation, Operating, & Maintenance Instructions
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VAT 615 Series Installation, Operating, & Maintenance Instructions

Dn 40 (i.d. 1 1/2”), devicenet, butterfly control & isolation valve with extended control range, with devicenet interface
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Butterfly control & isolation valve
with extended control range
with DeviceNet interface
This manual is valid for the valve ordering number(s):
61532-KEAQ-0001
configured with firmware 615P.1F.08 and 502689 (DeviceNet
The fabrication number is indicated on each product as per the label
below (or similar):
made in Switzerland
Fabrication No.:
615 . . – . . . . – . . . . / . . . .
A – . . . . . .
Explanation of symbols:
Read declaration carefully before you start any other
action!
Attention!
Loaded springs and/or air cushions are potential
hazards!
Disconnect electrical power and compressed air lines.
Do not touch parts under voltage!
Read these «Installation, Operating & Maintenance Instructions» and the enclosed «General
Safety Instructions» carefully before you start any other action!
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com
Installation, Operating & Maintenance Instructions
Series 615 DN 40 (I.D. 1½"), DeviceNet
Fabrication number
®
)
Keep body parts and objects away from the valve
opening!
Hot surfaces; do not touch!
Wear gloves!
sample picture
603476EA
1/102
2013-07-25

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Summary of Contents for VAT 615 Series

  • Page 1 Do not touch parts under voltage! Read these «Installation, Operating & Maintenance Instructions» and the enclosed «General Safety Instructions» carefully before you start any other action! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 1/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 2 VAT products. The VAT firmware contains a limited, time unlimited user license. The VAT firmware may not be used for purposes other than those intended nor is it permitted to make copies of the VAT firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to other people.

  • Page 3: Table Of Contents

    I/O Poll Messaging Connections ......................55 Object ................................56 4.4.1 Object Model for the Process Control Valve Device ................56 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 3/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 4 Control and actuating unit ..........................99 Accessories ..............................100 8.4.1 Centering ring with Viton o-ring ......................100 9 Warranty ................................101 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 4/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...

  • Page 5: Use Of Product

    This product is a Butterfly control valve with isolation functionality for downstream pressure control in vacuum systems. Use product for clean and dry indoor vacuum applications under the conditions indicated in chapter «Technical data» only! Other applications are only allowed with the written permission of VAT. VAT Vakuumventile AG, CH-9469 Haag, Switzerland...

  • Page 6: Technical Data

    Internal overcurrent protection by a PTC device. Refer to chapter «Sensor supply concepts» for details. PFO = Power Failure Option. Refer to «Behavior in case of power failure» for details. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 6/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 7: Installation

    Weight about 3.6 kg Dimensions Refer to dimensional drawing of specific valve ordering number (available on request) Installation VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 7/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...

  • Page 8: Unpacking

    Do not connect or disconnect sensor cable when device is under power. Connection overview Connectors at controller panel Ground connection VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 8/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...

  • Page 9: Tightening Torque

    Note: To provide power to the valve motor pins 4 and 8 must be bridged, otherwise motor interlock is active and the valve enters the safety mode and is not operative. Refer also to «Safety mode». This valve may optionally be equipped with a heating device. Connect VAT heating device according to manual of respective heating device.

  • Page 10: Admissible Forces

    The following forces are admissible: Axial tensile or Valve size Bending moment «M» compressive force «F » inch lbf. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 10/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...

  • Page 11: Admissible Forces At Controller

    Admissible force «F» a = middle of aluminium part of controller (b / 2) c = pedestal 400 N VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 11/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 12: Requirements To Sensor Connection

    Dynamic stray magnetic fields may introduce noise to sensor output and should be avoided or shielded. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 12/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 13: Electrical Connection

    It is also possible to connect the ground strap at system chamber if it is well connected to PE. Note: Avoid low chassis cross section to the system PE connection. (Min. same cross section as ground strap) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 13/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 14: Sensor Supply Concepts

    615 . . - . . A . - ../ 615 . . - . . C . - ..SPS module included Note: The SPS module can be retrofitted. Refer to chapter «Retrofit / replacement procedure» for instruction. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 14/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 15: Power And Sensor Connection ( 15 Vdc Sensors) With Optional Sps Module

    Connect the 15 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above. Do not connect other pins that may damage sensors, power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 15/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 16: Devicenet Connection

    Micro Connector Pinout Male (pins) at Female (sockets) valve controller at DeviceNet cable VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 16/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...

