VAT 615 Series Installation, Operating, & Maintenance Instructions
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VAT 615 Series Installation, Operating, & Maintenance Instructions

Butterfly control & isolation valve
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Butterfly control & isolation valve
with extended control range
with DeviceNet interface
This manual is valid for the valve ordering number(s):
615 . . - . . GP - . . . .
615 . . - . . GQ - . . . .
615 . . - . . AP - . . . .
615 . . - . . AQ - . . . .
615 . . - . . HP - . . . .
615 . . - . . HQ - . . . .
615 . . - . . CP - . . . .
615 . . - . . CQ - . . . .
SPS = Sensor Power Supply
configured with firmware
The fabrication number is indicated on each product as per the label
below (or similar):
ma de in Swit zerlan d
Fab rica tio n No .:
61 5 . . – . . . . – . . . . / . . . .
A – . . . . . .
Explanation of symbols:
Read declaration carefully before you start any other
action!
Attention!
Loaded springs and/or air cushions are potential
hazards!
Disconnect electrical power and compressed air
lines. Do not touch parts under voltage!
Read these «Installation, Operating & Maintenance Instructions» and the enclosed «General
Safety Instructions» carefully before you start any other action!
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com
Installation, Operating & Maintenance Instructions
Series 615 DN 40-50 (I.D. 1.5" - 2"), DeviceNet
(1 sensor input)
(2 sensor inputs)
(1 sensor input / ±15V SPS)
(2 sensor inputs / ±15V SPS)
(1 sensor input / PFO)
(2 sensor inputs / PFO)
(1 sensor input / ±15V SPS / PFO)
(2 sensor inputs / ±15V SPS / PFO)
PFO = Power Failure Option
615P.1E.47 and 264420 (DeviceNet
Fabrication num ber
®
)
Keep body parts and objects away from the valve
opening!
Hot surfaces; do not touch!
Wear gloves!
sample picture
289859EA
2011-11-24
1/83

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Summary of Contents for VAT 615 Series

  • Page 1 Do not touch parts under voltage! Read these «Installation, Operating & Maintenance Instructions» and the enclosed «General Safety Instructions» carefully before you start any other action! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 1/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 2 VAT products. The VAT firmware contains a limited, time unlimited user license. The VAT firmware may not be used for purposes other than those intended nor is it permitted to make copies of the VAT firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to other people.

  • Page 3: Table Of Contents

    Durability of power fail battery ......................73 5.2.2 Retrofit / replacement procedure ....................... 74 6 Drawing................................... 78 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 3/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-11-24...
  • Page 4 Seals and grease ..........................80 Accessories ..............................81 7.3.1 Centering ring with Viton o-ring ......................81 8 Warranty ................................. 82 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 4/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-11-24...

  • Page 5: Use Of Product

    This product is a Butterfly control valve with isolation functionality for downstream pressure control in vacuum systems. Use product for clean and dry indoor vacuum applications under the conditions indicated in chapter «Technical data» only! Other applications are only allowed with the written permission of VAT. Technical data Control and actuating unit +24 VDC (±10%) @ 0.5 V pk-pk max.
  • Page 6 Refer to chapter «Sensor supply concepts» for details. Refer to chapter «Schematics» for details. PFO = Power Failure Option. Refer to «Behavior in case of power failure» for details. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 6/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 7 - Plate screw seal FKM (e.g. Viton®) others on request - Slide bearing for shaft iglidur® X VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 7/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-11-24...
  • Page 8 (615 . . - . E. . - ..) Refer to dimensional drawing of specific valve ordering number Dimensions (available on request) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 8/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 9: Installation

    Do not connect or disconnect sensor cable when device is under power. Connection overview Connectors at controller panel Ground connection VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 9/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-11-24...
  • Page 10 Note: To provide power to the valve motor pins 4 and 8 must be bridged, otherwise motor interlock is active and the valve enters the safety mode and is not operative. Refer also to «Safety mode». This valve may optionally be equipped with a heating device. Connect VAT heating device according to manual of respective heating device.

  • Page 11: Tightening Torque

    The stress has to be relieved by suitable means. The following forces are admissible: Axial tensile or Valve Bending moment «M» size compressive force «F » mm inch lbf. 1½ VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 11/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-11-24...

