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VAT 612 Series Installation, Operating, & Maintenance Instructions

Butterfly pressure control valve with ethercat interface
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Installation, Operating &
Maintenance Instructions
Butterfly Pressure Control Valve
with EtherCAT interface
Series 612
DN 63-250 mm (I.D. 2.5"- 10")
This manual is valid for the following product ordering numbers:
Configured with firmware: 600P.1G.00.03...07...08,
600P.1G.27.00,
600P.1H.00.01
Sample picture
605262EE
Edition 2018-08-20

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Summary of Contents for VAT 612 Series

  • Page 1 Installation, Operating & Maintenance Instructions Butterfly Pressure Control Valve with EtherCAT interface Series 612 DN 63-250 mm (I.D. 2.5“- 10") This manual is valid for the following product ordering numbers: Configured with firmware: 600P.1G.00.03…07…08, 600P.1G.27.00, 600P.1H.00.01 Sample picture 605262EE Edition 2018-08-20...
  • Page 2 The VAT firmware may not be used for purposes other than those intended nor is it permitted to make copies of the VAT firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to other people.

  • Page 3: Table Of Contents

    Series 612 Contents Description of product ................ 6 Identification of product ....................6 Use of product ......................... 6 Used abbreviations ......................6 Related documents......................6 Important information....................... 6 Technical data ......................... 7 1.6.1 Control and actuating unit ................. 7 1.6.2 Valve unit ......................
  • Page 4 4.10 EtherCAT interface (Parameter data – acyclic communication) ........71 4.10.1 EtherCAT Object dictionary ................71 4.10.2 Communication and timing between Master (PLC) and Slave (VAT-Valve) ..77 Operation ................... 78 Normal operation ......................78 5.1.1 Local operation ....................78 5.1.2...
  • Page 5 Series 612 12.1.4 Control and actuating unit ................113 12.1.5 Accessories ....................114 Appendix ..................115 605262EE Edition 2018-08-20 5/116...

  • Page 6: Description Of Product

    Use of product This product is a Butterfly control valve for downstream pressure control in vacuum systems. Use product for clean and dry vacuum applications only. Other applications are only allowed with the written permission of VAT. Used abbreviations Abbreviation...

  • Page 7: Technical Data

    Series 612 DESCRIPTION OF PRODUCT Technical data 1.6.1 Control and actuating unit Description Power input (α) +24 VDC (±10%) @ 0.5 V pk-pk [connector: POWER] max. [612 . . - . . A . - ../ 612 . . - . . G . - ..] 38 W max.
  • Page 8 DESCRIPTION OF PRODUCT Series 612 Control and actuating unit (continuation) Sensor input Signal input 0-10 VDC / Ri>100 kΩ [connector: SENSOR] ADC resolution 0.23 mV Sampling time 10 ms Digital outputs Input voltage 70 VDC or 70 V peak max. Input current 0.1 ADC or 0.1 A peak max.

  • Page 9: Valve Unit

    Series 612 DESCRIPTION OF PRODUCT 1.6.2 Valve unit Description Pressure range at 20°C - Aluminum (612 . . - . A. . - ..) 1 × 10E-8 mbar to 1.2 bar (abs) - Aluminum hard anodized (612 . . - . H. . - ..) 1 ×...

  • Page 10: Safety

    SAFETY Series 612 Safety Compulsory reading material Read this chapter prior to performing any work with or on the product. It contains important information that is significant for your own personal safety. This chapter must have been read and understood by all persons who perform any kind of work with or on the product during any stage of its serviceable life.

  • Page 11: Personnel Qualifications

    Series 612 SAFETY Personnel qualifications WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Safety labels Label Part No. Location on valve On protective foil covering of T-9001-156 valve opening 605262EE...

  • Page 12: Design And Function

    DESIGN AND FUNCTION Series 612 Design and Function Design Double seal of rotary feedthrough Integrated controller Double seal Coupling Plate Bearing Valve body Function The valve plate (5) acts as a throttling element and varies the conductance of the valve opening. The integrated controller (1) calculates the required plate position to achieve the setpoint pressure.

  • Page 13: Pressure Control System Overview And Function

    Series 612 DESIGN AND FUNCTION 3.2.1 Pressure control system overview and function Vacuum pressures are always absolute pressures unless explicitly specified as pressure differences. Valve Process chamber Gas inlet Pressure sensor(s) Sensor cable Controller and actuator Seff Cable to remote control unit Cable to power supply HV Pump Q / p...

  • Page 14: Principle Of A Pressure Control System

    DESIGN AND FUNCTION Series 612 3.2.1.3 Adaptive controller (standard) A controller adapting itself to changes in pressure, gas flow and pumping speed without any manual adjustments. This allows for a completely automatic operation of the system. 3.2.2 Principle of a pressure control system Host computer sends pressure set point Controller reads actual...

