Connection Overview - VAT 642 Series Installation And Operating Instructions Manual
Control gate valve with cc-link interface
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Series 642
4.2.2
Connection overview
System:
813316EB
2
1
M
8
9
10
11
Actuator
Edition 2017-11-24
INSTALLATION
1
Valve
2
Process chamber
3
3
Gas inlet
4
Pressure sensor(s)
4
5
Sensor cable(s)
6
Cable to remote control unit
7
Cable to power supply
5
8
Controller
9
Connection cable controller / actuator
6
10 Actuator
7
11 Pump
Controller
17/107
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