VAT 613 Series Installation, Operating, & Maintenance Instructions
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VAT 613 Series Installation, Operating, & Maintenance Instructions

Butterfly pressure control valve
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Installation, Operating &
Maintenance Instructions
Butterfly Pressure Control Valve
with DeviceNet interface
Series 613
DN 25-50 mm (I.D. 1" - 2")
This manual is valid for the valve ordering number(s):
613 . . - . .GQ - . . . .
613 . . - . .AQ - . . . .
613 . . - . .HQ - . . . .
613 . . - . .CQ - . . . .
SPS = Sensor Power Supply
configured with firmware : F01.0C.28.xx and DeviceNet FW: 966219
Sample picture
1006488EB.DOCX
(2 sensor inputs / analog outputs)
(2 sensor inputs / analog outputs / ±15V SPS)
(2 sensor inputs / analog outputs / PFO)
(2 sensor inputs / analog outputs / ±15V SPS / PFO)
PFO = Power Failure Option
Edition 2022-01-04

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  • Page 1 Installation, Operating & Maintenance Instructions Butterfly Pressure Control Valve with DeviceNet interface Series 613 DN 25-50 mm (I.D. 1“ - 2") This manual is valid for the valve ordering number(s): 613 . . - . .GQ - ..(2 sensor inputs / analog outputs) (2 sensor inputs / analog outputs / ±15V SPS) 613 .
  • Page 2 The VAT firmware may not be used for purposes other than those intended nor is it permitted to make copies of the VAT firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to other people.

  • Page 3: Table Of Contents

    Series 613 Contents Description of product ................ 6 Identification of product ....................6 Use of product ......................... 6 Used abbreviations ......................6 Related documents......................6 Important information....................... 6 Technical data ......................... 7 1.6.1 Control and actuating unit ................. 7 1.6.2 DeviceNet: ......................
  • Page 4 Series 613 4.11.2 Control parameters ..................47 4.11.3 Choose correct control algorithm ..............51 4.11.4 Tuning of control performance ................ 52 4.12 DeviceNet interface commands ..................62 4.12.1 Assembly objects .................... 62 4.12.2 Assembly object bit map ................. 63 4.12.3 Explicit messaging control commands ............
  • Page 5 Series 613 12.1.3 Seals and grease ..................106 12.1.4 Control and actuating unit ................107 12.1.5 Accessories ....................107 Appendix ..................108 1006488EB.DOCX Edition 2022-01-04 5/109...

  • Page 6: Description Of Product

    Use of product This product is a Butterfly control valve for downstream pressure control in vacuum systems. Use product for clean and dry vacuum applications only. Other applications are only allowed with the written permission of VAT. Used abbreviations Abbreviation...

  • Page 7: Technical Data

    Series 613 DESCRIPTION OF PRODUCT Technical data 1.6.1 Control and actuating unit Description Power supply input connector D-Sub, DA-15, male supply voltage +24 VDC (±10%) @ 0.5 V pk-pk max. Power consumption (control / drive) 40 W (max.) with optional SPS + 40 W with optional PFO + 10 W ®...

  • Page 8: Devicenet

    DESCRIPTION OF PRODUCT Series 613 battery pack [613 . . - . . C . - ../ 613 . . - . . H . - ..] 1 minutes max. Charging time up to 10 years @ 25°C ambient;...

  • Page 9: Valve Unit

    Series 613 DESCRIPTION OF PRODUCT 1.6.3 Valve unit Description Pressure range at 20°C (unheated on delivery) - Aluminum (613 . . - . A. . - ..) 1 × 10 mbar to 1.2 bar (abs) - Aluminum hard anodized (613 . . - . H. . - ..) 1 ×...

  • Page 10: Safety

    SAFETY Series 613 Safety Compulsory reading material Read this chapter prior to performing any work with or on the product. It contains important information that is significant for your own personal safety. This chapter must have been read and understood by all persons who perform any kind of work with or on the product during any stage of its serviceable life.

  • Page 11: Personnel Qualifications

    Series 613 SAFETY Personnel qualifications WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Safety labels Label Part No. Location on valve On protective foil covering of T-9001-156 valve opening 1006488EB.DOCX...

  • Page 12: Design And Function

    DESIGN AND FUNCTION Series 613 Design and Function Design Double seal of rotary feedthrough Integrated controller Double seal Coupling Plate Bearing Valve body Function The valve plate (5) acts as a throttling element and varies the conductance of the valve opening. The integrated controller (1) calculates the required plate position to achieve the setpoint pressure.

