VAT 613 Series Installation, Operating, & Maintenance Instructions
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VAT 613 Series Installation, Operating, & Maintenance Instructions

Butterfly pressure control valve with profibus interface vat2 profile, dn 25-320 mm, i.d. 1“ - 12", 2 sensor inputs / analog outputs / +-15v sps / pfo
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Installation, Operating &
Maintenance Instructions
Butterfly Pressure Control Valve
with Profibus interface VAT2 profile
Series 613
DN 25-320 mm (I.D. 1" - 12")
This manual is valid for the valve ordering number(s):
613 . . - . .GF - . . . .
613 . . - . .AF - . . . .
613 . . - . .HF - . . . .
613 . . - . .CF - . . . .
configured with firmware : F01.0C.28.xx
Sample picture
1087976EB.DOCX
(2 sensor inputs / analog outputs)
(2 sensor inputs / analog outputs / ±15V SPS)
(2 sensor inputs / analog outputs / PFO)
(2 sensor inputs / analog outputs / ±15V SPS / PFO)
Edition 2022-08-18

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Summary of Contents for VAT 613 Series

  • Page 1 Installation, Operating & Maintenance Instructions Butterfly Pressure Control Valve with Profibus interface VAT2 profile Series 613 DN 25-320 mm (I.D. 1“ - 12") This manual is valid for the valve ordering number(s): 613 . . - . .GF - ..(2 sensor inputs / analog outputs) (2 sensor inputs / analog outputs / ±15V SPS) 613 .
  • Page 2 VAT. Offenders are liable to pay damages. The original VAT firmware and updated state of the art versions of the VAT firmware are intended for use with VAT products. The VAT firmware contains a limited, time unlimited user license.

  • Page 3: Table Of Contents

    Series 613 Contents Description of product ..............6 Identification of product .................... 6 Firmware ........................6 Use of product ......................6 Used abbreviations ....................6 Related documents....................6 Important information....................6 Technical data ......................7 1.7.1 Control and actuating unit ................7 1.7.2 Valve unit ....................
  • Page 4 Series 613 4.11.5 Position Adaption ..................39 4.12 Interface Profibus ....................40 4.12.1 Connection ....................40 4.12.2 LEDs ......................42 4.12.3 Configuration .................... 43 4.12.4 GSD File ....................44 4.12.5 Status ....................... 44 4.12.6 Connection Loss Reaction ............... 46 4.12.7 Cyclic Data Setting ...................
  • Page 5 Series 613 Storage ......................... 118 Packaging and Transport ............119 10.1 Packaging ......................120 10.2 Transport ......................120 Disposal ..................121 Spare parts ................. 122 12.1 ISO-KF for DN 25 – 50 mm .................. 123 12.1.1 Drawing ISO-KF ..................123 12.1.2 ISO-KF valve unit - aluminum blank, without heating ......

  • Page 6: Description Of Product

    Use of product This product is a Butterfly control valve for downstream pressure control in vacuum systems. Use product for clean and dry vacuum applications only. Other applications are only allowed with the written permission of VAT. Used abbreviations Abbreviation...

  • Page 7: Technical Data

    Series 613 DESCRIPTION OF PRODUCT Technical data 1.7.1 Control and actuating unit See product data sheet. 1.7.2 Valve unit See product data sheet. 1087976EB.DOCX Edition 2022-08-18 7/129...

  • Page 8: Safety

    SAFETY Series 613 Safety Compulsory reading material Read this chapter prior to performing any work with or on the product. It contains important information that is significant for your own personal safety. This chapter must have been read and understood by all persons who perform any kind of work with or on the product during any stage of its serviceable life.

  • Page 9: Personnel Qualifications

    Series 613 SAFETY Personnel qualifications WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Safety labels Label Part No. Location on valve On protective foil covering of T-9001-156 valve opening 1087976EB.DOCX...

  • Page 10: Design And Function

    DESIGN AND FUNCTION Series 613 Design and Function Design Rotary feedthrough with double seal Integrated controller Double seal Coupling Plate Bearing Valve body Function The valve plate (5) acts as a throttling element and varies the conductance of the valve opening. The integrated controller (1) calculates the required plate position to achieve the setpoint pressure.

  • Page 11: Pressure Control System Overview And Function

    Series 613 DESIGN AND FUNCTION 3.2.1 Pressure control system overview and function Vacuum pressures are always absolute pressures unless explicitly specified as pressure differences. Valve Process chamber Gas inlet Pressure sensor(s) Sensor cable Controller and actuator Seff Cable to remote control unit Cable to power supply HV Pump Q / p...

  • Page 12: Principle Of A Pressure Control System

    DESIGN AND FUNCTION Series 613 3.2.1.1 Way of operation The controller compares the actual pressure in the process chamber given by the pressure sensor with the preset pressure. The controller uses the difference between actual and set pressure to calculate the correct position of the control valve. The controller drives the control valve into the correct position and the actual pressure again equals the set pressure.

  • Page 13: Installation

    INSTALLATION Series 613 Installation WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Initial procedure 1087976EB Edition 11.08.2022 13/129...

  • Page 14: Unpacking

    Make sure that the supplied products are in accordance with your order. • Inspect the quality of the supplied products visually. If it does not meet your requirements, please contact VAT immediately. • Store the original packaging material. It may be useful if products must be returned to VAT.

  • Page 15: Installation Into The System

    INSTALLATION Series 613 Installation into the system WARNING Valve opening Risk of serious injury. Human body parts must be kept out of the valve opening and away from moving parts. Do not connect the controller to power before the valve is installed complete into the system.

