VAT 616 Series Installation, Operating, & Maintenance Instructions
Butterfly position control & isolation valve
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Installation, Operating &
Maintenance Instructions
Butterfly position control & isolation valve
with position controller
with Logic interface
Series 616
DN 40 - 50mm (I.D. 1.5"- 2")
This manual is valid for the following product ordering numbers:
61632-K.M1-....-....
61634-K.M1-....-....
Configured with firmware: F02.0B.02.01, F02.0B.02.02
Sample picture
893179ED.DOCX
Edition 2020-01-22
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Table of Contents
Related Manuals for VAT 616 Series
Summary of Contents for VAT 616 Series
- Page 1 Installation, Operating & Maintenance Instructions Butterfly position control & isolation valve with position controller with Logic interface Series 616 DN 40 - 50mm (I.D. 1.5"- 2”) This manual is valid for the following product ordering numbers: 61632-K.M1-….-…. 61634-K.M1-….-…. Configured with firmware: F02.0B.02.01, F02.0B.02.02 Sample picture 893179ED.DOCX Edition 2020-01-22...
- Page 2 The VAT firmware may not be used for purposes other than those intended nor is it permitted to make copies of the VAT firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to other people.
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Page 3: Table Of Contents
Series 616 Contents Description of product ................ 5 Identification of product ....................5 Use of product ......................... 5 Used abbreviations ......................5 Related documents......................5 Important information....................... 5 Technical data ......................... 6 1.6.1 Control and actuating unit ................. 6 1.6.2 Valve unit ...................... - Page 4 Series 616 Trouble shooting ................30 Maintenance ..................31 Maintenance intervals ....................31 Maintenance procedures ....................32 7.2.1 Replacement of plate o-ring ................33 7.2.2 Replacement of shaft feed through seals and valve cleaning ......37 Repairs ....................44 Dismounting and Storage ..............45 Dismounting ........................
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Page 5: Description Of Product
This product is a Butterfly position control valve with isolation functionality for downstream pressure control in vacuum systems. Use product for clean and dry vacuum applications only. Other applications are only allowed with the written permission of VAT. Used abbreviations Abbreviation... -
Page 6: Technical Data
DESCRIPTION OF PRODUCT Series 616 Technical data 1.6.1 Control and actuating unit Description Power supply input +24 VDC (±10%) @ 0.5 V pk-pk max. Power consumption 40 W max. Ambient temperature 0 °C to +50 °C max. (<35 °C recommended) humidity 0 to 95% RH, non-condensing Interface... -
Page 7: Valve Unit
Series 616 DESCRIPTION OF PRODUCT 1.6.2 Valve unit Description Pressure range (unheated on delivery) • Stainless steel 1 × 10E-8 mbar to 1.2 bar (abs) • Aluminum, hard anodized 1 × 10E-6 mbar to 1.2 bar (abs) Leak rate valve seat (unheated on delivery) •... -
Page 8: Safety
SAFETY Series 616 Safety Compulsory reading material Read this chapter prior to performing any work with or on the product. It contains important information that is significant for your own personal safety. This chapter must have been read and understood by all persons who perform any kind of work with or on the product during any stage of its serviceable life. -
Page 9: Personnel Qualifications
Series 616 SAFETY Personnel qualifications WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Safety labels Label Part No. Location on valve On protective foil covering of T-9001-156 valve opening 893179ED.DOCX... -
Page 10: Design And Function
DESIGN AND FUNCTION Series 616 Design and Function Design Sample picture XY: Double excentric bearing: prevents wearing of the o-ring and particle generation Controller Double seal Coupling Plate Bearing Body 10/56 Edition 2020-01-22 893179ED.DOCX... -
Page 11: Function
Series 616 DESIGN AND FUNCTION Function The valve plate acts as a throttling element and varies the conductance of the valve opening. The integrated controller calculates the required plate position to achieve the setpoint pressure. Actuation is performed by a stepper motor. An encoder monitors the position. This principle ensures fast and accurate process pressure control even in demanding contaminating processes. -
Page 12: Installation
Make sure that the supplied products are in accordance with your order. • Inspect the quality of the supplied products visually. If it does not meet your requirements, please contact VAT immediately. • Store the original packaging material. It may be useful if products must be returned to VAT. -
