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VAT 612 Series Installation, Operating, & Maintenance Instructions

Butterfly pressure control valve
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Butterfly Pressure Control Valve
with RS485 interface
This manual is valid for the valve ordering number(s):
61234-KAAJ-0002
configured with firmware 612P.1E.65
The fabrication number is indicated on each product as per the label
below (or similar):
ma de in Swit zerlan d
Fab rica tio n No .:
61 2 . . – . . . . – . . . . / . . . .
A – . . . . . .
Explanation of symbols:
Read declaration carefully before you start any other
action!
Attention!
Loaded springs and/or air cushions are potential
hazards!
Disconnect electrical power and compressed air
lines. Do not touch parts under voltage!
Read these «Installation, Operating & Maintenance Instructions» and the enclosed «General
Safety Instructions» carefully before you start any other action!
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com
Installation, Operating & Maintenance Instructions
Series 612 DN 50 (I.D. 2"), RS485
Fabrication num ber
sample picture
Keep body parts and objects away from the valve
opening!
Hot surfaces; do not touch!
Wear gloves!
290089EA
2011-06-21
1/65

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Summary of Contents for VAT 612 Series

  • Page 1 Do not touch parts under voltage! Read these «Installation, Operating & Maintenance Instructions» and the enclosed «General Safety Instructions» carefully before you start any other action! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 1/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 2 VAT products. The VAT firmware contains a limited, time unlimited user license. The VAT firmware may not be used for purposes other than those intended nor is it permitted to make copies of the VAT firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to other people.

  • Page 3: Table Of Contents

    Durability of power fail battery ......................56 5.2.2 Retrofit / replacement procedure ....................... 57 6 Drawing................................... 60 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 3/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-06-21...
  • Page 4 Control and actuating unit..........................62 Accessories ..............................63 7.4.1 Centering ring with Viton o-ring ......................63 8 Warranty ................................. 64 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 4/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-06-21...

  • Page 5: Use Of Product

    This product is a Butterfly control valve for downstream pressure control in vacuum systems. Use product for clean and dry indoor vacuum applications under the conditions indicated in chapter «Technical data» only! Other applications are only allowed with the written permission of VAT. VAT Vakuumventile AG, CH-9469 Haag, Switzerland...

  • Page 6: Technical Data

    Refer to chapter «Sensor supply concepts» for details. Refer to chapter «Schematics» for details. PFO = Power Failure Option. Refer to «Behavior in case of power failure» for details. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 6/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 7: Valve Unit

    150 l/s Dimensions Refer to dimensional drawing of specific valve ordering number (available on request) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 7/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-06-21...

  • Page 8: Installation

    Do not connect or disconnect sensor cable when device is under power. Connection overview Connectors at controller panel Ground connection VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 8/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-06-21...
  • Page 9 Note: To provide power to the valve motor pins 4 and 8 must be bridged, otherwise motor interlock is active and the valve enters the safety mode and is not operative. Refer also to «Safety mode». This valve may optionally be equipped with a heating device. Connect VAT heating device according to manual of respective heating device.

  • Page 10: Tightening Torque

    The stress has to be relieved by suitable means. The following forces are admissible: Axial tensile or Bending moment «M» compressive force «F » lbf. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 10/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-06-21...

  • Page 11: Admissible Forces At Controller

    F = Force a = middle of aluminium part of controller (b / 2), c = pedestal 400 N VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 11/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 12: Requirements To Sensor Connection

    Dynamic stray magnetic fields may introduce noise to sensor output and should be avoided or shielded. Electrical connection VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 12/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 13: Ground Connection

    It is also possible to connect the ground strap at system chamber if it is well connected to PE. Note: Avoid low chassis cross section to the system PE connection. (Min. same cross section as ground strap) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 13/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 14: Sensor Supply Concepts

    612 . . - . . A . - ../ 612 . . - . . C . - ..SPS module included Note: The SPS module can be retrofitted. Refer to chapter «Retrofit / replacement procedure» for instruction. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 14/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 15: Power And Sensor Connection (±15 Vdc Sensors) Using Sps Module

    • Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 15/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 16: Rs485 Interface Connection

    The service port (connector: SERVICE) allows to connect the valve to a RS232 port of a computer. This requires a service cable and software from VAT. You can either use our freeware 'Control View', which can be downloaded from www.vatvalve.com or purchase our 'Control Performance Analyzer'.

  • Page 17: Local Operation

    Local operation means that the valve is operated via the service port using a computer or the Service Box 2. When using a computer, a service cable and a software from VAT are required. You can either download our freeware 'Control View' from or purchase our 'Control Performance Analyzer'.