  • Page 17: Logic I/O

    Note: Do not connect other pins than indicated in the schematics above! Example for connector: Type «Binder M8 male, 4-pole, shielded (recommended)» (99-3363-00-04). VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 17/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 18: Digital Input

    The service port (connector: SERVICE) allows to connect the valve to a RS232 port of a computer. This requires a service cable and software from VAT. You can either use our freeware 'Control View', which can be downloaded from www.vatvalve.com or purchase our 'Control Performance Analyzer'.

  • Page 19: Operation

    This valve is designed for downstream pressure control in vacuum chambers. It can be employed in a pressure control mode or a position control mode. In both cases local or remote operation is possible. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 19/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 20: Local Operation

    Local operation means that the valve is operated via the service port using a computer or the Service Box 2. When using a computer, a service cable and a software from VAT are required. You can either download our freeware 'Control View' from or purchase our 'Control Performance Analyzer'.

  • Page 21: Safety Mode

    Valve position after power up is closed Valve position after power up is open Refer also to chapter «Display information». VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 21/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 22: Behavior In Case Of Power Failure

    Valve remains at current position. All parameters are stored in a power fail save memory. For PFO retrofit and other options refer to chapter «Retrofit». VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 22/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 23: Display Information

    «Safety mode» for details. 1) SPS = optional ±15 VDC Sensor Power Supply module 2) PFO = Power Failure Option VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 23/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 24: Setup Procedure

    Refer to chapter: «Pressure control configuration» for details. CONTROL Note: Without PRESSURE CONTROL COFIGURATION the valve is not able to run COFIGURATION pressure control VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 24/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...

  • Page 25: Devicenet Configuration

    ® VAT offers valve-related but not general DeviceNet support. Contact us under: devicenet-support@vat.ch The node number is the device address and can be selected by two rotary switches which are on the valve controller panel.
  • Page 26 Note: It’s not possible to make assembly object POLL CONNECTION INPUT configuration in local operation. assembly Reestablish poll I/O connection VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 26/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...

  • Page 27: Devicenet® Leds

    Turn Network Status LED on Green for approximately 0.25 seconds. Turn Network Status LED on Red for approximately 0.25 seconds. Turn Network Status LED off. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 27/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 28 Failed communication device. The device has detected an error that has rendered it incapable of communicating on the network (Duplicate MAC ID, or Bus–off). VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 28/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 29: Logic I/O Configuration

    0 = enabled 1 = disabled 000 (reserved) For LOGIC I/O connector schematics see also chapter «LOGIC I/O». VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 29/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 30: Valve Configuration

    ‘Setup / Sensor’. / ’ZERO’ Do 2 sensor configuration in menu Select Sensor Type ‘Setup / Sensor’. Select Sensor Full Scale VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 30/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...

  • Page 31: Zero

    Note: Do not perform ZERO, if the base pressure of your vacuum system is higher than 1‰ of sensor full scale. We recommend disabling ZERO function in this case; refer to «Valve and sensor configuration» of the setup procedure. Otherwise incorrect pressure reading is the result. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 31/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 32: Pressure Control Configuration

    [mbarl/s] sensor full scale pressure [mbar] Tv = Vacuum time constant [sec] Chamber Volume [l] VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 32/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...
  • Page 33 A = 5.0, B = 5.5, C = 6.0, D = 6.5, E = 7.0, F = 7.5, G = 8.0, H = 8.5, I = 9.0, J =9.5, K = 10.0 efgh not used, set 0000 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 33/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 34 This valve is equipped with 3 different types of control algorithms. Refer to chapters: 3.6.7.1 Adaptive algorithm, 3.6.7.2 Fixed algorithm and 3.6.7.3 Soft Pump. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 34/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 35 The PID controller covers 5% to 5000% of the gas flow which was used for learn. Note: To optimize adaptive algorithm of the pressure controller refer to chapter «Tuning of pressure control performance». VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 35/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 36 [sccm] = 39.4 p max. pressure to control [Torr] required lower conductance [l/s] VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 36/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...
  • Page 37 Note: To optimize Fixed algorithm of pressure controller refer to chapter «Tuning of pressure control performance». VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 37/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 38: Close Valve

    Send SETPOINT TYPE Push OPEN button = position control Send CONTROL MODE for position = open valve VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 38/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...