  • Page 15: Installation

    Make sure that the supplied products are in accordance with your order. • Inspect the quality of the supplied products visually. If it does not meet your requirements, please contact VAT immediately. • Store the original packaging material. It may be useful if products must be returned to VAT.

  • Page 16: Installation Into The System

    INSTALLATION Series 612 Installation into the system WARNING Valve opening Risk of serious injury. Human body parts must be kept out of the valve opening and away from moving parts. Do not connect the controller to power before the valve is installed complete into the system.

  • Page 17: Installation Space Condition

    Series 612 INSTALLATION 4.2.1 Installation space condition Install the valve with integrated controller with space for dismantling and air circulation as shown in figure below. 70 mm Sample picture 4.2.2 Connection overview System: Valve with controller and actuator Process chamber Gas inlet Pressure sensor(s) Sensor cable...

  • Page 18: Installation Procedure

    INSTALLATION Series 612 Controller: 4.2.3 Installation procedure All numbers in brackets refer to chapter: «Connection overview». Remove protective covers from body flanges. Install [1] valve into the vacuum system. • Do not tighten the flange screws stronger than indicated under chapter «Tightening torque».

  • Page 19: Tightening Torque

    Series 612 INSTALLATION This valve may optionally be equipped with a heating device. Connect VAT heating device according to manual of respective heating device. Perform chapter «Setup procedure» to prepare valve for operation. Without performing the setup procedure the valve will not be able to do pressure Control.

  • Page 20: Mounting With O-Ring In Grooves

    INSTALLATION Series 612 4.3.2 Mounting with O-ring in grooves max. tightening torque max. tightening torque Valve size (Nm) (lbs . ft) inch ISO-F ISO-F 2½ 20-23 35-40 15-17 26-30 20-23 35-40 15-17 26-30 20-23 35-40 15-17 26-30 40-45 35-40 30-35 26-30 40-45 65-70...
  • Page 21 Series 612 INSTALLATION Axial tensile or Bending moment Valve size compressive force «F » «M» inch Lbf. 2½ 26.5 1000 1200 1200 1200 605262EE Edition 2018-08-20 21/116...

  • Page 22: Admissible Forces At Controller

    INSTALLATION Series 612 4.4.1 Admissible forces at controller NOTICE Force at pedestal In case higher force is applied, the pedestal could be permanently damaged. – Do not pushing, shocking load, or stressing the valve controller – Do not deposit anything at valve controller The admissible force at valve controller in regards to the pedestal is shown in table below Overview...

  • Page 23: Requirements To Sensor Connection

    Series 612 INSTALLATION 4.4.2 Requirements to sensor connection To achieve fast and accurate pressure control a fast sensor response is required. Sensor response time: < 50ms. The sensor is normally connected to the chamber by a pipe. To maintain that the response time is not degraded by this connection it needs to meet the following requirements: •...

  • Page 24: Ground Connection

    INSTALLATION Series 612 4.5.1 Ground connection Recommendation for ground strap between controller and system (chassis) ∅ ∅ Material L (Length max.) B1 (min.) B2 (min.) d1 ( d2 ( copper tinned 200 mm 25 mm 25 mm 4.5 mm customized Recommended torque:1,3…1,7Nm System Ground strap...

  • Page 25: Sensor Supply Concepts

    Series 612 INSTALLATION 4.5.2 Sensor supply concepts This valve offers 3 alternative concepts to supply the sensor(s) with power. This depends on the sensor type and valve version that is used. This valve is available with an optional sensor power supply module (SPS) that converts ±15 VDC from the 24 VDC.

  • Page 26: Power And Sensor Connection (+24 Vdc Sensors)

    INSTALLATION Series 612 4.5.3 Power and sensor connection (+24 VDC sensors) [612 . . - . . G . - ../ 612 . . - . . H . - ..versions recommended] 4.5.3.1 Sensor power wiring via controller Pins 4 and 8 must be...
  • Page 27 Series 612 INSTALLATION 4.5.3.2 Sensor power wiring external Pins 4 and 8 must be bridged for operation. An optional switch would allow for motor interlock to prevent valve from moving. Low range sensor may be connected to sensor 1 or sensor 2 input.

  • Page 28: Power And Sensor Connection (±15 Vdc Sensors) Without Opt. Sps Module

    INSTALLATION Series 612 4.5.4 Power and sensor connection (±15 VDC sensors) without opt. SPS module [612 . . - . . G . - ../ 612 . . - . . H . - ..versions only] 4.5.4.1 Sensor power wiring via controller Pins 4 and 8 must be...
  • Page 29 Series 612 INSTALLATION 4.5.4.2 Sensor power wiring external Pins 4 and 8 must be bridged for operation. An optional switch would allow for motor interlock to prevent valve from moving. Low range sensor may be connected to sensor 1 or sensor 2 input.