  • Page 13: Pressure Control System Overview And Function

    Series 613 DESIGN AND FUNCTION 3.2.1 Pressure control system overview and function Vacuum pressures are always absolute pressures unless explicitly specified as pressure differences. Valve Process chamber Gas inlet Pressure sensor(s) Sensor cable Controller and actuator Seff Cable to remote control unit Cable to power supply HV Pump Q / p...

  • Page 14: Principle Of A Pressure Control System

    DESIGN AND FUNCTION Series 613 3.2.1.1 Way of operation The controller compares the actual pressure in the process chamber given by the pressure sensor with the preset pressure. The controller uses the difference between actual and set pressure to calculate the correct position of the control valve. The controller drives the control valve into the correct position and the actual pressure again equals the set pressure.

  • Page 15: Installation

    Make sure that the supplied products are in accordance with your order. • Inspect the quality of the supplied products visually. If it does not meet your requirements, please contact VAT immediately. • Store the original packaging material. It may be useful if products must be returned to VAT.

  • Page 16: Installation Into The System

    INSTALLATION Series 613 Installation into the system WARNING Valve opening Risk of serious injury. Human body parts must be kept out of the valve opening and away from moving parts. Do not connect the controller to power before the valve is installed complete into the system.

  • Page 17: Installation Space Condition

    Series 613 INSTALLATION 4.2.1 Installation space condition Install the valve with integrated controller with space for dismantling and air circulation as shown in figure below. 70 mm Sample picture 4.2.2 Connection overview System: Valve Process chamber Gas inlet Pressure sensor(s) Sensor cable(s) Controller and actuator Cable to remote control unit...

  • Page 18: Installation Procedure

    INSTALLATION Series 613 Controller: Ground (FE) connection 4.2.3 Installation procedure All numbers in brackets refer to chapter: «Connection overview». Remove protective covers from body flanges. Install [1] valve into the vacuum system. Refer to chapter «Installation» in valve manual. • Do not tighten the flange screws stronger than indicated under chapter «Tightening torque».
  • Page 19 Refer also to chapter «Safety mode». This valve may optionally be equipped with a heating device. Connect VAT heating device according to manual of respective heating device.

  • Page 20: Tightening Torque

    INSTALLATION Series 613 Tightening torque Tighten mounting screws of the flanges uniformly in crosswise order. Observe the maximum torque levels in the following table. Higher tightening torques deforms the valve body and may lead to malfunction of the valve. 4.3.1 Mounting of CF-F flanges Tightening torques for CF-F flange connections depend on the type of seal which is used.

  • Page 21: Admissible Forces At Controller

    Series 613 INSTALLATION 4.4.1 Admissible forces at controller NOTICE Force at pedestal In case higher force is applied, the pedestal could be permanently damaged. – Do not pushing, shocking load, or stressing the valve controller – Do not deposit anything at valve controller The admissible force at valve controller in regards to the pedestal is shown in table below Overview...

  • Page 22: Heated Condition

    INSTALLATION Series 613 4.4.2 Heated condition CAUTION Hot valve Heated valve may result in minor or moderate injury. Do not touch valve and heating device during operation. Once heating is switched off (valve and system) await until the valve is cooled down complete before doing any work.

  • Page 23: Electrical Connection

    Series 613 INSTALLATION Electrical connection NOTICE Wrong connection Wrong connection may result in damage of controller or power supply. Connect all cables exactly as shown in the following descriptions and schematics. NOTICE Burned connector pins (spark) Connector pins or electronic parts could damage, if plugged and unplugged under power.

  • Page 24: Ground Connection

    INSTALLATION Series 613 4.5.1 Ground connection Recommendation for ground connection between controller and system chassis with cable or with ground strap. • Connection plates of ground strap must be total plane for a good electrical contact! • The connection point at chassis (FE) must be blank metal (not coated). It is also possible to connect the ground strap at system chamber if it is well connected to •...