  • Page 16: Installation Hints

    INSTALLATION Series 613 4.3.1 Installation Hints Install valve into the vacuum system. Valve seat side shall face process chamber. • Do not tighten the flange screws stronger than indicated under chapter «Tightening torque». • Do not admit higher forces to the valve than indicated under chapter «Admissible forces».

  • Page 17: Admissible Forces

    INSTALLATION Series 613 4.3.3 Admissible forces NOTICE Force at valve body Forces from the weight of other components can lead to deformation of the valve body and to malfunction of the valve. Do not higher force the valve body as specified. The following forces are admissible.

  • Page 18: Admissible Forces At Controller

    INSTALLATION Series 613 4.3.4 Admissible forces at controller NOTICE Force at pedestal In case higher force is applied, the pedestal could be permanently damaged. – Do not pushing, shocking load, or stressing the valve controller – Do not deposit anything at valve controller The admissible force at valve controller in regards to the pedestal is shown in table below Overview...

  • Page 19: Tightening Torque Dns 40 - 50Mm

    INSTALLATION Series 613 4.3.5 Tightening torque DNs 40 – 50mm Tightening torques for ISO-KF flange connections depend on the type of seal which is used. Follow recommendations of seal manufacturer. 4.3.5.1 ISO-KF Clamping connections Clamping chain (example) ISO-KF ISO-KF recommended recommended Valve size tightening torque...

  • Page 20: Tightening Torque Dns 63 - 100Mm

    INSTALLATION Series 613 4.3.6 Tightening torque DNs 63 – 100mm Tighten mounting screws of the flanges uniformly in crosswise order. Observe the maximum torque levels in the following table. Higher tightening torques deforms the valve body and may lead to malfunction of the valve.

  • Page 21: Connection Overview

    INSTALLATION Series 613 Connection overview Controller IC2-H3: Ground (FE) connection System: Valve Process chamber Gas inlet Pressure sensor(s) Sensor cable(s) Controller and actuator Cable to remote control unit Cable to power supply Pump 1087976EB Edition 11.08.2022 21/129...

  • Page 22: Power-, Ground- And Sensor Connection

    4.5.1 Connection cable recommendations For Power Supply connection cables, VAT recommends: Class (min.) (Length max.) (diameter) AWG18 (shielded) 0.823 mm For Sensor & Signal connection cables, VAT recommends: Class (min.) (Length max.) (diameter) AWG22 (shielded) 20 m 0.326 mm 22/129 Edition 11.08.2022...

  • Page 23: Ground Connection

    INSTALLATION Series 613 4.5.2 Ground connection Recommendation for ground connection between controller and system chassis with cable or with ground strap. Recommended torque: 1,3…1,7Nm Chassis (FE) (Functional Earth) Controller bottom side, (sample picture) • Recommendation for ground connection cable: AWG 12 (4 mm •...

  • Page 24: Power And Sensor Supply Concepts

    INSTALLATION Series 613 4.5.3 Power and Sensor supply concepts This valve offers 3 alternative concepts to supply the sensor(s) with power. This depends on the sensor type and valve version that is used. Concepts: 24 VDC sensors: • External +24 VDC supplied to POWER connector is feedthrough to SENSOR connector. Refer to chapter «Power and sensor connection (+24 VDC sensors) ».
  • Page 25 Low range sensor may be con- nected to sensor 1 or sensor 2 input. Do configuration accordingly • VAT fuse recommendation: (a) 3 AF • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources.
  • Page 26 Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. • VAT fuse recommendation: (a) 3 AF • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. •...
  • Page 27 Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. • VAT fuse recommendation: (a) 3 AF • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. •...

  • Page 28: Drive Power Enabled Switch, Safety Mode

    INSTALLATION Series 613 4.5.4 Drive Power Enabled Switch, Safety Mode • By means of an external switch the motor power supply can be interrupted. • In this case the valve enters the ‘safety mode’. • This motor interlock prevents the valve from moving (e.g. maintenance work). •...

  • Page 29: Power Up

    INSTALLATION Series 613 Power Up After power up or possibly after a reset of the valve homing is necessary to determine the plate position. Refer to chapter Homing «4.11.2 » Power Down, Power Failure Option 4.7.1 Power down behavior in case of power failure Valve position before power failure: Reaction of valve: Closed (isolated)

  • Page 30: Service Port, Cpa Software

    INSTALLATION Series 613 Service Port, CPA software The ‘Service port is designed for ‘Local operation’ with the software CPA - Control Performance Analyzer. Note: Detailed help on the CPA is available in the help of the CPA itself. 4.8.1 How to start 1.

  • Page 31: Update

    This may result in an immediate movement of the valve depending on remote control. 4.8.2 Update It is easy to update to the latest version of the CPA which can be found on the VAT homepage: https://www.vatvalve.com/downloads/software 1087976EB Edition 11.08.2022...

  • Page 32: Display Information

    INSTALLATION Series 613 Display Information There is a 4 digit display located on the controller. It displays configuration, status and position information. For details refer to following tables. 4.9.1 Power up Description Digit 1 Digit 2 Digit 3 Digit 4 ●...

  • Page 33: Operation

    INSTALLATION Series 613 4.9.2 Operation Description / Mode Digit 1 Digit 2 Digit 3 Digit 4 INIT (start up) INIT (start up, leak tight) CLOSE OPEN C, 0…100 PRESSURE control valve position = closed, leak tight POSITION control = minimal conductance = maximum opened INTERLOCK Valve closed or open by digital input...