  • Page 12: Admissible Forces At Controller

    Admissible force «F» a = middle of aluminium part of controller (b / 2) c = pedestal 400 N VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 12/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 13: Requirements To Sensor Connection

    Dynamic stray magnetic fields may introduce noise to sensor output and should be avoided or shielded. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 13/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 14: Electrical Connection

    It is also possible to connect the ground strap at system chamber if it is well connected to PE. Note: Avoid low chassis cross section to the system PE connection. (Min. same cross section as ground strap) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 14/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 15: Sensor Supply Concepts

    615 . . - . . A . - ../ 615 . . - . . C . - ..SPS module included Note: The SPS module can be retrofitted. Refer to chapter «Retrofit / replacement procedure» for instruction. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 15/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 16: Power And Sensor Connection (+24 Vdc Sensors)

    Do not connect other pins that may damage sensors, power supply or controller! • Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 16/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 17 • Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 17/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 18: Power And Sensor Connection (±15 Vdc Sensors) Without Optional Sps Module

    Do not connect other pins that may damage sensors, power supply or controller! • Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 18/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 19 • Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 19/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 20: Power And Sensor Connection (±15 Vdc Sensors) With Optional Sps Module

    Do not connect other pins that may damage sensors, power supply or controller! • Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 20/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 21: Devicenet® Connection

    Micro Connector Pinout Male (pins) at Female (sockets) valve controller at DeviceNet cable VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 21/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-11-24...

  • Page 22: Logic I/O

    Note: Do not connect other pins than indicated in the schematics above! Example for connector: Type «Binder M8 male, 4-pole, shielded (recommended)» (99-3363-00-04). VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 22/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 23: Digital Input

    The service port (connector: SERVICE) allows to connect the valve to a RS232 port of a computer. This requires a service cable and software from VAT. You can either use our freeware 'Control View', which can be downloaded from www.vatvalve.com or purchase our 'Control Performance Analyzer'.

  • Page 24: Operation

    This valve is designed for downstream pressure control in vacuum chambers. It can be employed in a pressure control mode or a position control mode. In both cases local or remote operation is possible. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 24/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 25: Local Operation

    Local operation means that the valve is operated via the service port using a computer or the Service Box 2. When using a computer, a service cable and a software from VAT are required. You can either download our freeware 'Control View' from or purchase our 'Control Performance Analyzer'.

  • Page 26: Safety Mode

    Valve position after power up is closed Valve position after power up is open Refer also to chapter «Display information». VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 26/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 27: Behavior In Case Of Power Failure

    *). Default is not defined. Display indicates F. *) Provided that battery pack of the VAT controller is charged. Charging time after power up is 2 minutes max.. All parameters are stored in a power fail save memory. Display information...

  • Page 28: Setup Procedure

    Refer to chapter «LEARN» for details. LEARN Note: Without LEARN the valve is not able to run pressure control VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 28/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 29: Devicenet Configuration

    ® VAT offers valve-related but not general DeviceNet support. Contact us under: devicenet-support@vat.ch The node number is the device address and can be selected by two rotary switches which are on the panel. Set the most significant digit (MSD) with the middle switch and the least significant digit (LSD) with the left switch.

  • Page 30: Valve And Sensor Configuration

    ‘Setup / Sensor’. Select SENSOR MODE Do 2 sensor configuration in menu ‘Setup / Sensor’. Select SENSOR RATIO VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 30/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-11-24...

  • Page 31: Zero

    Note: Do not perform ZERO, if the base pressure of your vacuum system is higher than 1‰ of sensor full scale. We recommend disabling ZERO function in this case; refer to «Valve and sensor configuration» of the setup procedure. Otherwise incorrect pressure reading is the result. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 31/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 32: Learn

    Note: Learn may take several minutes. Do not interrupt the routine as a single full run is required to ensure fast and accurate pressure control. The PID controller covers 5% to 5000% of the gas flow which was used for learn. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 32/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 33 [sccm] = 39.4 • p • C max. pressure to control [Torr] required lower conductance [l/s] VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 33/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-11-24...

  • Page 34: Close Valve

    = position control Select or enter position setpoint Send CONTROL MODE for position = control mode Send POSITION SETPOINT VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 34/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-11-24...

  • Page 35: Pressure Control

    SENSOR 1 READING and SENSOR 2 READING». Note: Make sure that both sensors are calibrated. Note: Do not close optional gauge isolation valves during the transition phase between the sensors. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 35/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 36: Tuning Of Control Performance

    Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 36/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-11-24...
  • Page 37 Go to ‘Setup / Controller’ menu. Select PID CONTROLLER SENSOR DELAY Select sensor delay. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 37/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-11-24...
  • Page 38 Go to ‘Setup / Control Parameter’ menu. Select PID CONTROLLER SETPOINT RAMP Select setpoint ramp. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 38/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 39 ‘Service Box 2‘) commands» for details) Go to ‘Setup / Control Parameter’ menu. Select valve Select VALVE SPEED speed. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 39/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-11-24...