  • Page 30: Power And Sensor Connection (±15 Vdc Sensors) With Optional Sps Module

    INSTALLATION Series 612 4.5.5 Power and sensor connection (±15 VDC sensors) with optional SPS module [612 . . - . . A . - ../ 612 . . - . . C . - ..versions only] Pins 4 and 8 must be bridged for operation.

  • Page 31: Ethercat Interface Connection

    Series 612 INSTALLATION 4.5.6 EtherCAT interface connection The EtherCAT interface is galvanic isolated from control unit. 4.5.6.1 EtherCAT installation (example) Slave X Master (Slave X) VAT Valve optional RJ45 RJ45 RJ45 RJ45 Cable Cable Connector housing C = 1nF/2kV R = 1MΩ...

  • Page 32: Logic I/O

    INSTALLATION Series 612 4.5.7 LOGIC I/O This interface allows for remote operation by means of a command set based on the EtherCAT protocol. In addition there is a digital input and a digital output. Digital input may only be operated by a switch. Active digital input has: higher priority than EtherCAT commands higher priority than Local commands...

  • Page 33: Service Port Connection

    You can use our Software (freeware) 'Control Performance Analyzer' which can be downloaded from: http://www.vatvalve.com/customer-service/informations-and-downloads/control-performance-analyzer. Alternatively the VAT Service Box2 can be connected to the service port for setup and local operation. The service port is not galvanic isolated. Therefore we recommend using this only for setup, testing and maintenance and not for permanent control.

  • Page 34: Initial Operation

    For ease setup (in Local mode) of ‘Interface’, ‘Valve’, ‘Sensor’, ‘Senor ZERO’, ‘LEARN’ and ‘PRESSURE CONTROL COFIGURATION’ it is possible to use the CPA 3.0, The free download is available on the VAT homepage: http://www.vatvalve.com/customer- service/informations-and-downloads/control-performance-analyzer 34/116...

  • Page 35: Device Identification Value

    0-0xFFF in hexadecimal or 0-4095 in decimal. There is no other possibility to set the Device Identification value (e.g. by the VAT Software Tool CPA). The Device Identification value is read once after power on. Therefore a power cycle of the valve controller or a firmware reset «EtherCAT object –...
  • Page 36 INSTALLATION Series 612 The «get-command» is: «i:23xx». The answer returns the data type of a pressure and position signal «i:23xxy00000». The y value is the current data type of buffer value xx. Example «get-command» with Terminal: Get the data Type of Position setpoint: If at start up the data type value in the memory is out of range the default value is taken.
  • Page 37 Series 612 INSTALLATION Default range Min/Max range Default lower Default Min lower Max upper Value scale value upper scale scale vlaue scale value value Pressure 1'000’000 -1'000’000 1'000’000 Pressure sensor 1 1'000’000 -1'000’000 1'000’000 Pressure sensor 2 (optional, only in case 1'000’000 -1'000’000 1'000’000...
  • Page 38 The internal accuracy of valve is for all positions 100’000 steps and for all pressures 1’000’000 steps. If the range of pressure and position values is rising, the accuracy of pressure and position will not rise. There is only the gain factor between the VAT valve and the EtherCAT Master which will be adapted.
  • Page 39 EtherCAT master. Attention: If a new VAT ESI-File is necessary please always delete the old one in the corresponding EtherCAT directory. The VAT ESI-Files are always downwardly compatible! 4. EtherCAT Explicit Device Identification (optional) Our device supports the Requesting ID Mechanism in accordance to the latest EtherCAT Protocol Enhancement Specification (ETG.1020).
  • Page 40 Valve can not be controlled any longer and enters the network failure state – see chapter 3.6.2 “Valve sensor configuration”. • Watchdog runs out o Valve is not any longer in the OPERATIONAL state and the VAT network failure warning is active - see chapter 4.1 “Additional EtherCAT warning”. o See Error LED(2) chapter 3.5.1.2 •...
  • Page 41 Series 612 INSTALLATION 2. Set the green check marks and modify the default values of 2498 and 1000 (100ms) By default the check marks are not set and the values are grey highlighted. The means the values are not changed manually or by the ESI-File 3.
  • Page 42 INSTALLATION Series 612 6. EtherCAT process data interface (PDI) watchdog (optional) The PDI watchdog supervises the VAT valve internal communication between the EtherCAT slave contorller (ESC) and the used application controller. Effects of the PDI watchdog if it runs out: •...
  • Page 43 The mailbox timing values are normally set by default. These values must just be modified if a more optimized behaviour is necessary. These default values are set in the ESI-file from VAT. If the timing must be optimized do it as described in the following procedure.