  • Page 34: System Settings And States

    4.10.1.2 Configuration Location: CPA/Parameters: System.Identifiaction.Configuration Parameter Description Valve Series 3-digit value representing the VAT valve series Valve Variant For some vale there exists different variants Nominal Diameter DN in mm. E.g DN250 Drive Parameter ID ID of the last drive file loaded on the valve.

  • Page 35: Statistics

    INSTALLATION Series 613 4.10.1.4 Hardware Location: CPA/Parameters: System.Identification.Hardware Parameter Description Controller Type Identification of the use controller IC2H1, IC2H2, IC2H3 … Interface Type RS232/RS485 EtherCAT DeviceNet Logic Profibus CCLink EtherNet Option Type none Cluster SPS & PFO SPS & Cluster PFO &...

  • Page 36: Warning/Error

    INSTALLATION Series 613 4.10.3 Warning/Error Location: CPA/Parameters: System.Warning/Error Parameter Description Warning Bitmap Description No Learn Data Isolation valve does not work No Sensor Active PFO Not Ready Cluster Slave Offline Fieldbus Data Not Valid Compressed Air Not Falling when valve close Compressed Air Too Low 1024 Compressed Air Too High...

  • Page 37: Valve Settings And States

    INSTALLATION Series 613 4.11 Valve Settings and States 4.11.1 States Location: CPA/Navigation/Parameters: Valve Parameter Description Actual Position Show position of the valve plate Position State Intermediate Closed Open Isolation State Not Isolated Isolated 4.11.2 Homing After power up or possibly after a reset of the valve homing is necessary to determine the plate position.

  • Page 38: Cycle Counter

    INSTALLATION Series 613 4.11.3 Cycle Counter 4.11.3.1 Control Cycle A control cycle is a complete movement of the valve, from closing to opening and back to closing, or in percentage of movement it is 200%. Each movement is added up until 200% of the movement is reached, and then the cycle counter is incremented by 1.

  • Page 39: Position Adaption

    INSTALLATION Series 613 4.11.5 Position Adaption 4.11.5.1 Usage Chamber Matching Adjustment of the conductance curve of different valves to obtain the same position at the same process points in different systems. Cluster Balance Adjusting the Position of individual valves in a valve cluster can be used to compensate certain Side- effects, e.g.

  • Page 40: Interface Profibus

    INSTALLATION Series 613 4.12 Interface Profibus Neither valve display information nor CONTROL MODE values or any other fieldbus cyclic/acyclic data are related to any fieldbus states/notation Note: - General information about PROFIBUS is available on the homepage http://www.profibus.com - The naming is in view from customer (master) PLC - Data format: All signals are transmitted and received in Motorola format (high byte first) - Float32 signals are used according the standard data format IEEE754 4.12.1...
  • Page 41 INSTALLATION Series 613 4.12.1.2 Cable The following table shows the recommended specification for cables. Measure Range Impedance 135 … 165 Ω Capacitance < 30 pF / m Resistance < 110 Ω / km Wire Diameter > 0,64 mm Conductor cross section >...

  • Page 42: Leds

    INSTALLATION Series 613 4.12.2 LEDs COM Communication Diagnostic 4.12.2.1 COM - Communication State Meaning Power Off Run, cyclic communication Green Master is in state CLEAR Green Blinking Device is not configured 0.75s on, Red Blinking acyclic 1Hz 0.25s off STOP, no communication, 0.25s on, Red Blinking cyclic 2Hz connection failure...

  • Page 43: Configuration

    INSTALLATION Series 613 4.12.3 Configuration Location: CPA/Parameters.Interface Profibus Parameter Description Station Address 1-126 0: reserved for diagnosis devices Baud Rate The GSD sets the Profibus baudrate to the auto detection mode. The controller can be set to any among the offered baud rates 9.6, 19.2, 31.25, 45.45, 93.75, 187.5, 500 [kBit/s] 1.5, 3, 6, 12 [Mbit/s] Regarding the dependency between the maximum cable length and the baud rate, recommendations...

  • Page 44: Gsd File

    GSD files can be downloaded from www.vatvalve.com/downloads Select the ‘Software & Updates’ tab and enter ‘GSD’ in the search field. All available GSD files will be listed. If the appropriate GSD file is not available, please contact VAT: www.vatvalve.com/contact 4.12.5 Status Location: CPA/Parameters.Interface Profibus...
  • Page 45 Location: CPA/Parameters.Interface Profibus.I&M0 Parameter Description Manufacturer ID Manufacturer ID of VAT Vakuumventile AG listed at www.profibus.com/IM/Man_ID_Table.xml Order ID ID of the device. This is the Order ID, or model number or SKU number of the device. It is assigned by the vendor and should be equal to customer readable markings on the device.

  • Page 46: Connection Loss Reaction

    INSTALLATION Series 613 4.12.6 Connection Loss Reaction Connection Loss Reaction defines what the valve is doing in case the connection get lost. Location: CPA/Parameters: Interface Profibus.Connection Loss Reaction Parameter Description Enable ‘True’ enables the connection loss reaction, in case of ‘False’ there is no reaction on a connection loss State Shows if the connection is interrupted:...