  • Page 18: Safety Mode

    Refer also to chapter «Display information». Valve position after power up is closed Valve position after power up is open VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 18/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 19: Behavior In Case Of Power Failure

    1) SPS = optional ±15 VDC Sensor Power Supply module 2) PFO = Power Failure Option VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 19/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 20 Digit 2 Digit 3 Digit 4 Fatal error occurred Error code. Refer to «Trouble shooting» for details VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 20/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-06-21...

  • Page 21: Setup Procedure

    (‘Control View’ or ‘Control Performance Analyzer’) details) Send INTERFACE CONFIGURATION 1 Do configuration in menu ‘Setup / Interface’. Send RANGE CONFIGURATION VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 21/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-06-21...

  • Page 22: Valve And Sensor Configuration

    Enable or disable ZERO function in menu ‘Setup / Sensor’. Send SENSOR CONFIGURATION Do sensor configuration in menu ‘Setup / Sensor’. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 22/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-06-21...

  • Page 23: Zero

    Note: Learn may take several minutes. Do not interrupt the routine as a single full run is required to ensure fast and accurate pressure control. The PID controller covers 5% to 5000% of the gas flow which was used for learn. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 23/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 24 [sccm] = 39.4 • p • C max. pressure to control [Torr] required lower conductance [l/s] VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 24/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-06-21...

  • Page 25: Close Valve

    (Refer to chapter «RS485 control commands» for ‘Service Box 2‘) details) Select or enter pressure setpoint Send PRESSURE CONTROL VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 25/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-06-21...

  • Page 26: Tuning Of Control Performance

    Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 26/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-06-21...
  • Page 27 ‘Service Box 2‘) Go to ‘Setup / Control Parameter’ menu. Send Select sensor delay. PID CONTROLLER CONFIGURATION VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 27/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-06-21...
  • Page 28 ‘Service Box 2‘) Go to ‘Setup / Control Parameter’ menu. Send Select setpoint ramp. PID CONTROLLER CONFIGURATION VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 28/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-06-21...

  • Page 29: Rs485 Interface

    This interface allows for remote operation by means of a command set based on the RS485 protocol. In addition there are 2 digital inputs and 2 digital outputs. Digital inputs may be operated either by switches or by voltage sources. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 29/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 30 Configuration with switches for digital inputs: Note: Do not connect other pins than indicated in the schematics above! Connector: Use only screws with 4-40UNC thread for fastening the DB-25 connector! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 30/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 31 Configuration with voltage source for digital inputs: Note: Do not connect other pins than indicated in the schematics above! Connector: Use only screws with 4-40UNC thread for fastening the DB-25 connector! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 31/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 32: Rs485 Network Topology

    HOST Valve Full duplex Wiring: 120Ω Twisted pair cable 120 Ω Twisted pair HOST Valve cable VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 32/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-06-21...

  • Page 33: Digital Inputs

    Highest priority is 1. Functions with lower priorities will not be effective as long as higher priority functions are active. These digital inputs have higher priority than all RS485 commands. RS485 commands will not be accepted while digital inputs are active. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 33/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 34: Command Syntax

    Example Description: Send “Close” command to valve with RS485 device address 015 Command: #015C:[CR][LF] Answer: #015C:[CR][LF] VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 34/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-06-21...

  • Page 35: Control Commands

    SETPOINT. Note: Reading returns pressure setpoint only in case pressure control is selected, otherwise position setpoint is returned. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 35/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 36: Inquiry Commands

    «RS485 setup commands, RANGE CONFIGURATION» for details This function returns the actual pressure. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 36/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 37 Note: In simulation mode the valve can demonstrate pressure control capability independent of other equipment such as vacuum chamber, flow controller and gauge. Normal operation is not possible when simulation is running. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 37/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 38 2 (-1400000 ... 01400000 = -1.400000V ... +1.400000V) This function returns the sensor 2 offset voltage (adjusted by ZERO). VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 38/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 39 STATUS See in chapter «Trouble shooting» for details. This function returns an error code in case of any malfunction of the device. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 39/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 40 (20 hexadecimal) This function returns an identification code. This code is unique for each valve and allows tracing. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 40/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 41: Setup Commands