  • Page 25: Power And Sensor Supply Concepts

    Series 613 INSTALLATION 4.5.2 Power and Sensor supply concepts This valve offers 3 alternative concepts to supply the sensor(s) with power. This depends on the sensor type and valve version that is used. This valve is available with an optional sensor power supply module (SPS) that converts ±15 VDC from the 24 VDC.
  • Page 26 Low range sensor may be con- nected to sensor 1 or sensor 2 input. Do configuration accordingly • VAT fuse recommendation: (a) 7 AF • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources.
  • Page 27 Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. • VAT fuse recommendation: (a) 5 AF • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. •...
  • Page 28 Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. • VAT fuse recommendation: (a) 5 AF • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. •...
  • Page 29 Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. • VAT fuse recommendation: (a) 5 AF • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. •...
  • Page 30 Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. • VAT fuse recommendation: (a) 7 AF • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. •...

  • Page 31: Digital Input/Output And Analog Output Connections

    Series 613 INSTALLATION 4.5.3 Digital Input/Output and Analog Output connections This interface allows for remote operation by means of a command set based on the DeviceNet protocol. In addition there are 2 digital inputs and 2 digital outputs. Digital inputs may be operated either by switches or by voltage sources.
  • Page 32 INSTALLATION Series 613 4.5.3.3 Digital inputs Signal Function Description Priority type This function will close the valve. Valve will be in interlock mode as long as function is activated. After deactivation of function it will remain effective until - OPEN valve digital input is active - converse DEVICENET control command have been received Digital...

  • Page 33: Devicenet® Interface Connection

    Series 613 INSTALLATION 4.5.4 DeviceNet® interface connection Connector type: Micro-style male (5 pin), connector is shown on panel refer to chapter «Installation into the system». At valve controller DeviceNet® cable Name Wire color Description Drain Bare Shield DeviceNet® power supply + Black DeviceNet®...

  • Page 34: Initial Operation

    INSTALLATION Series 613 Initial operation To enable the valve cluster for pressure control setup steps 1 to 7 must be performed. In case position control is required only it’s sufficient to perform steps 1 to 4. Setup step Description Turn on external + 24VDC power supply (and external ±15 VDC for Power up sensor power supply if required).

  • Page 35: Valve Configuration

    Series 613 INSTALLATION Valve configuration Basic valve configuration must be adapted according to application needs. Definition of valve plate position in case of: • After power up, default is ‘close‘. • Power failure, default is ‘not defined‘. Only for versions that have Power Fail Option equipped [613 .

  • Page 36: Power Failure Option

    INSTALLATION Series 613 4.7.2 Power Failure Option These settings define what the valve is doing in case the power fails. Parameter Description Enable ‘True’ enables the power fail reaction, in case of ‘False’ there is no reaction on a power fail State Current power fail state Functionality...

  • Page 37: Devicenet Interface Configuration

    ® VAT offers valve-related but not general DeviceNet support. Contact us under: devicenet- support@vat.ch 1. The node number is the device address and can be selected by two rotary switches which are on the panel.
  • Page 38 INSTALLATION Series 613 ® 4. DeviceNet offers many parameters that may be set. Many of them are not directly used to ® operate the valve but are part of the DeviceNet profile. You may set all parameters via electronic data sheet (EDS) or via explicit messaging. Setup steps 3 to 5 describe all valve specific parameters that require a setup to enable for valve operation.

  • Page 39: Sensor Configuration

    Series 613 INSTALLATION Sensor configuration 4.9.1 Sensor configuration It’s important to do proper sensor configuration. The valve internally calculates in absolute values, so the valve has to know what sensors are connected. Parameter Description Available Set to ‘True’ if a sensor is connected Enable Set to ‘True’...

  • Page 40: Sensor Crossover (2 Sensor Operation Mode)

    INSTALLATION Series 613 4.9.2 Sensor crossover (2 sensor operation mode) When two sensors are used for pressure control the crossover handles the two pressure signals to building one system pressure (Actual Pressure). Parameter Description Crossover Mode Crossover between 2 sensors (see below) Threshold High [SFS low sensor] Defines the crossover area (see below) Threshold Low [SFS low sensor]...

  • Page 41: Zero Adjust

    Series 613 INSTALLATION 4.9.3 Zero Adjust Zero Adjust allows for the compensation of the sensor offset voltage. When Zero Adjust is performed the current value at the sensor input is equated to Zero.Adjust Target Pressure. In case of a 2 sensor system both sensor inputs will be adjusted. Note: A maximum offset voltage of +/- 1.4 V can be compensated.