  • Page 47: Cyclic Buffers

    INSTALLATION Series 613 4.12.8 Cyclic Buffers 4.12.8.1 OUTPUT Byte Slot Name Size Data Type Description Default Byte Range 0 - 3 Target Pressure SINT32 or Used as the target value In case the valve is in pressure mode (5), 0 - 1’000’000 FLOAT 4 - 7 Target Position...
  • Page 48 INSTALLATION Series 613 General Control – Bitmap Name Description Zero Change of the bit from 0 to 1 imitates the ZERO adjust. The actual pressure signal is set to Zero Adjust Target Pressure (normally 0) The valid range for adjustment is limited to range from -1.4V to+1.4V. Otherwise, the sensor must be adjusted! Not used Reserved Ping Pong Tx BIT...
  • Page 49 Series 613 INSTALLATION 4.12.8.2 INPUT Byte Slot Name Size Data Type Description Default Bytes Range 0 - 3 Actual Pressure SINT32 or Represents the current prevailing Pressure in the set Range. 0 - 1’000’000 FLOAT 4 - 7 Pressure Sensor 1 SINT32 or In case of default valid range: Physical full-scale value of the sensor (10 0 - 1’000’000...
  • Page 50 INSTALLATION Series 613 General Status – Bitmap Name Description Fieldbus Data Valid Communication over the bus is running errorless Zero Executed ZERO successful executed, active for 2 seconds Ping Pong RX Inverted bit “Ping Pong TX” from ‘General Control setpoint’ bitmap. Details given in chapter Ping Pong Bit. Pressure Simulation Internal pressure simulation is active.
  • Page 51 Series 613 INSTALLATION Extended Warnings – Bitmap Name Description Remote Control Not Possible Access Mode Local is active, change to Access Mode Remote or Access Mode Locked Actual Set Control Mode Not Allowed Not possible to switch the actual Control Mode to Control Mode Target because of reasons: •...
  • Page 52 INSTALLATION Series 613 4.12.8.3 PKW mechanism for processing parameters PKW is a mechanism used for handling acyclic processing parameters within the Profibus buffer content periodic transfer. Through that it allows to monitor and change parameter data over the cyclic data communication. Selection of the parameter and the action Response of action result and value Telegram...
  • Page 53 Series 613 INSTALLATION Rules for processing requests/responses • A request or a response can only ever refer to one parameter. • The master must repeat a request continuously until it has received the appropriate response. • The master detects the response to a request it has sent by - evaluating the response identifier - evaluating the parameter number PNU - evaluating the parameter index IND if necessary, or...
  • Page 54 INSTALLATION Series 613 4.12.8.4 Parameter List Group Sub-Group Name Data Type Acc NV Description [hex] Sensor Sensor Operation Mode UINT8 RW NV Pressure source for pressure control 0: No Sensor 1: Sensor 1 (S1) 2: S1 High | S2 Low | Soft Switch 3: Sensor 2 (S2) 4: S2 High | S1 Low | Soft Switch 7: S1 High | S2 Low | Target Pressure...
  • Page 55 Series 613 INSTALLATION Group Sub-Group Name Data Type Acc NV Description [hex] Adaptive Type UINT8 RW Methodology, how the Learn table data should be calculated 0: Standard 1: Short 2: Calculated Learn Open Speed UINT1 RW NV 1000 1000 Open Speed during learn process (Standard) Maximum Pressure UINT1...
  • Page 56 INSTALLATION Series 613 Group Sub-Group Name Data Type Acc NV Description [hex] Ramp Type UINT8 RW NV Used Trajectory form 0: Linear 1: Logarithmic Controller 2 Ramp Time FLOAT RW NV 1E^6 Time in sec to reach target pressure (PI)* Ramp Time Mode UINT8 RW NV 0: Ramp Time (maximal time reaching target pressure)

  • Page 57: Troubleshooting

    Series 613 INSTALLATION 4.12.8.5 Ping Pong With the Ping-pong mechanism the master can verify that the slave has read the PDO buffer content sent by the master. Principle: Master sets the Ping-pong bit in the object “General Control Setpoint”. When the slave receives the value of “General Control Setpoint”, the slave will invert this Ping-pong bit and put it into Ping-pong of “General Status”...

  • Page 58: Pressure Sensor

    INSTALLATION Series 613 4.13 Pressure Sensor 4.13.1 Mechanical connection requirements Fast and accurate pressure control requires a fast sensor response. Sensor response time: < 50ms. The sensor is usually connected to the chamber by a pipe. The line must be short enough and the conductance must not be reduced by a too small line diameter or a low conductance shut-off valve, To maintain that the response time is not degraded by this connection it needs to meet the following requirements:...

  • Page 59: Configuration

    Series 613 INSTALLATION 4.13.2 Configuration The CPA window shows a good overview of the sensor settings: The valve supports 2 sensors. Zero Adjust is for offset compensation of linear sensors Crossover is automatic switch over between 2 linear sensors 1087976EB Edition 11.08.2022...
  • Page 60 INSTALLATION Series 613 Location: CPA/Navigation/Parameters: Pressure Sensor.Sensor 1, Pressure Sensor.Sensor 2 Parameter Description Available Set to ‘True’ if a sensor is connected Enable Set to ‘True’ if the sensor signal is used for pressure control Input Source ‘Analog’ Sensor has an analog voltage interface and is direct connected to the valve.

  • Page 61: Crossover (2 Sensor Operation Mode)

    Series 613 INSTALLATION 4.13.3 Crossover (2 sensor operation mode) If two sensors are connected to the controller uses both for pressure control and pressure feedback. The controller selects each sensor or blends both sensor signals to the “Actual Pressure” used for control and feedback.

  • Page 62: Zero Adjust

    INSTALLATION Series 613 4.13.4 Zero Adjust Zero Adjust allows for the compensation of the sensor offset voltage. Note: A maximum offset voltage of +/- 1.4 V can be compensated. Location: CPA/Navigation/Parameters: Pressure Sensor.Zero Adjust Parameter Description Zero Adjust.Sensor Selection Select the sensor for the zero adjust: •...