  • Page 39: Position Control

    = pressure control Select or enter pressure setpoint Send CONTROL MODE for pressure = control mode Send PRESSURE SETPOINT VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 39/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...

  • Page 40: Pressure Control Operation With 2 Sensors

    Fixed algorithm. Tuning of control performance with Soft pump control, refer to chapter: 3.11.3 Tuning of control performance with soft pump algorithm VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 40/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 41: Tuning Of Pressure Control With Adaptive Algorithm

    Pressure Pressure Pressure Pressure control control control control ok ? ok ? ok ? ok ? Contact VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 41/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...
  • Page 42 ‘Service Box 2‘) Set gain factor in menu ‘Setup / Control Parameter’ Send PID CONTROLLER GAIN FACTOR VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 42/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 43 ‘Service Box 2‘) Go to ‘Setup / Controller’ menu. Send PID CONTROLLER SENSOR DELAY Select sensor delay. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 43/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...
  • Page 44 ‘Service Box 2‘) Go to ‘Setup / Control Parameter’ menu. Send PID CONTROLLER SETPOINT RAMP Select setpoint ramp. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 44/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 45 ‘Service Box 2‘) Go to ‘Setup / Control Parameter’ menu. Select valve Send PID CONTROLLER VALVE SPEED speed. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 45/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 46: Tuning Of Pressure Control Performance With Fixed Algorithm

    Flow range: Pressure set points and gas flow for optimization: 7 Torr 6 Torr Gas flow 4slm VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 46/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...
  • Page 47 The optimal P-Gain value is found if the transition from SP2 to SP1 results in a slight pressure over shoot. It does not matter if there is still a deviation between SP1 and actual pressure. Example: VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 47/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 48 SP2 exactly. Example: Note: Check control performance over the whole control range with parameters above. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 48/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 49 Pumping speed (l/s) and pump type (e.g. turbo pump) System description Problem description Send diagnostic file with and all required information to tuning-support@vat.ch VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 49/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...

  • Page 50: Tuning Of Control Performance With Soft Pump Algorithm

    The VAT soft pump controller requires a pump down time shorter than 10 sec. for good control results. If the required pump down time is longer than 10 sec., the pump down curve has to be partitioned into sections shorter than 10 sec. with corresponding end pressure.
  • Page 51 If the pressure oscillates around the ideal pump down line or if the valve position oscillates, P gain is too high. P gain is optimized if the pressure follows the ideal pump down line closely and the valve position is not oscillating at all. Example: VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 51/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 52 Pumping speed (l/s) and pump type (e.g. turbo pump) System description Problem description Send diagnostic file with and all required information to tuning-support@vat.ch VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 52/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...

  • Page 53: Devicenet Interface

    Country. The terms Object, Instance, and Object Instance all refer to a specific Instance. Attribute ID – An integer identification value assigned by ODVA to an instance; this integer is unique within the object and MAC ID in which it resides VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 53/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 54: Factory Default Assemblies

    An Explicit Message consists of a Connection ID and associated messaging protocol information.Explicit messaging connections utilize a direct request / response format which allow you to access any attribute data. Explicit messaging is typically used for the setup, configuration, and calibration of your device. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 54/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 55: I/O Poll Messaging Connections

    I/O poll messaging connections, (see figure below) utilize an assembly format to group and report data from multiple objects using a single communications command. These connections are typically used for quick reporting of information (run-time). VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 55/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 56: Object

    2 Open Limit Identity Object Message Router Assembly Object DeviceNet Object Connection Object Explizit II/O CIP Network VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 56/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...

  • Page 57: Object Definition

    100 Calibration Scale 101 Positioning Speed 105 Internal Controller Gain 106 Learn Status 107 Sensor Delay 108 Ramp Time VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 57/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...