  • Page 42: Learn (Adaptive Control Algorithm)

    INSTALLATION Series 613 pressure reading is the result. 4.10 Learn (adaptive control algorithm) DeviceNet: LEARN adapts the PID controller of the valve to the vacuum system and its operating conditions. The DeviceNet® term for learn is “calibration service”. LEARN must be executed only once during system setup.
  • Page 43 Series 613 INSTALLATION can be up-/downloaded via ‘Control Performance Analyzer’ software or remote interface. Due to encoding the data may not be interpreted directly. By an OPEN VALVE, CLOSE VALVE, POSITION CONTROL or PRESSURE CONTROL command the routine will be interrupted. Parameter Description Bank Selection...
  • Page 44 INSTALLATION Series 613 Gasflow calculation for LEARN: Do not apply a different gasflow for learn than determined below. Otherwise pressure control performance may be insufficient. Required pressure / flow regime must be known to calculate the most suitable learn gas flow for a specific application. 1.

  • Page 45: Pressure Control

    Series 613 INSTALLATION 4.11 Pressure Control The valve has four identical pressure controller units. Controller Selector defines which unit is used for the pressure control. Most applications do not need more than one controller units. But if the result of the pressure control does not meet the expectations, the different controller units can be an option for optimization: With the four controller units it’s possible to use an own controller unit for a specific pressure working point.

  • Page 46: Pressure Control Operation With 2 Sensors

    INSTALLATION Series 613 4.11.1 Pressure control operation with 2 sensors If 2 sensor operation is enabled, changeover between the sensors is done automatically during pressure control. For configuration refer to chapter «Setup procedure». We recommend a ratio of 10:1 between the pressure gauges. Max. ratio is 100:1. High range respectively low range pressure gauge may be either connected to sensor 1 or sensor 2 input.

  • Page 47: Control Parameters

    Series 613 INSTALLATION 4.11.2 Control parameters This chapter describes the functionality of Controller 1 to Controller 4. 4.11.2.1 Control algorithm Parameter location: Pressure Control Pressure Control->Pressure Controller 1 Pressure Control->Pressure Controller 2 Pressure Control->Pressure Controller 3 Pressure Control->Pressure Controller 4 The main parameter of a controller unit is its Control Algorithm.
  • Page 48 INSTALLATION Series 613 4.11.2.2 Control Algorithm Depending on the Control Algorithm setting there are different parameters available to adjust the algorithm: Parameter Description Adaptive Gain Factor The Gain Factor is a control parameter to adapt the performance of the pressure control algorithm. A higher gain results in a faster response, higher over- / undershoots of pressure.
  • Page 49 Series 613 INSTALLATION 4.11.2.3 Pressure ramp Basically, the pressure ramp is used to limit the rate of pressure change. It can also be used to minimize over- / undershoot of pressure. Actual Pressure Pressure Controller Target Pressure Target Pressure Used Ramp Target Pressure without...
  • Page 50 INSTALLATION Series 613 4.11.2.4 Pressure ramp configuration Time Mode (Ramp Mode = Time) Slope Mode (Ramp Mode = Slope) The time within Target Pressure Used (ramp) reaches a After setting a new Target Pressure, Target Pressure new Target Pressure is defined in parameter value Used will converge the Target Pressure in the slope Ramp Time.

  • Page 51: Choose Correct Control Algorithm

    Series 613 INSTALLATION 4.11.3 Choose correct control algorithm Select the configuration what your application needs. Constant gas flow available Constant gas flow System Configuration not available Tv*<= 500 sec Tv* > 500 sec Downstream Process Adaptive pressure chamber Fixed pressure controller controller Control valve...