  • Page 63: Logarithmic Pressure

    Series 613 INSTALLATION 4.13.5 Logarithmic Pressure To control wide pressure ranges, it is advantageous to control with a logarithmic signal. Note: Only the PI and the Softpump controller can control with a logarithmic signal. Adaptive controller needs a linear signal. Location: CPA/Parameters: Pressure Sensor.General Settings.Logarithmic Pressure Parameter Description...

  • Page 64: Power Connector Digital Io

    INSTALLATION Series 613 4.14 Power Connector Digital IO Do not connect other pins than indicated in the schematics! Use only screws with 4-40UNC thread for fastening the DA-15 connector! 4.14.1 Digital Input 4.14.1.1 Connection Default Function Interlock Open INPUT 1 INPUT 2 Interlock Close COMMON...

  • Page 65: Digital Output

    Series 613 INSTALLATION 4.14.2 Digital Output 4.14.2.1 Connection Default Function Open OUTPUT 1 OUTPUT 2 Closed COMMON 4.14.2.2 Parameter, Configuration Location: CPA/Navigation/Parameters: Power Connector IO.Digital Output Parameter Description Enable 1 enables the output State 0 Not active 1 Active Functionality 0 OPEN valve is fully open 1 CLOSE...

  • Page 66: Operation

    OPERATION Series 613 Operation WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. WARNING Valve opening Risk of serious injury. Human body parts must be kept out of the valve opening and away from moving parts. Do not connect the controller to power before the valve is installed complete into the system.

  • Page 67: Access Mode

    Series 613 OPERATION Access Mode 5.1.1 Overview Defines whether the interface or the CPA via the service port has the rights to control the valve Location: CPA/Parameters System Access Mode Control Permission Comment Local Remote INTERFACE Master CPA can switch to Local Locked INTERFACE Master CPA can’t switch to Local...

  • Page 68: Control Mode

    OPERATION Series 613 Control Mode The Control Mode represents the state machine of the valve. Writing to Control Mode requests a change in the state while reading Control Mode returns the actual state of the state machine. Init State after power up. Remains if Homing is not started or no Exception occurs Homing The valve performs the homing procedure to initialize the position.

  • Page 69: View

    Series 613 OPERATION CPA/Parameter: System.Control Mode Location: 5.2.1 View First digit on display Init Homing Close Open Pressure Control Position Interlock Open or Close Hold Learn Safety Mode Power Failure Error 1087976EB Edition 11.08.2022...

  • Page 70: Pressure Control

    OPERATION Series 613 Pressure Control 5.3.1 Controller units The valve has four identical pressure controller units. Controller Selector defines which unit is used for the pressure control. Controller Selector Controller 1 Controller 2 Controller 3 Controller 4 Most applications do not need more than one controller unit. But if the result of the pressure control does not meet the expectations, different controller units can be an option for optimization: With the four controller units it is possible to use a certain controller unit for a specific pressure set point.

  • Page 71: Control Algorithm

    Series 613 OPERATION 5.3.2 Control algorithm 5.3.2.1 Overview Adaptive This is the most dynamic control algorithm. Before using adaptive control algorithm, a special procedure called “learn” must be executed first (see chapter below). The valve will observe the behavior of the vacuum system by moving the valve to different positions. During the learn procedure the valve performs an internal parameter estimation correspondent to the vacuum system.
  • Page 72 OPERATION Series 613 5.3.2.2 Choose correct control algorithm Constant gas flow available Constant gas flow System Configuration not available Tv*<= 500 sec Tv* > 500 sec Downstream Process chamber Adaptive Control valve Pump Upstream Control valve Process chamber Pump Soft Pump Soft Pump * Use the formula below to define the applicable pressure control algorithm.

  • Page 73: Adaptive Algorithm

    Series 613 OPERATION 5.3.3 Adaptive algorithm This control algorithm may be used for downstream pressure control. Before using adaptive control algorithm, a special procedure called “learn” must be executed first (see chapter below). 5.3.3.1 Control Parameter Location: CPA/Navigation/Parameters: Pressure Control.Controller x.Control Settings Parameter Description Gain Factor...
  • Page 74 OPERATION Series 613 5.3.3.2 Learn LEARN adapts the PID controller of the valve to the vacuum system and its operating conditions. LEARN must be executed only once during system setup. The LEARN routine determines the characteristic of the vacuum system. Based on this, the PID controller is able to run fast and accurate pressure control cycles.
  • Page 75 Series 613 OPERATION Parameters Executing Location: CPA/Navigation/Parameters: Pressure Control.Adaptive Learn Parameter Description Start Learn Starts the learn Type Standard A positioning sequence is executed and various measured values are recorded in the process. Short Opens the valve and measures the pumping speed. Information about flow and volume is required.
  • Page 76 OPERATION Series 613 Parameters Learn Bank Location: CPA/Navigation/Parameters: Pressure Control.Adaptive Learn.Learn Bank x Parameter Description Status Not Used Empty learn bank Available Data available. Evaluation possible with the pressure position curve in the CPA/Navigation/Adaptive Learn Data Available with The data may still be suitable for pressure control. warnings Evaluation possible with the pressure position curve in the CPA/Navigation/Adaptive Learn Datas...
  • Page 77 Series 613 OPERATION Execute a learn procedure Set specific gas flow according to calculation below or the calculation in the CPA  ‘Adaptive Learn’ window: Learn does not need to be performed with the process gas. Instead N or Ar may be used. Set parameter Bank Selection, if only one learn is used take Bank 1.
  • Page 78 OPERATION Series 613 Gasflow calculation for Learn Do not apply a different gasflow for learn than determined below. Otherwise pressure control performance may be insufficient. Required pressure / flow regime must be known to calculate the most suitable learn gas flow for a specific application.
  • Page 79 Series 613 OPERATION Evaluation and exchange of learn data Location: CPA/Navigation/Adaptive Learn Data The window shows the pressure position curve of the stored data in the learning banks With the menu buttons it is possible to exchange data between learn banks and between valves. 1087976EB Edition 11.08.2022...
  • Page 80 OPERATION Series 613 5.3.3.3 Tuning Normally the default settings will result in good pressure control performance. For some applications tuning may be required to improve performance. The tuning procedures for each parameter (grey boxes) and its default values are described separately below. Strictly keep the procedure order. 80/129 Edition 11.08.2022...
  • Page 81 Series 613 OPERATION Gain Factor adjustment The Gain Factor effects: Stability, Response time Adjustment range is from 0.0001 to 100.0 - Higher gain results in: faster response, higher over- undershoot of pressure - Lower gain results in: slower response, lower over- undershoot of pressure Adjustment procedure: 1.
  • Page 82 OPERATION Series 613 Setpoint Ramp adjustment Setpoint Ramp effects: Undershoot of pressure, Response time Note: The ramp is described in detail in capital Pressure Ramp. This parameter defines the time that is used to decrease / raise pressure between 2 setpoints. Especially in pressure decrease situations at low flows pressure response can be improved much by adapting setpoint ramp time.
  • Page 83 Pressure / flow / gas conditions to be controlled • Chamber volume • Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 1087976EB Edition 11.08.2022...

