Connection Overview - VAT 590 Series Installation, Operating, & Maintenance Instructions

4.2.2

Connection overview

System:
9
Controller:
14/77
INSTALLATION
1
2
M
4
5
6 7 8
Edition 2015-12-02
1 Valve
2 Process chamber
3
3 Gas inlet
4 Controller
5 Pressure sensor
6 Sensor cable
7 Cable to remote control unit (RS232)
8 Cable to power supply
9 Pump
Series 590
820655EA