  • Page 52: Tuning Of Control Performance

    INSTALLATION Series 613 4.11.4 Tuning of control performance • Tuning of pressure control performance with adaptive control, refer to chapter: Tuning of control performance with adaptive pressure controller • Tuning of pressure control performance with PI control, refer to chapter: Tuning of control performance with fixed PI pressure controller •...
  • Page 53 Series 613 INSTALLATION Gain factor adjustment The gain factor effects: Stability, Response time Adjustment range is from 0.0001 to 7.5. - Higher gain results in: faster response / higher over- / undershoot of pressure - Lower gain results in: slower response/ lower over- / undershoot of pressure Adjustment procedure: 1.
  • Page 54 INSTALLATION Series 613 Setpoint ramp adjustment Setpoint ramp effects: Undershoot of pressure, Response time Adjustment range for Setpoint Ramp is from 0 to 10 s. This parameter defines the time that is used to decrease / raise pressure between 2 setpoints. Especially in pressure decrease situations at low flows pressure response can be improved much by adapting setpoint ramp time.
  • Page 55 Pressure / flow / gas conditions to be controlled • Chamber volume • Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 1006488EB.DOCX Edition 2022-01-04 55/109...
  • Page 56 INSTALLATION Series 613 4.11.4.2 Tuning of control performance with fixed PI pressure controller Optimizing P gain and I gain This valve may be used for downstream or upstream pressure control depending on configuration. The PI parameters of the pressure controller require correct adjustment. These parameters must be set once during system setup and are stored in the device memory which is power fail save.
  • Page 57 Series 613 INSTALLATION Optimizing P gain While optimizing P gain, the gas flow determined above has to be constant all the time. Start optimization with P gain set to 1.0 and I gain set to 0.0. Set chamber pressure to SP2, wait until the pressure is stable. Set pressure to SP1. If the transition from SP2 to SP1 results in a significant pressure over shoot or even does not stabilize at all, the P gain is too high.
  • Page 58 Pressure / flow / gas conditions to be controlled • Chamber volume • Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 58/109 Edition 2022-01-04 1006488EB.DOCX...
  • Page 59 This straight line from start pressure to end pressure. The VAT soft pump controller requires a pump down time shorter than 10 sec. for good control results. If the required pump down time is longer than 10 sec., the pump down curve has to be partitioned into sections shorter than 10 sec.
  • Page 60 INSTALLATION Series 613 Optimizing P gain WE start by setting the P gain to 1.0 as a trial value and adjust according to the response. The pump down routine has to be controlled as follows: Move control valve into close position Start pump down by opening the pump isolation valve or starting the pump and sending the first pressure set point to the valve controller.
  • Page 61 Pressure / flow / gas conditions to be controlled • Chamber volume • Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 1006488EB.DOCX Edition 2022-01-04 61/109...

  • Page 62: Devicenet Interface Commands

    INSTALLATION Series 613 4.12 DeviceNet interface commands 4.12.1 Assembly objects Factory default assemblies are: Input assembly 3 / Output assembly 8 Number Type Composition [number of data bytes] EXCEPTION STATUS Input PRESSURE [2] or [4] POSITION [2] or [4] EXCEPTION STATUS Input PRESSURE [2] or [4]...

  • Page 63: Assembly Object Bit Map

    Series 613 INSTALLATION 4.12.2 Assembly object bit map This is an example based on output assembly 8 and input assembly 3 to illustrate bit map. DATA TYPE in this example is signed integer. 4.12.2.1 Output assembly Assembly Type Byte Bit7 Bit6 Bit5 Bit4...
  • Page 64 INSTALLATION Series 613 4.12.2.2 Input assembly Instance Type Byte Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 Bit0 EXCEPTION STATUS PRESSURE low byte Input PRESSURE high byte POSITION low byte POSITION high byte EXCEPTION STATUS will respond with one out of below selections, see also «Explicit messaging inquiry commands».

  • Page 65: Explicit Messaging Control Commands

    Series 613 INSTALLATION 4.12.3 Explicit messaging control commands Service Service Command Service Code Class ID Instance ID Attribute ID data length data field ® (DeviceNet term (number of bytes) if deviant) Description This command changes the valve to executing state. EXECUTING must to be selected to enable for all executing commands such EXECUTING as control mode, close valve and open valve.
  • Page 66 INSTALLATION Series 613 Service Service Command Service Code Class ID Instance ID Attribute ID data length data field ® (DeviceNet term (number of bytes) if deviant) Description 2 or 4 2 or 4 POSITION SETPOINT position setpoint according to selected DATA TYPE, 0 (closed) … 10’000 (open) This command transfers/reads the position setpoint to/from the valve.