  • Page 44: Logic I/O Configuration

    INSTALLATION Series 612 4.6.3 LOGIC I/O configuration Default configuration for LOGIC I/O are: Function Mode Input Digital input close valve non inverted enabled Function Mode Output Digital output close non inverted enabled The «LOGIC I/O» Digital input and Digital output can be adjusted. Local operation: Remote operation: (‘Control View’, ‘Control Performance Analyzer’...

  • Page 45: Valve Configuration

    Series 612 INSTALLATION 4.6.4 Valve configuration Basic valve configuration must be adapted according to application needs. Definition of valve plate position in case of: • After power up, default is ‘close‘. • Power failure, default is ‘not defined‘. Only for versions that have Power Fail Option equipped [612 . . - .

  • Page 46: Sensor Configuration

    INSTALLATION Series 612 4.6.5 Sensor configuration Basic sensor configuration must be adapted according to application needs. • ZERO function: This may be ‘disabled’ or ‘enabled’. Default is ‘enabled‘. Refer also to chapter «ZERO». • Sensor configuration with 2 sensor version [612 . . - . . . X - ..]. Refer also to chapter: «Pressure control operation with 2 sensors».

  • Page 47: Zero

    Series 612 INSTALLATION 4.6.6 ZERO ZERO allows for the compensation of the sensor offset voltage. When ZERO is performed the current value at the sensor input is equated to pressure zero. In case of a 2 sensor system both sensor inputs will be adjusted. A max. offset voltage of +/- 1.4 V can be compensated.

  • Page 48: Learn (Adaptive)

    INSTALLATION Series 612 4.6.7 LEARN (adaptive) LEARN adapts the PID controller of the valve to the vacuum system and its operating conditions. LEARN must be executed only once during system setup. The LEARN routine determines the characteristic of the vacuum system. Based on this, the PID controller is able to run fast and accurate pressure control cycles.
  • Page 49 Series 612 INSTALLATION Gasflow calculation for LEARN: Do not apply a different gasflow for learn than determined below. Otherwise pressure control performance may be insufficient. Required pressure / flow regime must be known to calculate the most suitable learn gas flow for a specific application. 1.

  • Page 50: Pressure Control Configuration

    INSTALLATION Series 612 4.6.8 Pressure control configuration Select the configuration what your application needs. Constant gas flow available Constant gas flow not System Configuration available Tv*<= 500 sec Tv* > 500 sec Downstream Adaptive pressure Process controller Fixed pressure controller chamber (Refer to chapter: (Refer to chapter: Pressure controller)

  • Page 51: Tuning Of Control Performance

    Pressure controller For easy setup (Local operation) of ‘Pressure controller’ and ‘Pressure control parameter’ please use the VAT “Control Performance Analyzer” CPA 3.0. There is a free download on the VAT home page, refer to: http://www.vatvalve.com/customer- service/informations-and-downloads/control-performance-analyzer Remote operation: Refer to chapter: «EtherCAT Local operation: interface (Parameter data –...

  • Page 52: Tuning Of Control Performance With Adaptive Pressure Controller

    INSTALLATION Series 612 4.7.1 Tuning of control performance with adaptive pressure controller Normally the default settings will result in good pressure control performance. For some applications tuning may be required to improve performance. The tuning procedures for each parameter (grey boxes) and its default values are described separately below.
  • Page 53 Series 612 INSTALLATION 4.7.1.1 Gain factor adjustment The gain factor effects: Stability, Response time Adjustment range is from 0.0001 to 7.5. - Higher gain results in: faster response / higher over- / undershoot of pressure - Lower gain results in: slower response/ lower over- / undershoot of pressure Adjustment procedure: 1.
  • Page 54 INSTALLATION Series 612 4.7.1.2 Sensor delay adjustment Sensor delay adjustment effects: Stability Adjustment range is from 0 to 1.0s. Pipes and orifices for sensor attachment delay response time and so badly impact pressure control stability. By adapting this parameter to the approximate delay time stability problems can be reduced. But control response time will be slowed down by this measure.
  • Page 55 Series 612 INSTALLATION 4.7.1.3 Setpoint ramp adjustment Setpoint ramp effects: Undershoot of pressure, Response time Adjustment range for Setpoint Ramp is from 0 to 10 s. This parameter defines the time that is used to decrease / raise pressure between 2 setpoints. Especially in pressure decrease situations at low flows pressure response can be improved much by adapting setpoint ramp time.
  • Page 56 Pressure / flow / gas conditions to be controlled • Chamber volume • Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 56/116 Edition 2018-08-20 605262EE...