    0 = full duplex, 1 = half duplex 000 (reserved, do not change) This function defines the interface configuration for the valve. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 41/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 42 High range / Low range sensor full scale ratio * 1’000 (1000 … 100000). In case of a 1 sensor valve use any value within the valid range. This function does the sensor configuration for pressure control. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 42/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 43 Above picture shows a 2 sensor system. In this configuration sensor 2 covers low range (100 mTorr) and sensor 1 covers high range (1 Torr). RANGE CONFIGURATION for PRESSURE resp. SENSOR READING is set to 10’000. Switchover between sensors is done automatically. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 43/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 44 104 data sets. Each data set consists of 8 data bytes and needs to be uploaded separately. Note: Make sure that all 104 data sets will be uploaded. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 44/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 45 00 = reset service request bit from WARNINGS RESET 01 = reset FATAL ERROR (restart control unit) This function resets warnings and errors. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 45/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 46: Error Messages

    Command not accepted due to synchronization, CLOSED or OPEN by digital input, [E:][000082][CR][LF] safety mode or fatal error Hardware Command not applicable for hardware configuration [E:][000041][CR][LF] VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 46/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-06-21...

  • Page 47: Trouble Shooting

    - Provide power to motor to allow for operation. Motor Interlock is open - Refer to «Electrical connection» for details. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 47/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-06-21...
  • Page 48 ZERO. - Enable ZERO. Refer to «Valve - ZERO disabled? configuration» for details. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 48/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-06-21...
  • Page 49 If you need any further information, please contact one of our service centers. You can find the addresses on our website: http://www.vat.ch VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 49/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 50: Maintenance & Repairs

    Contamination from the process may influence the function and requires more frequent maintenance. Before carrying out any maintenance or repairs, please contact VAT. It has to be individually decided whether the maintenance/repair can be performed by the customer or has to be carried out by VAT. The fabrication number on the valve made in Switzerland Fabrication No.:...

  • Page 51: Maintenance Procedures

    A critical factor influencing the maintenance period is the lifetime of the vacuum grease, being limited under increased temperature. In this case grease will separate to PTFE and oil. The oil may flow and contaminate the valve parts. VAT can give the following recommendations for preventive maintenance: heated ≤ 80°C *) unheated *) heated >...
  • Page 52 For ordering number refer to «Spare parts and accessories». 12 mm 4. Unfasten screws and remove plate Allen Wrench from shaft. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 52/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-06-21...
  • Page 53 (0.025 ml). 10. Lubricate each o-ring with a slight film of vacuum grease (0.0125 ml). VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 53/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 54 17. Center plate. Allen Wrench Feeler gauge 0.04 mm Adequate feeler gauge 18. Tighten plate screws with 2 Nm. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 54/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-06-21...
  • Page 55 Allen Wrench 20. Tighten clamp coupling with 1.1 Nm. 21. Reinstall valve into vacuum system according to chapter «Installation». VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 55/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 56: Option Board

    Ambient temperature [°C] Note: This graph shows estimated life of UltraCap PFO for reference and not as guaranteed value. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 56/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 57: Retrofit / Replacement Procedure

    Note: All boards have a fixed position into control and actuating unit. It is not possible to fit a board in other position as shown in picture above. Do not try out other positions, that may be destroy the socket of boards! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 57/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 58 Open end wrench 4.5 mm SENSOR and INTERFACE connectors. Lift the panel carefully. Disconnect fan cable from board. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 58/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 59 12. Tighten female screw locks from POWER, SENSOR and INTERFACE connectors with Open end wrench 4.5 mm 1.1 Nm (see step 1). VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 59/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 60: Drawing

    Installation, Operating & Maintenance Instructions Series 612 DN 50 (I.D. 2”), RS485 Drawing VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 60/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-06-21...

  • Page 61: Spare Parts

    Viton®) Shaft feed through seals vacuum FKM (e.g. 353386 Viton®) Vacuum grease syringe 206792 (2ml), 206793 (5ml) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 61/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-06-21...

  • Page 62: Control And Actuating Unit

    Option board with PFO module 378002 (power failure option) Option board 376837 with SPS and PFO module VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 62/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-06-21...

  • Page 63: Accessories

    61234 - ..Aluminum 32034-KAZV Centering ring with Viton o-ring (for ISO-KF and ISO-F installation only) Stainless steel 32034-KEZV VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 63/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-06-21...

  • Page 64: Warranty

    (including any delay in or failure to deliver), packaging, storage or use of any product sold or delivered by VAT shall fail to conform to the...
  • Page 65 Installation, Operating & Maintenance Instructions Series 612 DN 50 (I.D. 2”), RS485 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290089EA 65/65 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-06-21...

This manual is also suitable for:

Rs48561234-kaaj-0002

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