  • Page 67: Explicit Messaging Inquiry Commands

    Series 613 INSTALLATION 4.12.4 Explicit messaging inquiry commands Service Service Command Service Code Class ID Instance ID Attribute ID data length data field ® (DeviceNet term (number of bytes) if deviant) Description VALVE CLOSED This command returns: CHECK valve is not closed (discrete input 1) valve is closed VALVE...
  • Page 68 INSTALLATION Series 613 Example of PRESSURE and SENSOR READING allocation: High range sensor 1 Torr PRESSURE SENSOR 1 READING 0 – 10’000 0 – 10’000 Low range sensor 100 mTorr SENSOR 2 READING 0 – 10’000 0 mTorr Above picture shows a 2 sensor system. In this configuration sensor 2 covers low range (100 mTorr) and sensor 1 covers high range (1 Torr).
  • Page 69 Series 613 INSTALLATION Service Service Command Service Code Class ID Instance ID Attribute ID data length data field ® (DeviceNet term (number of bytes) if deviant) Description This command returns the status of the LEARN procedure. The status is binary coded. Explanation: (LSB) 0 0 = LEARN not running...
  • Page 70 INSTALLATION Series 613 Service data length Service Command Service Code Class ID Instance ID Attribute ID (number of data field (DeviceNet® term bytes) if deviant) Description self test idle DEVICE STATUS 1 self test exception executing abort This command returns the device status. This command returns the device status.
  • Page 71 Series 613 INSTALLATION Service Service Command Service Code Class ID Instance ID Attribute ID data length data field ® (DeviceNet term (number of bytes) if deviant) Description Table with EXCEPTION DETAIL ALARM resp. EXCEPTION DETAIL WARNING bits. Exception / Failure / Error (except for detail size bytes) Data Bit 7 Bit 6...
  • Page 72 INSTALLATION Series 613 Service data length Service Command Service Code Class ID Instance ID Attribute ID (number of data field (DeviceNet® term bytes) if deviant) Description THROTTLE CYCLE This command returns the number of throttle cycles. Data type is unsigned long integer. A COUNTER movement from max.

  • Page 73: Explicit Messaging Setup Commands

    Series 613 INSTALLATION 4.12.5 Explicit messaging setup commands Service Service Command Service Code Class ID Instance ID Attribute ID data length data field ® (DeviceNet term (number of bytes) if deviant) Description signed integer DATA TYPE floating point This command defines the data type for PRESSURE, SENSOR READING, OFFSET and POSITION.
  • Page 74 INSTALLATION Series 613 Command Service Service ® Service Code Class ID Instance ID Attribute ID (DeviceNet term data length data field if deviant) (number of bytes) CHANGE OF STATE / CYCLING INPUT Not implemented Local (operation via service port) ACCESS MODE ®...
  • Page 75 Series 613 INSTALLATION Command Service Service ® Service Code Class ID Instance ID Attribute ID (DeviceNet term data length data field if deviant) (number of bytes) no sensor 1 sensor operation (sensor 1 input) 2 sensor operation with automatic changeover (low range = sensor 2 input, high range = sensor 1 input) 1 sensor operation (sensor 2 input) 2 sensor operation with automatic changeover...
  • Page 76 INSTALLATION Series 613 Command Service Service ® Service Code Class ID Instance ID Attribute ID (DeviceNet term data length data field if deviant) (number of bytes) 2 or 4 LEARN learn pressure limit according to selected DATA TYPE, PRESSURE LIMIT nominal pressure range is 0 …...
  • Page 77 Series 613 INSTALLATION Command Service Service ® Service Code Class ID Instance ID Attribute ID (DeviceNet term data length data field if deviant) (number of bytes) 0 = 0.10, 1 = 0.13, 2 = 0.18, 3 = 0.23, 4 = 0.32, 5 = 0.42, 6 = 0.56 PID CONTROLLER 7 = 0.75, 8 = 1.00, 9 = 1.33, 10 = 1.78, 11 = 2.37, 12 = 3.16, 13 = 4.22 GAIN FACTOR...

  • Page 78: Operation

    OPERATION Series 613 Operation WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. WARNING Valve opening Risk of serious injury. Human body parts must be kept out of the valve opening and away from moving parts. Do not connect the controller to power before the valve is installed complete into the system.

  • Page 79: Local Operation

    Series 613 OPERATION 5.1.2 Local operation Local operation means that the valve is operated via the service port using a computer. You can use our software 'Control Performance Analyzer' for Local operation, which is integrated in the controller. The software is beneficial especially for setup, testing and maintenance. How to start: 1.

  • Page 80: Close Valve

    OPERATION Series 613 Close valve Local operation: Remote operation: (‘Control Performance Analyzer’) (Refer to chapter «OUTPUT Buffer» > «CONTROL MODE SETPOINT» for details) «OUTPUT Buffer» > «CONTROL MODE SETPOINT» Push CLOSE button Select [Close] (value = 3) Open valve Local operation: Remote operation: (‘Control Performance Analyzer’) (Refer to chapter «OUTPUT Buffer»...