  • Page 57: Tuning Of Control Performance With Fixed Pi Pressure Controller

    Series 612 INSTALLATION 4.7.2 Tuning of control performance with fixed PI pressure controller 4.7.2.1 Optimizing P gain and I gain This valve may be used for downstream or upstream pressure control depending on configuration. The PI parameters of the pressure controller require correct adjustment. These parameters must be set once during system setup and are stored in the device memory which is power fail save.
  • Page 58 INSTALLATION Series 612 Start optimization with P gain set to 1.0 and I gain set to 0.0. Set chamber pressure to SP2, wait until the pressure is stable. Set pressure to SP1. If the transition from SP2 to SP1 results in a significant pressure over shoot or even does not stabilize at all, the P gain is too high.
  • Page 59 Pressure / flow / gas conditions to be controlled • Chamber volume • Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 605262EE Edition 2018-08-20 59/116...

  • Page 60: Tuning Of Control Performance With Soft Pump Pressure Controller

    The VAT soft pump controller requires a pump down time shorter than 10 sec. for good control results. If the required pump down time is longer than 10 sec., the pump down curve has to be partitioned into sections shorter than 10 sec.
  • Page 61 Series 612 INSTALLATION Optimizing P gain WE start by setting the P gain to 1.0 as a trial value and adjust according to the response. The pump down routine has to be controlled as follows: Move control valve into close position Start pump down by opening the pump isolation valve or starting the pump and sending the first pressure set point to the valve controller.
  • Page 62 Pressure / flow / gas conditions to be controlled • Chamber volume • Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 62/116 Edition 2018-08-20 605262EE...

  • Page 63: Ethercat Interface (General)

    Series 612 INSTALLATION EtherCAT interface (General) General information regarding EtherCAT is available on the hompage http://www.beckhoff.de The buffer naming is in view from customer (master) PLC. Data format: All signals are transmitted and received in intel format (low byte first). CANopen over EtherNet DS 301 compliant EtherCAT interface (Process data –...
  • Page 64 INSTALLATION Series 612 4.9.1.2 Details Signal Byte Valid Name Data Type Description Type Length Range 0..1’000’00 signed integer In case of the valve is is pressure mode PRESSURE SETPOINT (CONTROL MODE = Pressure (5)), the Signal (default) or (default), floating point signal is used as setpoint value.
  • Page 65 PING PONG TX BIT transmitted from the master (PLC), is used to check the loop "master Communication and timing control between PING PONG TX BIT PLC - VAT station". See chapter: 3.11.9 Master (PLC) and Station (Valve) NOT USED (reserved)

  • Page 66: Input Buffer (Master Plc)

    INSTALLATION Series 612 4.9.2 INPUT Buffer (Master PLC) The EtherCAT process data mapping is done automatically corresponding to the following list and respectively to the sync manager information. 4.9.2.1 Overview Buffer Pressure Pressure sensor 1 Pressure sensor 2 (optional, only in case of 2 sensor version) Position Reserved - not used Control mode...
  • Page 67 Series 612 INSTALLATION 4.9.2.2 Details Signal Byte Data Valid Name Description Type Length Type Range -270000.. In case of default valid range: 1’230’000 Physical full scale value of the sensor (10 signed (default) Volt) equals to 1’000’000. integer PRESSURE Signal (default) or (-2.7V..12.3V (In case of 2 sensor operation the full scale...
  • Page 68 INSTALLATION Series 612 Signal Byte Data Valid Name Description Type Length Type Range 20 = no stop detected during synch mode 21 = valve blocked during synch mode unsigned Signal FATAL ERROR 20,21,22,25,40 22 = valve blocked integer 25 = step loss during synch mode 40 = motor driver fault boolean Bitmap...
  • Page 69 PING PONG RX BIT, is inverted and transmitted back to the fieldbus master (PLC), See Communication and timing control between Master (PLC) and Slave PING PONG RX-BIT chapter: 4.12 (VAT-Valve) 0 = off PRESSURE SIMULATION 1 = on 0 = The actual pressure is not within 2% of the pressure setpoint...
  • Page 70 INSTALLATION Series 612 EXTENDED WARNING bitmap table: Description REMOTE CONTROL NOT Remote control not possible, access mode local is active, change to acces mode remote or POSSIBLE access mode locked Not possible to switch the actual control mode to CONTROL MODE SETPOINT ACTUAL CONTROL •...