  • Page 40: Interface

    4)0 = Valve is neither closed nor open, 1 = Valve is CLOSED, 2 = Valve is OPEN 5)To activate ZERO or LEARN use 1 as data else 0. Apply always correct procedures as described in «ZERO (setup step 4)» or «LEARN (setup step 5)» VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 40/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 41: Assembly Object Bit Map

    SETPOINT TYPE may be set to one out of below selections, see also «Explicit messaging control commands». Description Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 Bit0 Pressure control Position control VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 41/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-11-24...
  • Page 42 Bit2 Bit1 Bit0 low byte Lowest value (0) high byte low byte Highest value (10000) high byte VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 42/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-11-24...

  • Page 43: Explicit Messaging Control Commands

    TYPE separately. Note: Unless otherwise specified all values in the table above are in decimal notification. Hexadecimal values are indicated by the letter ‚h‘ (e.g. 31h) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 43/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 44 This command writes/reads the respective assembly object. Note: Unless otherwise specified all values in the table above are in decimal notification. Hexadecimal values are indicated by the letter ‚h‘ (e.g. 31h) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 44/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 45: Explicit Messaging Inquiry Commands

    Value range is -1400 … +1400 (-1.40V … +1.40V). Note: Unless otherwise specified all values in the table above are in decimal notification. Hexadecimal values are indicated by the letter ‘h‘ (e.g. 31h) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 45/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 46 Above picture shows a 2 sensor system. In this configuration sensor 2 covers low range (100 mTorr) and sensor 1 covers high range (1 Torr). Switchover between sensors is done automatically according to «Pressure control operation with 2 sensors». VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 46/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 47 Note: Unless otherwise specified all values in the table above are in decimal notification. Hexadecimal values are indicated by the letter ‘h‘ (e.g. 31h) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 47/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 48 For meaning see table on next page. Note: Unless otherwise specified all values in the table above are in decimal notification. Hexadecimal values are indicated by the letter ‚h‘ (e.g. 31h) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 48/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 49 Refer to «Trouble shooting» for details on these fatal errors. Note: Unless otherwise specified all values in the table above are in decimal notification. Hexadecimal values are indicated by the letter ‚h‘ (e.g. 31h) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 49/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 50 Each closing of the sealing ring counts as one cycle. Note: Unless otherwise specified all values in the table above are in decimal notification. Hexadecimal values are indicated by the letter ‚h‘ (e.g. 31h) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 50/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 51: Explicit Messaging Setup Commands

    Not implemented Note: Unless otherwise specified all values in the table above are in decimal notification. Hexadecimal values are indicated by the letter ‚h‘ (e.g. 31h) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 51/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 52 615 . . - . . H . - ..or 615 . . - . . U . - ..or 615 . . - . . W . - ..]. Note: Unless otherwise specified all values in the table above are in decimal notification. Hexadecimal values are indicated by the letter ‚h‘ (e.g. 31h) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 52/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 53 Note: Refer to «ZERO (setup step 4)» for correct zero procedure. Note: Unless otherwise specified all values in the table above are in decimal notification. Hexadecimal values are indicated by the letter ‘h‘ (e.g. 31h) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 53/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 54 ASCII coded. Note: Unless otherwise specified all values in the table above are in decimal notification. Hexadecimal values are indicated by the letter ‘h‘ (e.g. 31h) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 54/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 55 Note: Refer to «Valve speed adjustment» for details. Note: Unless otherwise specified all values in the table above are in decimal notification. Hexadecimal values are indicated by the letter ‘h‘ (e.g. 31h) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 55/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 56: Trouble Shooting

    Read back from contoller is - Check poll rate - Refer to «Setup procedure, DeviceNet® configuration» for details. wrong during polling VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 56/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-11-24...
  • Page 57 - Select POSITION CONTROL mode. selected, check for V on Refer to «Position control» for details. display? VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 57/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-11-24...
  • Page 58 - Make sure a shielded sensor cable is used. If you need any further information, please contact one of our service centers. You can find the addresses on our website: http://www.vat.ch VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 58/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 59: Maintenance & Repairs

    Contamination from the process may influence the function and requires more frequent maintenance. Before carrying out any maintenance or repairs, please contact VAT. It has to be individually decided whether the maintenance/repair can be performed by the customer or has to be carried out by VAT. The fabrication number on the valve made in Switzerland Fabrication No.:...