Page 13: Installation Into The System
Series 616 INSTALLATION Installation into the system WARNING Valve opening Risk of serious injury. Human body parts must be kept out of the valve opening and away from moving parts. Do not connect the controller to power before the valve is installed complete into the system. -
Page 14: Installation Space Condition
INSTALLATION Series 616 4.2.1 Installation space condition Install the valve with integrated controller with space for dismantling and air circulation as shown in figure below. Sample picture 4.2.2 Connection overview System: Valve Process chamber Gas inlet Cable to power supply / Interface Position controller Pump 14/56... -
Page 15: Installation Procedure
Series 616 INSTALLATION Position Controller: 4.2.3 Installation procedure All numbers in brackets refer to chapter: «Connection overview». Install valve [1] into the vacuum system. Remove protective covers from body flanges. • Do not tighten the flange screws stronger than indicated under «Tightening torque». -
Page 16: Admissible Forces
INSTALLATION Series 616 Admissible forces NOTICE Force at valve body Forces from the weight of other components can lead to deformation of the valve body and to malfunction of the valve. Do not higher force the valve body as specified. The following forces are admissible. -
Page 17: Admissible Forces At Controller
Series 616 INSTALLATION 4.4.1 Admissible forces at controller NOTICE Force at pedestal In case higher force is applied, the pedestal could be permanently damaged. – Do not pushing, shocking load, or stressing the valve controller – Do not deposit anything at valve controller The admissible force at valve controller in regards to the pedestal is shown in table below Overview... -
Page 18: Electrical Connection
INSTALLATION Series 616 Electrical connection NOTICE Wrong connection Wrong connection may result in damage of controller or power supply. Connect all cables exactly as shown in the following descriptions and schematics. NOTICE Burned connector pins (spark) Connector pins or electronic parts could damage, if plugged and unplugged under power. -
Page 19: Service Port Connection
Series 616 INSTALLATION 4.5.2 Service port connection The service port (connector: SERVICE, USB - B) allows to connect the valve to a USB - A port of a computer. This requires a USB A–B cable male-male. The ‘Service port is used for ‘Local operation’ and setup. -
Page 20: Functions And Wiring
/ output signals. Digital inputs may be operated either by switches or by voltage sources. a) Configuration with switches for digital inputs: • VAT fuse recommendation: (a) 2 AF • Connect all pins exact as shown in the schematics above! •... - Page 21 Series 616 INSTALLATION b) Configuration with voltage source for digital inputs: • VAT fuse recommendation: (a) 2 AF • Connect all pins exact as shown in the schematics above! • Use only screws with 4-40UNC thread for fastening the DB-15 connector! 893179ED.DOCX...
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Page 22: Remote Control Modes
INSTALLATION Series 616 4.5.4 Remote control modes The valve can be operated in two ways: Position control using an analog voltage and digital inputs. Step / direction control. This is a control known from standard stepper motor drivers. The direction input defines the direction of the movement. Each pulse on the step input moves the valve by one increment. -
Page 23: Initial Operation
Series 616 INSTALLATION Initial operation 4.6.1 Setup procedure To enable the valve for position control setup steps 1 to 3 must be performed. Setup steps Description Turn on external + 24VDC power supply of valve. Power up Refer to chapter «Behavior during power up» for details. Interface Refer to chapter «Interface configuration»... -
Page 24: Operation
OPERATION Series 616 Operation WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. WARNING Valve opening Risk of serious injury. Human body parts must be kept out of the valve opening and away from moving parts. Do not connect the controller to power before the valve is installed complete into the system. -
Page 25: Local Operation
Series 616 OPERATION 5.1.1 Local operation Local operation means that the valve is operated via the service port using a computer. When using a computer, a USB A–B cable male-male required. You can use our Software 'Control Performance Analyzer' 4.0 for Local operation, which is integrated in the IC2 controller. -
Page 26: Remote Operation