  • Page 71: Ethercat Interface (Parameter Data - Acyclic Communication)

    INSTALLATION 4.10 EtherCAT interface (Parameter data – acyclic communication) VAT uses for acyclic parameter data handling a standard EtherCAT mailbox transfer. The mailbox protocol is CoE (CANopen over EtherCAT), compliant to DS301 (CiA Draft Standard 301 v4.02). 4.10.1 EtherCAT Object dictionary The standard object dictionary is implemented according to the DS301 communication profile.
  • Page 72 INSTALLATION Series 612 Index Object Name Sub- Description Type Access Description Index 1A00h TRANSMIT PDO No. of mapped UINT8 No. of mapped objects application MAPPING objects in PDO UINT32 Mapped object #1 UINT32 Mapped object #2 Mapped object #NN UINT32 UINT8 1C00h SYNC MANAGER...
  • Page 73 Series 612 INSTALLATION 4.10.1.2 Manufactor specific Object Entries – Parameter data The following VAT specific objects (valve parameter data) are available. Index Object Name Sub- Description Type Valid Range Access Description Index SENSOR 0 = no sensor 20E6h Current UINT8 0..4...
  • Page 74 INSTALLATION Series 612 Index Object Name Sub- Description Type Valid Range Acce Description Index 2119h LEARN STATE Current UINT16 See table below LEARN status information 2190h VALVE SPEED Valve speed UINT16 0…1000 Default is: 1000. 2199h PRESSURE Pressure UINT8 0…3 0 = adaptive CONTROL control...
  • Page 75 Series 612 INSTALLATION Index Object Name Sub- Description Type Valid Range Acce Description Index RAMP TIME Ramp time FLOAT 0.00… In seconds. 21A5h (FIXED 1) (Fixed 1) 000.0 Default is: 0.00 ’ ’ Ramp mode 0…1 0 = Constant Time (Fixed 1) 1 = Constant Slope Default is: 0...
  • Page 76 INSTALLATION Series 612 LEARN STATE bitmap table: Set Description Possible Reason LEARN RUNNING Learn procedure is running Learn data are faulty Learn not performed LEARN DATA SET Check happens once after power up of the valve Learn data incomplete LEARN TERMINATED Learn procedure was terminated by the BY USER customer/user...

  • Page 77: Communication And Timing Between Master (Plc) And Slave (Vat-Valve)

    Series 612 INSTALLATION 4.10.2 Communication and timing between Master (PLC) and Slave (VAT-Valve) See chapter: «OUTPUT Buffer» > «PING PONG TX-BIT» and «INPUT Buffer» > «PING PONG RX-BIT». For visual overview see the diagram below. MASTER = PLC Check if...

  • Page 78: Operation

    Local operation means that the valve is operated via the service port using a computer or the Service Box 2. When using a computer, a service cable and a software from VAT is required. You can use our Software (freeware) 'Control Performance Analyzer' which can be downloaded from: http://www.vatvalve.com/customer-service/informations-and-downloads/control-performance-analyzer.

  • Page 79: Remote Operation

    Series 612 OPERATION When communication to service port is interrupted the valve will change to remote operation. So when service cable will be disconnected or software will be shut down, the valve returns automatically to remote operation. This may result in an immediate movement of the valve depending on remote control.

  • Page 80: Close Valve

    OPERATION Series 612 Close valve Local operation: Remote operation: (‘Control View’, ‘Control Performance (Refer to chapter «OUTPUT Buffer» > «CONTROL Analyzer’ or ‘Service Box 2‘) MODE SETPOINT» for details) «OUTPUT Buffer» > «CONTROL MODE SETPOINT» Push CLOSE button Select [Close] (value = 3) Open valve Local operation: Remote operation:...

  • Page 81: Pressure Control

    Series 612 OPERATION Pressure control To prepare valve for PRESSURE CONTROL perform complete «Setup procedure». The valve has parameters that may be modified to tune pressure control performance. Refer to «Tuning of control performance». The included PID controller controls the chamber pressure according to the pressure setpoint by means of the valve position.

  • Page 82: Pressure Control Operation With 2 Sensors

    OPERATION Series 612 5.5.1 Pressure control operation with 2 sensors [applicable with 612 . . - . . . F - ..version only] If 2 sensor operation is enabled, changeover between the sensors is done automatically during pressure control.

  • Page 83: Display Information

    Series 612 OPERATION Display information 1 2 3 4 Display There is a 4 digit display located on the panel. It displays configuration, status and position information. For details refer to following tables. 5.6.1 Power up Description Digit 1 Digit 2 Digit 3 Digit 4 ●...

  • Page 84: Operation

    OPERATION Series 612 5.6.2 Operation Description / Mode Digit 1 Digit 2 Digit 3 Digit 4 PRESSURE CONTROL mode POSITION CONTROL mode Valve closed Valve open Closed / open interlock (Valve closed / open by digital input) 0…100 HOLD (position frozen) = valve position (%, 0 = closed / 100 = open) activated ZERO running...
  • Page 85 Series 612 OPERATION 5.6.4.1 Run LED (1) This LED reflects the status of the CoE (CANopen over EtherCAT) communication. LED State Indication Description INIT CoE device in ‘INIT’-state (or no power) Green OPERATIONAL CoE device in ‘OPERATIONAL’-state Green, blinking PRE- OPERATIONAL CoE device in ‘PRE-OPERATIONAL’-state Green, single flash SAFE- OPERATIONAL...