  • Page 84: Pi Algorithm

    OPERATION Series 613 5.3.4 PI algorithm This control algorithm may be used for downstream or upstream pressure control depending on configuration. 5.3.4.1 Control Parameter Location: CPA/Navigation/Parameters: Pressure Control.Controller x,Control Settings Parameter Description P-Gain The P-Gain is the proportional factor of the fixed control algorithm. A higher P-Gain results in faster response, higher over- / undershoot of pressure.
  • Page 85 Series 613 OPERATION 5.3.4.2 Tuning The PI parameters of the pressure controller require correct adjustment. These parameters must be set once during system setup and are stored in the device memory which is power fail save. Based on the PI controller configuration, the valve is able to run fast and accurate pressure control cycles. The PI parameters can be evaluated using below instruction.
  • Page 86 OPERATION Series 613 Optimizing P-Gain While optimizing P-Gain, the gas flow determined above has to be constant all the time. Start optimization with P-Gain set to 1.0 and I-Gain set to 0.0. Set chamber pressure to SP2, wait until the pressure is stable. Set pressure to SP1. If the transition from SP2 to SP1 results in a significant pressure over shoot or even does not stabilize at all, the P- Gain is too high.
  • Page 87 Pressure / flow / gas conditions to be controlled • Chamber volume • Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 1087976EB Edition 11.08.2022...
  • Page 88 OPERATION Series 613 5.3.4.3 Soft Pump/Vent algorithm This control algorithm may be used to control pressure ramps during pump down or venting the chamber. This is a modified PI controller that has been optimized to start up very gently when the valve is opened.
  • Page 89 Pressure / flow / gas conditions to be controlled • Chamber volume • Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 1087976EB Edition 11.08.2022...

  • Page 90: Pressure Ramp

    OPERATION Series 613 5.3.5 Pressure Ramp Basically, the pressure ramp is used to limit the rate of pressure change. Actual Pressure Pressure Controller Target Pressure Target Pressure Used Pressure Used Ramp 5.3.5.1 Configuration Location: CPA/Navigation/Parameters: Pressure Control.Controller x.Ramp Parameter Description Enable Activate / Deactivate pressure target ramp Mode...
  • Page 91 Series 613 OPERATION 5.3.5.2 Mode Time Slope Unit: seconds Unit: Pressure / seconds Time is constant, slope varies Slope is constant, time varies Example: 2 sec Example: 10mTorr/second 5.3.5.3 Type Linear Logarithmic Exponential 1087976EB Edition 11.08.2022...
  • Page 92 OPERATION Series 613 5.3.5.4 Applications Examples Soft pump Ramp Mode = Time Ramp Time = 100 sec Ramp Type = Linear Target Pressure = 0 Minimize pressure over- or undershoots New Target Pressure without pressure ramp New Target Pressure with pressure ramp Smoothing a staircase Pressure ramp with new target pressure to the valve every second is smoothed by a 1 sec internal ramp Ramp Time = 1sec...

  • Page 93: Profile Ramp

    Series 613 OPERATION 5.3.6 Profile Ramp Profile Ramp is a Target Pressure ramp that depends on pressure ranges (segments). It is mainly used to create soft pumping or soft venting profiles. To design a profile, the segments (pressure ranges) must be defined. A segment is defined by the pressure Threshold and the Slope.
  • Page 94 OPERATION Series 613 Parameters: Location: CPA/Navigation/Parameters: Pressure Control.General Settings.Profile Ramp Parameter Description Enable Switches on/off the function Threshold Mode Defines which pressure the threshold refers to Actual Pressure Change happens if Actual Pressure reaches the Threshold Target Pressure Used Change happens if Target Pressure Used reaches the Threshold Ramp Type Defines the shape of the ramp Linear...
  • Page 95 Series 613 OPERATION Segment x This is the upper limit of the segment. The lower limit is defined by the next lower Threshold, or Threshold the lower limit is 0 if there is no lower Threshold. If the value exceeds the top threshold, the slope value of the top segment is used (Segment 1 in below example) Segment x Slope Defines the slope (mBar*/sec) in the segment...

