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Series 612
4.2.1
Installation space condition
4.2.2
Connection overview
System:
601894EA
INSTALLATION
Install the valve with integrated controller with space for dismantling and air circulation
as shown in figure below.
2
1
6
M
9
Edition 2013-04-12
1
Valve
2
Process chamber
3
3
Gas inlet
4
Pressure sensor(s)
4
5
Sensor cable(s)
6
Controller and actuator
7
Cable to remote control unit
5
8
Cable to power supply
9
Pump
7
8
70 mm
15/83
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