  • Page 86: Safety Mode

    1). Default is not defined. Display indicates F. 1) Provide that battery pack of the VAT controller is charged. Charging time after power up is 2 minutes max.. All parameters are stored in a power fail save memory.

  • Page 87: Operation Under Increased Temperature

    Series 612 OPERATION Operation under increased temperature CAUTION Hot valve Heated valve may result in minor or moderate injury. Do not touch valve and heating device during operation. Once heating is switched off (valve and system) await until the valve is cooled down complete before doing any work.

  • Page 88: Trouble Shooting

    TROUBLE SHOOTING Series 612 Trouble shooting Failure Check Action No dots lighted on display - 24 V power supply ok? - Connect valve to power supply according to «Electrical connection» and make sure that power supply is working. Remote operation does not - Local operation via - Switch to remote operation.
  • Page 89 TROUBLE SHOOTING Series 612 Failure Check Action - POSITION CONTROL - Select POSITION CONTROL mode. selected, check for V on Refer to «Position control» for details. display? 1) Priority of pin 14 is higher than pin 13. If pin 14 is connected to ground after pin 13 the valve will close. Ground of service connector is at pin 4 and 8.
  • Page 90 TROUBLE SHOOTING Series 612 Failure Check Action Pressure reading is wrong - Sensor(s) connected? - Refer to «Electrical connection». - 2 sensor version present - Check valve version on page 1. Verify pressure reading is negative at valve controller? configuration. Refer to «Setup procedure». - Refer to «Pressure control operation with 2 sensors».

  • Page 91: Additional Ethercat Warning

    TROUBLE SHOOTING Series 612 Additional EtherCAT warning Failure detection with CPA or Check Action CV software Network failure: No EtherCAT - EtherCAT cable ok? - Check EtherCAT cable. communication is active - Connection to master ok? - Check the EtherCAT connection to master. (warning 8) - Process data output - Check the process data output watchdog –...

  • Page 92: Maintenance

    Before carrying out any maintenance, please contact VAT. It has to be individually decided whether the maintenance can be performed by the customer or has to be carried out by VAT. Please write down the fabrication number of the valve before contact VAT. Refer to chapter «Identification of product»...

  • Page 93: Maintenance Procedures

    Replacement of Option board. Refer to chapter: «Replacement of Option board» Required frequency of cleaning and replacement of seals is depending on process conditions. VAT can give the following recommendations for preventive maintenance: heated ≤ 80 °C Replacement of unheated heated >...

  • Page 94: Replacement Of Shaft Feedthrough Seals And Valve Cleaning

    MAINTENANCE Series 612 7.2.1 Replacement of shaft feedthrough seals and valve cleaning 7.2.1.1 Required tools • • Allen Wrench 2 mm / 2.5mm Clean room wipes, isopropyl alcohol • • Allen Wrench 3 mm Vacuum grease • Feeler gauge Description Required tool Make sure that the valve is in closed position Vent vacuum system, disconnect electrical connections and remove valve from vacuum...
  • Page 95 Series 612 MAINTENANCE Description Required tool Unfasten alternately the 2 mounting screws little by little. Allen Wrench If only one screw is fasten / unfasten, 3 mm the mechanical unit will be damaged. Max. difference should be less than 1 turn or 0.5 turn of the screws.
  • Page 96 MAINTENANCE Series 612 Description Required tool Allen Wrench 3mm 15. Assemble mechanical unit in reverse order as disassembled (steps 6 to 5). 16. Align pedestal parallel to valve body and tighten the 2 mounting screws with 2.5 Nm. 17. Center plate. Actuator side Size Feeler gauge mm...
  • Page 97 Series 612 MAINTENANCE Description Required tool 21. Reinstall valve into vacuum system according to chapter «Installation». 605262EE Edition 2018-08-20 97/116...

  • Page 98: Replacement Of Option Board

    MAINTENANCE Series 612 7.2.2 Replacement of Option board NOTICE Electrostatic discharge Electronic components could be damage. All work on the control and actuating unit has to be done under ESD protected environment to prevent electronic components from damage. NOTICE Burned connector pins (spark) Connector pins or electronic parts could damage, if plugged and unplugged under power.
  • Page 99 Series 612 MAINTENANCE 7.2.2.1 Durability of power fail battery The curves in the graph show the estimated life of Ultra Cap PFO in the worst condition (max. sensor load = 1 A, valve heating temperature = 150 °C). If the SPS is not fully loaded (< 1 A) or heating temperature of valve body is lower than 150 °C, the corresponding life time curve will be somewhere in between the upper and the lower curve.