OPERATION Series 616 5.1.2 Remote operation This product is equipped with a Logic interface to allow for remote operation. See section «Function and Wiring» for details. 'Control Performance Analyzer' 4.0 which is integrated in the Controller, may be used for monitoring during remote control. 'Control Performance Analyzer' 4.0 software In case ‘Control Performance Analyzer’... -
Page 27: Close Valve
Series 616 OPERATION Close valve Local operation: Remote operation: (‘Control Performance Analyzer’ 4.0) (Refer to chapter «Digital inputs» for details) Push CLOSE button Send CLOSE VALVE Open valve Local operation: Remote operation: (‘Control Performance Analyzer’ 4.0) (Refer to chapter «Digital inputs» for details) Push OPEN button Send OPEN VALVE Position control... -
Page 28: Power Up
OPERATION Series 616 5.5.1 Power up Description POWER (green) OPEN (green) CLOSE (green) ERROR (red) At first is displayed blinking After synchronization 5.5.2 Operation Description POWER (green) OPEN (green) CLOSE (green) ERROR (red) OPEN CLOSE Position Control 5.5.3 Fatal error Description POWER (green) OPEN (green) -
Page 29: Operation Under Increased Temperature
Series 616 OPERATION Operation under increased temperature CAUTION Hot valve Heated valve may result in minor or moderate injury. Do not touch valve and heating device during operation. Once heating is switched off (valve and system) await until the valve is cooled down complete before doing any work. -
Page 30: Trouble Shooting
«Maintenance procedure». - Valve plate mechanically - Resolve obstruction. obstructed? - Serious temperature - Uniform temperature between parts or contact VAT difference between valve for recommendations to your specific application. body and valve plate that led to a contact between... -
Page 31: Maintenance
Before carrying out any maintenance, please contact VAT. It has to be individually decided whether the maintenance can be performed by the customer or has to be carried out by VAT. Please write down the fabrication number of the valve before contact VAT. Refer to chapter «Identification of product»... -
Page 32: Maintenance Procedures
Replacement of rotary feedthrough seals and valve cleaning. Refer to chapter: «Replacement of rotary feedthrough». Required frequency of cleaning and replacement of seals is depending on process conditions. VAT can give the following recommendations for preventive maintenance: heated ≤ 80 °C Replacement of unheated heated >... -
Page 33: Replacement Of Plate O-Ring
Series 616 MAINTENANCE 7.2.1 Replacement of plate o-ring 7.2.1.1 Required tools • • Allen Wrench 3mm Vacuum grease (see chapter spare parts) • • O-ring removal tool Cleanroom wipes (see chapter Accessories) Description Required tool 1. Vent vacuum system on both sides of the valve. 2. - Page 34 MAINTENANCE Series 616 Description Required tool 7. Remove the plate o-ring O-ring removal tool 8. Replace the plate if necessary Cleanroom wipes soaked with 9. Clean the plate and o-ring groove isopropyl alcohol 10. Lubricate the new o-ring with 0.0125 ml vacuum grease Vacuum grease For new o-ring refer to chapter spare parts.
- Page 35 Series 616 MAINTENANCE Description Required tool 13. Move the o-ring in the o-ring groove on the other side 14. Push in the o-ring equally around the plate into o-ring groove 15. Plate with equal mounted o-ring 16. Place the plate on the shaft in the valve body 17.
- Page 36 MAINTENANCE Series 616 Description Required tool 19. Connect electrical POWER connection Attention! at valve Attention! Valve does synchronize automatically and moves the plate into sit of valve body (close position). 20. Disconnect electrical POWER Keep fingers out of the valve opening connection during plate movement! 21.
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Page 37: Replacement Of Shaft Feed Through Seals And Valve Cleaning
Series 616 MAINTENANCE 7.2.2 Replacement of shaft feed through seals and valve cleaning 7.2.2.1 Required tools • • Allen Wrench 2mm Isopropyl alcohol • • Allen Wrench 3mm Cleanroom wipes • • O-ring removal tool Vacuum grease (see chapter spare parts) (see chapter Accessories) Description Required tool... - Page 38 MAINTENANCE Series 616 Description Required tool Remove control and actuating unit from mechanical valve unit Take care of position (actuating unit to valve unit) for reassembling. See also dimensional drawing. If clamp coupling is separated, assemble them at control and actuating unit.
- Page 39 Series 616 MAINTENANCE Description Required tool 11. Remove mechanical unit from valve body Cleanroom wipes 12. Clean shaft soaked with isopropyl alcohol 13. Remove both o-rings Soft tool Cleanroom wipes 14. Clean shaft feed through soaked with isopropyl alcohol 893179ED.DOCX Edition 2020-01-22 39/56...