  • Page 60: Maintenance Procedures

    In this case grease will separate to PTFE and oil. The oil may flow and contaminate the valve parts. VAT can give the following recommendations for preventive maintenance with FKM seals under clean and unheated condition: Seals Maintenance recommendation Exchange after 250’000 isolation cycles or 2’000’000 control cycles...

  • Page 61: Replacement Of Plate O-Ring

    6. Remove the plate on the other side of shaft 7. Remove the plate o-ring Soft tool 8. Replace the plate if necessary VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 61/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-11-24...
  • Page 62 12. Place the new o-ring at o-ring groove at one side 13. Move the o-ring in the o-ring groove on the other side VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 62/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 63 (close position). 20. Disconnect electrical POWER connection Keep fingers out of the valve opening during plate movement! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 63/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 64 Cleanroom wipes 23. Reinstall valve into vacuum system according to chapter «Installation» of valve manual VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 64/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-11-24...

  • Page 65: Replacement Of Shaft Feedtrough Seals And Plate O-Ring

    Pay attention: If clamp coupling is separated, assemble them at control and actuating unit. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 65/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-11-24...
  • Page 66 11. Replace the plate if necessary Cleanroom wipes soaked 12. Clean the plate and o-ring groove with isopropyl alcohol VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 66/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 67 16. Move the o-ring in the o-ring groove on the other side 17. Push in the o-ring around the plate into o- ring groove equally VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 67/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 68 21. Remove mechanical unit from valve body Clean room wipes 22. Clean shaft soaked with isopropyl alcohol VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 68/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-11-24...
  • Page 69 27. Lubricate seal contact surface of shaft with a slight film of 0.0125 ml vacuum grease Vacuum grease VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 69/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 70 32. Install mechanical unit into valve body, see picture 33. Fasten and tighten the 2 mounting screws Allen torque wrench with 2.5 Nm VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 70/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-11-24...
  • Page 71 40. If some grease on plate surface or valve body clean it with lint and dust free cloth Cleanroom wipes VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 71/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 72 43. Tighten clamp coupling screw with 1.1 Nm 44. Reinstall valve into vacuum system according to chapter «Installation». VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 72/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 73: Option Board

    Ambient temperature [°C] Note: This graph shows estimated life of UltraCap PFO for reference and not as guaranteed value. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 73/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 74: Retrofit / Replacement Procedure

    Note: All boards have a fixed position into control and actuating unit. It is not possible to fit a board in other position as shown in picture above. Do not try out other positions, that may be destroy the socket of boards! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 74/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 75 POWER connectors. Loosen and remove the LOCIC connector Open end wrench 10mm screw Lift panel carefully. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 75/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-11-24...
  • Page 76 (see steps 9…7). 11. Reconnect fan cable to motor driver board (see step 6). VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 76/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-11-24...
  • Page 77 «NODE ADDRESS» and «DATA RATE» on new Interface board that you wrote down on step 1. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 77/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 78: Drawing

    Body with mechanism Lever complete Body complete Adapter flange, rod with bearing Plate Rotary feedtrough seals Plate o-ring VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 78/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-11-24...

  • Page 79: Spare Parts

    (power failure option) Option board 376837 with SPS and PFO module *) Too many to list. Depends on configuration, please contact VAT. Valve unit All «Item» refer to chapter: «Drawing» 7.2.1 ISO-KF valve unit – aluminum hard anodized, without heating...

  • Page 80: Iso-Kf Valve Unit - Stainless Steel, Without Heating

    Vacuum grease 206792 (2ml), 206793 (5ml) For versions such as: Other valve sizes or heated valves, spare part ordering numbers are available on request. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 80/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 81: Accessories

    Centering ring Aluminum 31032-KAZV 32034-KAZV with Viton o-ring (for ISO-KF and ISO-F installation Stainless steel 31032-KEZV 32034-KEZV only) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 81/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-11-24...

  • Page 82: Warranty

    (including any delay in or failure to deliver), packaging, storage or use of any product sold or delivered by VAT shall fail to conform to the...
  • Page 83 Installation, Operating & Maintenance Instructions Series 615 DN 40-50 (I.D. 1.5“ - 2”), DeviceNet This Page Intentionally Left Blank VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289859EA 83/83 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

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