  • Page 81: Display Information

    Series 613 OPERATION Display information There is a 4 digit display located on the controller. It displays configuration, status and position information. For details refer to following tables. 5.6.1 Power up Description Digit 1 Digit 2 Digit 3 Digit 4 ●...

  • Page 82: Operation

    OPERATION Series 613 5.6.2 Operation Description / Mode Digit 1 Digit 2 Digit 3 Digit 4 Start up (Init) Start up (init) leak tight Valve closed (leak tight Valve open PRESSURE CONTROL mode POSITION CONTROL mode (e.g. A..0 = min. conductance) Closed / open interlock 0…100 (Valve closed / open...

  • Page 83: Operation During Power Up

    Display indicates F. Provided the battery pack of the VAT controller is charged. Charging time after power up is 1 minutes maximum. All parameters are stored in a power fail save memory. For PFO retrofit and other options refer to chapter: «Spare parts».

  • Page 84: Trouble Shooting

    TROUBLE SHOOTING Series 613 Trouble shooting General Failure Check Action No dots lighted on display - 24 V power supply ok? - Connect valve to power supply according to «Electrical connection» and make sure that power supply is working. Module Status LED is off ®...
  • Page 85 TROUBLE SHOOTING Series 613 Failure Check Action Remote operation does not work - Local operation via service port - Switch to remote operation. active - Safety mode active, check for D - Provide power to motor to allow for operation. on display? - Refer to «Electrical connection»...
  • Page 86 TROUBLE SHOOTING Series 613 Failure Check Action Display shows «I100» - Refer to «Logic I/O connector» for details. Interlock open mode active - Display shows «S » - Motor power supplied/Safety - Provide power to motor to allow for operation. Switch? - Refer to «Electrical connection»...

  • Page 87: Errors

    Check power supply • 1 3 Motion controller: Internal error temperature Check for a heat accumulation 1 4 Motion controller: Unexpected behavior Contact vat support • 1 5 Motion controller: Target position can’t be reached • 1 6 Motion controller: Position minimal •...
  • Page 88 Check Plate and Seal ring • Check Parameter “Isolation Position [r]” 2 0 Break slippery detected Replace actuator 3 0 SFV: Motion controller failure in master-slave Contact vat support communication • 9 6 SFV: Position deviation axis1 to axis2 at O-Ring sticking •...

  • Page 89: Maintenance

    Before carrying out any maintenance, please contact VAT. It has to be individually decided whether the maintenance can be performed by the customer or has to be carried out by VAT. Please write down the fabrication number of the valve before contact VAT. Refer to chapter «Identification of product»...

  • Page 90: Maintenance Procedures

    Replacement of Option board. Refer to chapter: «Replacement of Option board» Required frequency of cleaning and replacement of seals is depending on process conditions. VAT can give the following recommendations for preventive maintenance: heated ≤ 80 °C Replacement of unheated heated >...

  • Page 91: Replacement Of Shaft Feedthrough Seals And Valve Cleaning

    Series 613 MAINTENANCE 7.2.1 Replacement of shaft feedthrough seals and valve cleaning 7.2.1.1 Required tools • • Allen Wrench 2 mm / 2.5mm Clean room wipes, isopropyl alcohol • • Allen Wrench 3 mm Vacuum grease • Feeler gauge Required Description tool Make sure that the valve is in closed position...
  • Page 92 MAINTENANCE Series 613 Required Description tool Unfasten alternately the 2 mounting screws little by little. Allen If only one screw is fasten / Wrench unfasten, the mechanical unit will 3 mm be damaged. Max. difference should be less than 1 turn or 0.5 turn of the screws.
  • Page 93 Series 613 MAINTENANCE Required Description tool Allen Wrench 3mm 15. Assemble mechanical unit in reverse order as disassembled (steps 6 to 5). 16. Align pedestal parallel to valve body and tighten the 2 mounting screws with 2.5 Nm. 17. Center plate. Actuator side Size Feeler gauge mm...