  • Page 58: Identity Object (Class Id 1)

    Use Assembly Type Input for «Set» command, and Assembly Type Output for «Get» command. This command writes/reads the respective assembly object in Explicit Mode. Note: Factory default assemblies are: Input assembly 3 / Output assembly 8 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 58/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 59: Assembly Describtion

    FP-PRESSURE / POSITION SETPOINT Output floating point SETPOINT TYPE CONTROL MODE Output floating point FP-PRESSURE / POSITION SETPOINT SETPOINT TYPE VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 59/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...
  • Page 60 FP-PRESSURE / POSITION SETPOINT Output floating point SETPOINT TYPE INDIVIDUAL CLUSTER CONTROL (ADDRESS) INDIVIDUAL CLUSTER CONTROL (ACTION) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 60/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...
  • Page 61 To activate ZERO or LEARN use 1 as data else 0 (switch data from 0 to 1). Apply always correct procedures as described in «ZERO (setup step 4)» or «LEARN (setup step 5)» VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 61/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 62: Connection Object (Class Id 5)

    (refer to list of assembly objects) CYCLING INPUT This command configures resp. reads the output assembly for change of state / cycling. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 62/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 63: Discrete Input Object (Class Id 8)

    Note: To perform either position or pressure control also correct CONTROL MODE must be selected. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 63/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 64: S-Device Supervisor Object (Class Id 48)

    Bit 2 Bit 1 Bit 0 Manufacturer Manufacturer specific reserved reserved reserved reserved reserved specific alarm warning VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 64/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...
  • Page 65 (safe state) com. error state) (safe state) 1) Refer to «Trouble shooting» for details on these fatal errors. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 65/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...
  • Page 66 104 data sets. Each data set needs to be downloaded separately. C:8202 (string) synchronize valve SYNCHRONIZATION This tunnel command starts the synchronization of the valve. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 66/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...

  • Page 67: S-Analog Sensor Object (Class Id 49)

    POSITION READING This command returns the current valve position according to selected DATA TYPE. Position range is 0 (closed) … 10’000 (open). VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 67/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 68 FULL SCALE 1…1000000 sensor full scale This command sets the full scale of sensors. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 68/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...
  • Page 69 ZERO This command initiates ZERO. Note: Refer to «ZERO (setup step 4)» for correct zero procedure. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 69/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 70: S-Singel Stage Controller Object (Class Id 51)

    Speed selection is effective for pressure control and position control. Open valve and close valve are always done with max. speed. Note: Refer to «Valve speed adjustment» for details. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 70/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 71 GAIN for details. This command transfers/reads the pressure limit for LEARN. Note: Refer to «LEARN (setup step 5)» for correct learn pressure limit setting. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 71/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 72 0 = ok 1 = pressure in position OPEN negativ reserved reserved reserved reserved (MSB) 16 reserved VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 72/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...

  • Page 73: Pressure Controller Object (Class Id 100)

    612 . . - . . H . - ..or 612 . . - . . U . - ..or 612 . . - . . W . - ..]. Note: Unless otherwise specified all values in the table above are in decimal notification. Hexadecimal values are indicated by the letter ‚h‘ (e.g. 31h) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 73/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 74: Definition Of Terms

    Least significant digit Set Point The flow value to which the device is controlling the flow of gas VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 74/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 75: Trouble Shooting

    - Refer to «Setup procedure, DeviceNet® configuration» for Read back from contoller is details. wrong during polling VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 75/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...
  • Page 76 - Select POSITION CONTROL mode. selected, check for V on Refer to «Position control» for details. display? VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 76/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...
  • Page 77 - Make sure a shielded sensor cable is used. If you need any further information, please contact one of our service centers. You can find the addresses on our website: http://www.vat.ch VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 77/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 78: Maintenance & Repairs

    Contamination from the process may influence the function and requires more frequent maintenance. Before carrying out any maintenance or repairs, please contact VAT. It has to be individually decided whether the maintenance/repair can be performed by the customer or has to be carried out by VAT. The fabrication number on the valve made in Switzerland Fabrication No.:...