  • Page 96: Automated Controller Selector

    OPERATION Series 613 5.3.7 Automated Controller Selector With the 4 Controllers it is possible to define different pressure control settings. The Automated Controller Selector can select one of the 4 Controllers depending on Target Pressure (Mode: Threshold) or Up-Down Control (Mode: Pressure Direction) Mode:...

  • Page 97: Control Position Restriction

    Series 613 OPERATION Parameter: Location: CPA/Navigation/Parameters: Pressure Control.General Settings.Automated Controller Selector Parameter Description Enable Switches on/off the function Threshold Mode Pressure Direction Used if Mode = Threshold Controller Selector Bitmap Defines which controllers are automatically selected Threshold Condition Used if Mode = Threshold Lower or Equal Equal...

  • Page 98: Position Control

    OPERATION Series 613 Position Control 5.4.1 Parameter Location: CPA/Navigation/Parameters: Position Control Parameter Description Actual Position Position of the valve plate Range depends on Position Scaling setting (on Interface and CPA) Target Position Desired position of the valve plate Range depends on Position Scaling setting (on Interface and CPA) Position Control Speed Speed of the valve in Control Mode Position 0.001 ..

  • Page 99: Operation Under Increased Temperature

    Series 613 OPERATION 5.4.2.2 Mode Time Slope Unit: seconds Unit: %* / seconds Time is constant, slope varies Slope is constant, time varies Example: 2 sec Example: 10% / sec Target Position Target Position Valve Position Valve Position * Unit adjustable 5.4.2.3 Type Linear...

  • Page 100: Trouble Shooting

    TROUBLE SHOOTING Series 613 Trouble shooting Warnings A warning does not lead to an interruption of valve operation. Location: CPA/Parameters: System.Services Parameter Description Warning Bitmap Description No learn data available for adaptive control Position indicator signal of the external isolation valve incorrect. No Sensor Active PFO Not Ready Cluster Slave Offline...
  • Page 101 Series 613 TROUBLE SHOOTING Failure Check Action Display does not light up - 24 V power supply - Connect valve to power supply according to ‘Power, ground and sensor connection’ and make sure that power supply is working. Remote operation does not work - Local operation via service port - Switch to remote or locked operation active...

  • Page 102: Errors

    Emulates a power cycle of the valve Error Recovery Attempts to reset the Control Mode Error without restarting the valves Create a diagnostic file before recovery or restart if the error is to be analyzed by VAT 6.2.2 Error Bitmap...

  • Page 103: Error Number

    • Plate not mounted Motion controller: Internal voltage error Check power supply Motion controller: Internal error temperature Check for a heat accumulation Contact vat support • Axis inverted Motion controller: Unexpected behavior • Encoder not connected • Break not released •...
  • Page 104 TROUBLE SHOOTING Series 613 Code Description Solution SFV: Motion controller failure in master-slave Contact vat support communication Compressed air error Check compressed air Check if power supply is ok and is able to deliver needed Power supply, low voltage detected power •...

  • Page 105: Troubleshooting List

    Series 613 TROUBLE SHOOTING Troubleshooting List Failure Check Action Display does not light up - 24 V power supply - Connect valve to power supply according to ‘Power, ground and sensor connection’ and make sure that power supply is working. Remote operation does not work - Local operation via service port - Switch to remote or locked operation...

  • Page 106: Maintenance

    Before carrying out any maintenance, please contact VAT. It has to be individually decided whether the maintenance can be performed by the customer or has to be carried out by VAT. Please write down the fabrication number of the valve before contact VAT. Refer to chapter «Identification of product»...

  • Page 107: Maintenance Procedures

    Replacement of Option board. Refer to chapter: «Replacement of Option board» Required frequency of cleaning and replacement of seals is depending on process conditions. VAT can give the following recommendations for preventive maintenance: heated ≤ 80 °C Replacement of unheated heated >...

  • Page 108: Replacement Of Shaft Feedthrough Seals And Valve Cleaning

    MAINTENANCE Series 613 7.2.1 Replacement of shaft feedthrough seals and valve cleaning 7.2.1.1 Required tools • • Allen Wrench 2 mm / 2.5mm Clean room wipes, isopropyl alcohol • • Allen Wrench 3 mm Vacuum grease • Feeler gauge Description Required tool Vent vacuum system on both sides of the valve.
  • Page 109 Series 613 MAINTENANCE Description Required tool Unfasten alternately the 2 mounting screws little by little. Allen Wrench If only one screw is fasten / unfasten, 3 mm the mechanical unit will be damaged. Max. difference should be less than 1 turn or 0.5 turn of the screws.
  • Page 110 MAINTENANCE Series 613 Description Required tool Allen Wrench 3mm 17. Assemble mechanical unit in reverse order as disassembled (steps 6 to 5). 18. Align pedestal parallel to valve body and tighten the 2 mounting screws with 2.5 Nm Make sure the pedestal is aligned to be parallel with the valve body 19.

