4.3.1
Installation Hints
Install valve into the vacuum system. Valve seat side shall face process chamber.
4.3.2
Installation space condition
16/129
INSTALLATION
•
Do not tighten the flange screws stronger than indicated under chapter
«Tightening torque».
•
Do not admit higher forces to the valve than indicated under chapter «Admissible
forces».
•
Make sure that enough space is kept free to do preventive maintenance work.
The required space is indicated on the dimensional drawing.
•
Control unit of valves with ISO-KF (61. . . – K . . .) needs support when mounted
on horizontal piping and control unit does not hang.
Install the valve with integrated controller with space for dismantling and air
circulation as shown in figure below.
Edition 11.08.2022
70
Sample picture
1087976EB
Series 613