  • Page 79: Maintenance Procedures

    In this case grease will separate to PTFE and oil. The oil may flow and contaminate the valve parts. VAT can give the following recommendations for preventive maintenance with FKM seals under clean and unheated condition: Seals Maintenance recommendation Exchange after 250’000 isolation cycles or 2’000’000 control cycles...

  • Page 80: Replacement Of Plate O-Ring

    6. Remove the plate on the other side of shaft 7. Remove the plate o-ring Soft tool 8. Replace the plate if necessary VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 80/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 81 12. Place the new o-ring at o-ring groove at one side 13. Move the o-ring in the o-ring groove on the other side VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 81/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 82 (close position). 20. Disconnect electrical POWER connection Keep fingers out of the valve opening during plate movement! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 82/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 83: Replacement Of Shaft Feedtrough Seals And Plate O-Ring

    Pay attention: Take care to the sealing surface! Allen Wrench 4. Loosen clamp coupling screw VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 83/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...
  • Page 84 7. Unfasten and remove the 2 fastening Allen Wrench screws VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 84/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...
  • Page 85 13. Lubricate the new o-ring with 0.0125 ml vacuum grease Vacuum grease For new o-ring refer to chapter spare parts. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 85/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...
  • Page 86 17. Push in the o-ring around the plate into o- ring groove equally 18. Plate with equal mounted o-ring 19. Deposit the plate on a clean surface VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 86/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 87 21. Remove mechanical unit from valve body Clean room wipes 22. Clean shaft soaked with isopropyl alcohol 23. Remove both o-rings Soft tool VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 87/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...
  • Page 88 28. Lubricate each o-ring with a slight film of 0.0125 ml vacuum grease. Vacuum grease Pay attention: If required use new o-rings VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 88/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 89 Allen torque wrench with 2.5 Nm 34. Place the plate on the shaft in the valve body VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 89/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...
  • Page 90 Cleanroom wipes 41. Assemble valve unit with control and actuating. Push axis (C) into clamp coupling VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 90/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...
  • Page 91 43. Tighten clamp coupling screw with 1.1 Nm 44. Reinstall valve into vacuum system according to chapter «Installation». VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 91/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 92: Option Board

    Ambient temperature [°C] Note: This graph shows estimated life of UltraCap PFO for reference and not as guaranteed value. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 92/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 93: Retrofit / Replacement Procedure

    Note: All boards have a fixed position into control and actuating unit. It is not possible to fit a board in other position as shown in picture above. Do not try out other positions, that may be destroy the socket of boards! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 93/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 94 POWER connectors. Loosen and remove the LOCIC connector Open end wrench 10mm screw Lift panel carefully. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 94/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...
  • Page 95 (see steps 9…7). 11. Reconnect fan cable to motor driver board (see step 6). VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 95/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...
  • Page 96 «NODE ADDRESS» and «DATA RATE» on new Interface board that you wrote down on step 1. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 96/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 97: Drawing

    Body with mechanism Lever complete Body complete Adapter flange, rod with bearing Plate Rotary feedtrough seals Plate O-ring VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 97/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...

  • Page 98: Spare Parts

    ® vacuum (Viton N-5100-204 ® Plate O-ring (FKM, e.g. Viton 365576 Vacuum grease 206792 (2ml), 206793 (5ml) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 98/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...

  • Page 99: Control And Actuating Unit

    Option board with PFO module 378002 (power failure option) Option board 376837 with SPS and PFO module VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 99/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...

  • Page 100: Accessories

    61532 - ..- ..Centering ring Aluminum 32034-KAZV with Viton o-ring (for ISO-KF and ISO-F installation Stainless steel 32034-KEZV only) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 100/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...

  • Page 101: Warranty

    (including any delay in or failure to deliver), packaging, storage or use of any product sold or delivered by VAT shall fail to conform to the foregoing warranty or to the...
  • Page 102 Installation, Operating & Maintenance Instructions Series 615 DN 40 (I.D. 1½”), DeviceNet This Page Intentionally Left Blank VAT Vakuumventile AG, CH-9469 Haag, Switzerland 603476EA 102/102 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2013-07-25...

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