  • Page 94: Replacement Of Option Board

    MAINTENANCE Series 613 Required Description tool 21. Reinstall valve into vacuum system according to chapter «Installation». 7.2.2 Replacement of Option board NOTICE Electrostatic discharge Electronic components could be damage. All work on the control and actuating unit has to be done under ESD protected environment to prevent electronic components from damage.
  • Page 95 Series 613 MAINTENANCE 7.2.2.1 Durability of power fail battery The curves in the graph show the estimated life of Ultra Cap PFO in the worst condition (max. sensor load = 1 A, valve heating temperature = 150 °C). If the SPS is not fully loaded (< 1 A) or heating temperature of valve body is lower than 150 °C, the corresponding life time curve will be somewhere in between the upper and the lower curve.
  • Page 96 MAINTENANCE Series 613 7.2.2.3 Required tools • Allen Wrench 2 mm / 2.5mm • Allen Wrench 3 mm If you need any further information, please contact one of our service centers. You can find the addresses on our website: www.vatvalve.com. Description Required tool Make sure that the valve is in closed position...
  • Page 97 Series 613 MAINTENANCE Description Required tool Replacement of the option board / whole controller Unfasten the two bolts from bottom side and and dismount the controller from the actuator unit. The SPS/PFO option board has to be mounted/ dismounted from bottom side of the controller. The Controller and Interface board are fix connected and shall not be dismounted.

  • Page 98: Repairs

    Series 613 Repairs Repairs may only be carried out by the VAT service staff. In exceptional cases, the customer is allowed to carry out the repairs, but only with the prior consent of VAT. Please contact one of our service centers. You will find the addresses on our website www.vatvalve.com.

  • Page 99: Dismounting And Storage

    Series 613 DISMOUNTING AND STORAGE Dismounting and Storage WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Dismounting NOTICE Contamination Gate and other parts of the valve must be protected from contamination. Always wear clean room gloves when handling the valve.

  • Page 100: Storage

    DISMOUNTING AND STORAGE Series 613 Storage NOTICE Wrong storage Inappropriate temperatures and humidity may cause damage to the product. Valve must be stored at: – relative humidity between 10% and 70% – temperature between +10 °C and +50 °C – non-condensing environment NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used.

  • Page 101: Packaging And Transport

    If products are radioactively contaminated, the VAT form «Contamination and Radiation Report» must be filled out. Please contact VAT in advance. • If products are sent to VAT in contaminated condition, VAT will carry out the decontaminating procedure at the customer's expense. 1006488EB.DOCX...

  • Page 102: Packaging

    Valve mechanism may get damaged if valve is in open position. Make sure that the valve is closed. Cover all valve openings with a protective foil. Pack valve appropriately, by using the original packaging material. VAT disclaims any liability for damages resulting from inappropriate packaging. 10.2 Transport NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used.

  • Page 103: Disposal

    Series 613 DISPOSAL Disposal Observe the local regulations for disposal WARNING Harmful substances Environmental pollution. Discard products and parts according to the local regulations. WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the disposal. CAUTION Risk of damage Indicates a hazardous situation which, if not avoided, may result in minor or moderate...

  • Page 104: Spare Parts

    «Identification of product». This is to ensure that the appropriate spare parts are supplied. • VAT makes a difference between spare parts that may be replaced by the customer and those that need to be replaced by the VAT service staff. •...

  • Page 105: Drawing

    Series 613 SPARE PARTS 12.1 Drawing Sample picture Body with mechanism Shaft kit Valve body Plate kit Shaft feed through seals All “Item“ refer to chapter «Drawing» 1006488EB.DOCX Edition 2022-01-04 105/109...

  • Page 106: Iso-Kf Valve Unit - Aluminum Blank, Without Heating

    SPARE PARTS Series 613 12.1.1 ISO-KF valve unit - aluminum blank, without heating Item Description DN 25 / 1” DN 40 / 1½” DN 50 / 2” Valve size 61328 - KA . . 61332 - KA . . 61334 - KA . . Product ordering number ISO-KF ISO-KF...

  • Page 107: Control And Actuating Unit

    SPARE PARTS 12.1.4 Control and actuating unit Description Part number Control and actuating unit Too many to list. Please contact VAT. Option board with SPS module 858530 (±15 VDC Sensor Power Supply) Option board with PFO module 858529 (Power Failure Option)

  • Page 108: Appendix

    APPENDIX Series 613 Appendix 108/109 Edition 2022-01-04 1006488EB.DOCX...
  • Page 109 Series 613 This page left blank intentionally. 1006488EB.DOCX Edition 2022-01-04 109/109...

This manual is also suitable for:

613 gq series613 aq series613 hq series613 cq series

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