- Page 40 MAINTENANCE Series 616 Description Required tool Cleanroom wipes 15. Clean the valve body soaked with isopropyl alcohol 16. Lubricate seal contact surface of valve body with a slight film of 0.025 ml vacuum Vacuum grease grease 17. Lubricate seal contact surface of shaft with a slight film of 0.0125 ml vacuum grease Vacuum grease 18.
- Page 41 Series 616 MAINTENANCE Description Required tool 22. Install mechanical unit into valve body, see picture 23. Fasten and tighten the 2 mounting screws Allen torque wrench with 2.5 Nm 24. Place the plate on the shaft in the valve body 25.
- Page 42 MAINTENANCE Series 616 Description Required tool 27. Press the plate (A) into valve seat. 28. Press the lever (B) by hand to axis (C). Make sure that lever (B) is engaged at axis (C) completely. (mechanical close position). Allen torque wrench 29.
- Page 43 Series 616 MAINTENANCE Description Required tool 34. Reinstall valve into vacuum system according to chapter «Installation». 893179ED.DOCX Edition 2020-01-22 43/56...
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Page 44: Repairs
Series 616 Repairs Repairs may only be carried out by the VAT service staff. In exceptional cases, the customer is allowed to carry out the repairs, but only with the prior consent of VAT. Please contact one of our service centers. You will find the addresses on our website www.vatvalve.com. -
Page 45: Dismounting And Storage
Series 616 DISMOUNTING AND STORAGE Dismounting and Storage WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Dismounting NOTICE Contamination Gate and other parts of the valve must be protected from contamination. Always wear clean room gloves when handling the valve. -
Page 46: Storage
DISMOUNTING AND STORAGE Series 616 Storage NOTICE Wrong storage Inappropriate temperatures and humidity may cause damage to the product. Valve must be stored at: – relative humidity between 10% and 70% – temperature between +10 °C and +50 °C – non-condensing environment NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used. -
Page 47: Packaging And Transport
If products are radioactively contaminated, the VAT form «Contamination and Radiation Report» must be filled out. Please contact VAT in advance. • If products are sent to VAT in contaminated condition, VAT will carry out the decontaminating procedure at the customer's expense. 10.1... -
Page 48: Transport
10.2 Transport NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used. Always use the original packaging material and handle product with care. VAT disclaims any liability for damages resulting from inappropriate packaging. 48/56 Edition 2020-01-22 893179ED.DOCX... -
Page 49: Disposal
Series 616 DISPOSAL Disposal WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. 893179ED.DOCX Edition 2020-01-22 49/56... -
Page 50: Spare Parts
«Identification of product». This is to ensure that the appropriate spare parts are supplied. • VAT makes a difference between spare parts that may be replaced by the customer and those that need to be replaced by the VAT service staff. •... -
Page 51: Drawing
Series 616 SPARE PARTS 12.1 Drawing Plate screws Body with mechanism Lever complete Body complete Adapter flange, rod with bearing Plate Rotary feedtrough seals Plate o-ring 893179ED.DOCX Edition 2020-01-22 51/56... -
Page 52: Iso-Kf Valve Unit - Aluminum Hard Anodized, Without Heating
SPARE PARTS Series 616 All “Item“ refer to chapter «Drawing» 12.1.1 ISO-KF valve unit – aluminum hard anodized, without heating Item Description DN 40 / 1½” DN 50 / 2” Valve size 61632 - KH . . 61634 - KH . . Product ordering number ISO-KF ISO-KF... -
Page 53: Seals And Grease
12.1.4 Control and actuating unit Description Part number Control and actuating unit Please contact VAT. Option board with SPS module 378000 (±15 VDC Sensor Power Supply) Option board with PFO module 378002... - Page 54 SPARE PARTS Series 616 12.1.5.1 Centering ring with Viton o-ring Description Valve size DN 40 / 1½” DN 50 / 2” Product ordering number 61632 - ..61634 - ..Centering ring Aluminum 31032-KAZV 32034-KAZV with Viton o-ring (for ISO-KF and ISO-...
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Page 55: Appendix
Series 616 APPENDIX Appendix No information entered on time. 893179ED.DOCX Edition 2020-01-22 55/56... - Page 56 Series 616 This page left blank intentionally. 56/56 Edition 2020-01-22 893179ED.DOCX...