  • Page 111: Replacement Of Option Board

    Series 613 MAINTENANCE 7.2.2 Replacement of Option board NOTICE Electrostatic discharge Electronic components could be damage. All work on the control and actuating unit has to be done under ESD protected environment to prevent electronic components from damage. NOTICE Burned connector pins (spark) Connector pins or electronic parts could damage, if plugged and unplugged under power.
  • Page 112 MAINTENANCE Series 613 7.2.2.1 Durability of power fail battery The curves in the graph show the estimated life of Ultra Cap PFO in the worst condition (max. sensor load = 1 A, valve heating temperature = 150 °C). If the SPS is not fully loaded (< 1 A) or heating temperature of valve body is lower than 150 °C, the corresponding life time curve will be somewhere in between the upper and the lower curve.
  • Page 113 Series 613 MAINTENANCE 7.2.2.3 Required tools • Allen Wrench 2 mm / 2.5mm • Allen Wrench 3 mm If you need any further information, please contact one of our service centers. You can find the addresses on our website: www.vatvalve.com. Description Required tool Make sure that the valve is in closed position...
  • Page 114 MAINTENANCE Series 613 Description Required tool Replacement of the option board / whole controller Unfasten the two bolts from bottom side and and dismount the controller from the actuator unit. The SPS/PFO option board has to be mounted/ dismounted from bottom side of the controller. The Controller and Interface board are fix connected and shall not be dismounted.
  • Page 115 Series 613 MAINTENANCE 1087976EB Edition 11.08.2022...

  • Page 116: Repairs

    Series 613 Repairs Repairs may only be carried out by the VAT service staff. In exceptional cases, the customer is allowed to carry out the repairs, but only with the prior consent of VAT. Please contact one of our service centers. You will find the addresses on our website www.vatvalve.com.

  • Page 117: Dismounting And Storage

    Series 613 DISMOUNTING AND STORAGE Dismounting and Storage WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Dismounting NOTICE Contamination Gate and other parts of the valve must be protected from contamination. Always wear clean room gloves when handling the valve.

  • Page 118: Storage

    DISMOUNTING AND STORAGE Series 613 Storage NOTICE Wrong storage Inappropriate temperatures and humidity may cause damage to the product. Valve must be stored at: – relative humidity between 10% and 70% – temperature between +10 °C and +50 °C – non-condensing environment NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used.

  • Page 119: Packaging And Transport

    If products are radioactively contaminated, the VAT form «Contamination and Radiation Report» must be filled out. Please contact VAT in advance. • If products are sent to VAT in contaminated condition, VAT will carry out the decontaminating procedure at the customer's expense. 1087976EB...

  • Page 120: Packaging

    Valve mechanism may get damaged if valve is in open position. Make sure that the valve is closed. Cover all valve openings with a protective foil. Pack valve appropriately, by using the original packaging material. VAT disclaims any liability for damages resulting from inappropriate packaging. 10.2 Transport NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used.

  • Page 121: Disposal

    Series 613 DISPOSAL Disposal Observe the local regulations for disposal WARNING Harmful substances Environmental pollution. Discard products and parts according to the local regulations. WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the disposal. CAUTION Risk of damage Indicates a hazardous situation which, if not avoided, may result in minor or moderate...

  • Page 122: Spare Parts

    «Identification of product». This is to ensure that the appropriate spare parts are supplied. • VAT makes a difference between spare parts that may be replaced by the customer and those that need to be replaced by the VAT service staff. •...

  • Page 123: Iso-Kf For Dn 25 - 50 Mm

    Series 613 FEHLER! VERWEISQUELLE KONNTE NICHT GEFUNDEN WERDEN. 12.1 ISO-KF for DN 25 – 50 mm 12.1.1 Drawing ISO-KF Body with mechanism Shaft kit Valve body Plate kit Shaft feedthrough seals 1087976EB Edition 11.08.2022...

  • Page 124: Iso-Kf Valve Unit - Aluminum Blank, Without Heating

    FEHLER! VERWEISQUELLE KONNTE NICHT GEFUNDEN WERDEN. Series 613 All “Items in below table“ refer to this chapter «Drawing ISO-KF» 12.1.2 ISO-KF valve unit - aluminum blank, without heating Item Description DN 25 / 1” DN 40 / 1½” DN 50 / 2” Valve size 61328 - KA .

  • Page 125: Iso-F For Dn 63 - 320 Mm

    Series 613 FEHLER! VERWEISQUELLE KONNTE NICHT GEFUNDEN WERDEN. 12.2 ISO-F for DN 63 – 320 mm 12.2.1 Drawing ISO-F Body with mechanism Shaft kit Valve body Plate kit Shaft feedthrough seals All “Items in below table“ refer to this chapter «Drawing ISO-F» 1087976EB Edition 11.08.2022...

  • Page 126: Iso-F Valve Unit - Aluminum Blank, Without Heating

    FEHLER! VERWEISQUELLE KONNTE NICHT GEFUNDEN WERDEN. Series 613 12.2.2 ISO-F valve unit - aluminum blank, without heating Item Description DN 63 / 2½” DN 80 / 3” DN 100 / 4” DN 160 / 6” DN 200 / 8” DN 250 / 10” DN 320 / 12”...

  • Page 127: Seals And Grease

    Control unit and Accessories 12.3.1 Control and actuating unit Description Part number Control and actuating unit Too many to list. Please contact VAT. Option board with SPS module 858530 (±15 VDC Sensor Power Supply) Option board with PFO module 858529...

  • Page 128: Centering Ring With Viton ® O-Ring

    FEHLER! VERWEISQUELLE KONNTE NICHT GEFUNDEN WERDEN. Series 613 12.3.3 Centering ring with VITON ® o-ring Description Valve size DN 25 / 1 DN 40 / 1½” DN 50 / 2” Product ordering number 61328 - ..61332 - ..61334 - .
  • Page 129 Series 613 This page left blank intentionally. 1087976EB Edition 11.08.2022...

This manual is also suitable for:

613-gf series613-af series613-hf series613-cf series

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