  • Page 100: Retrofit / Replacement Procedure

    MAINTENANCE Series 612 7.2.3 Retrofit / replacement procedure Top view on control and actuating unit with panel removed: Master board Motor driver board Option board Interface board All boards have a fixed position into control and actuating unit. It is not possible to fit a board in other position as shown in picture above! Do not try out other positions, which maybe destroy the socket of boards! 100/116...
  • Page 101 Series 612 MAINTENANCE 7.2.3.1 Required tools • Pozidriv screw driver size 1 • Open end wrench 4.5mm Description Required tool Pozidriv screw driver Remove panel screws size 1 Remove female screw locks from Open end wrench 4.5mm SENSOR and POWER connectors Loosen and remove the LOGIC Open end wrench 10mm connector screw...
  • Page 102 MAINTENANCE Series 612 Description Required tool Remove the panel Remove the master board or replace it, if existing master board is defect Remove the interface board or replace it, if existing interface board is defect Remove the option board or replace it, if existing option board is defect Insert all boards in reverse order as they disassembled at correct...
  • Page 103 Series 612 MAINTENANCE Description Required tool 12. Tighten panel screws with 1.1 Nm Pozidriv screw driver (see step 1) size 1 If you need any further information, please contact one of our service centers. You can find the addresses on our website: www.vatvalve.com. 605262EE Edition 2018-08-20 103/116...

  • Page 104: Repairs

    Series 612 Repairs Repairs may only be carried out by the VAT service staff. In exceptional cases, the customer is allowed to carry out the repairs, but only with the prior consent of VAT. Please contact one of our service centers. You will find the addresses on our website www.vatvalve.com.

  • Page 105: Dismounting And Storage

    Series 612 DISMOUNTING AND STORAGE Dismounting and Storage WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Dismounting NOTICE Contamination Gate and other parts of the valve must be protected from contamination. Always wear clean room gloves when handling the valve.

  • Page 106: Storage

    DISMOUNTING AND STORAGE Series 612 Storage NOTICE Wrong storage Inappropriate temperatures and humidity may cause damage to the product. Valve must be stored at: – relative humidity between 10% and 70% – temperature between +10 °C and +50 °C – non-condensing environment NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used.

  • Page 107: Packaging And Transport

    If products are radioactively contaminated, the VAT form «Contamination and Radiation Report» must be filled out. Please contact VAT in advance. • If products are sent to VAT in contaminated condition, VAT will carry out the decontaminating procedure at the customer's expense. 10.1...

  • Page 108: Transport

    10.2 Transport NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used. Always use the original packaging material and handle product with care. VAT disclaims any liability for damages resulting from inappropriate packaging. 108/116 Edition 2018-08-20 605262EE...

  • Page 109: Disposal

    Series 612 DISPOSAL Disposal WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. 605262EE Edition 2018-08-20 109/116...

  • Page 110: Spare Parts

    «Identification of product». This is to ensure that the appropriate spare parts are supplied. • VAT makes a difference between spare parts that may be replaced by the customer and those that need to be replaced by the VAT service staff. •...

  • Page 111: Drawing

    Series 612 SPARE PARTS 12.1 Drawing Sample picture 605262EE Edition 2018-08-20 111/116...

  • Page 112: Iso-Kf Valve Unit - Aluminum Blank, Without Heating

    SPARE PARTS Series 612 All “Item“ refer to chapter «Drawing» 12.1.1 ISO-KF valve unit - aluminum blank, without heating Item Description DN 63 / 2½” DN 80 / 3” DN 100 / 4” DN 160 / 6” DN 200 / 8” DN 250 / 10”...

  • Page 113: Seals And Grease

    12.1.4 Control and actuating unit Description Part number Control and actuating unit Too many to list. Please contact VAT. Option board with SPS module 378000 (±15 VDC Sensor Power Supply) Option board with PFO module 378002...
  • Page 114 SPARE PARTS Series 612 12.1.5 Accessories Description Part number 24 VDC power supply unit 249775 (input: 100 – 240 VAC) free download from: ‘Control Performance Analyzer’ ® http://www.vatvalve.com/customer-service/informations-and- package for Windows downloads/control-performance-analyzer Service cable 230327 (PC to valve Service connector) free wiring information available for download from www.vatvalve.com Connector of:...
  • Page 115 Series 612 APPENDIX Appendix No information entered on time. 605262EE Edition 2018-08-20 115/116...
  • Page 116 Series 612 This page left blank intentionally. 116/116 Edition 2018-08-20 605262EE...

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