Page 1
Installation, Operating & Maintenance Instructions Control gate valve with Logic interface Series 642 DN 63-400 mm (I.D. 2.5“ - 16") This manual is valid for the valve ordering number(s): 642 . . - . .GC- ..(1 sensor input) 642 .
Page 2
The VAT firmware may not be used for purposes other than those intended nor is it permitted to make copies of the VAT firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to other people.
Series 642 Contents Description of product ................ 5 Identification of product ....................5 Use of product ......................... 5 Used abbreviations ......................5 Related documents......................5 Important information....................... 5 Technical data ......................... 6 1.6.1 Control and actuating unit ................. 6 1.6.2 Valve unit ......................
Page 4
Series 642 4.7.3 Tuning of pressure control with soft pump ............57 Operation ................... 60 Normal operation ......................60 5.1.1 Local operation ....................61 5.1.2 Remote operation .................... 62 Close valve ........................63 Open valve........................63 Position control ......................63 Pressure control ......................
This product is a control gate valve with isolation functionality. It is intended to use for downstream pressure control applications. Use product for clean and dry vacuum applications only. Other applications are only allowed with the written permission of VAT. Used abbreviations Abbreviation...
DESCRIPTION OF PRODUCT Series 642 Technical data 1.6.1 Control and actuating unit Description Power input (α) +24 VDC (±10%) @ 0.5 V pk- [connector: POWER] pk max. [642 . . - . . A . - ../ 642 . . - . . G . - ..] 50 W max.
Page 7
Series 642 DESCRIPTION OF PRODUCT Control and actuating unit (continuation) Sensor input Signal input voltage 0-10 VDC / Ri>100 kΩ [connector: SENSOR] ADC resolution 0.23 mV Sampling time 10 ms Digital inputs ±24 VDC max. [connector: INTERFACE] Digital outputs [connector: INTERFACE] Input voltage 70 VDC or 70 V peak max.
DESCRIPTION OF PRODUCT Series 642 1.6.2 Valve unit Description Pressure range at 20°C (unheated on delivery) • 1 × 10E-8 mbar to 2.0 bar (abs) DN63…200 • 1 × 10E-8 mbar to 1.2 bar (abs) DN250…400 1 × 10E-9 mbar ls Leak rate to outside / seat at 20°C (unheated on delivery) Differential pressure on the gate •...
Series 642 SAFETY Safety Compulsory reading material Read this chapter prior to performing any work with or on the product. It contains important information that is significant for your own personal safety. This chapter must have been read and understood by all persons who perform any kind of work with or on the product during any stage of its serviceable life.
SAFETY Series 642 Personnel qualifications WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Safety labels Label Part No. Location on valve On protective foil covering of T-9001-156 valve opening 10/94...
Actuation is performed with a stepper motor and controller. The stepper motor/controller version ensures accurate pressure control due to exact gate positioning. For leak tight closing the VATLOCK principle is applied. For details refer to VAT catalog. 605403ED Edition 2017-11-24...
DESIGN AND FUNCTION Series 642 3.2.1 Pressure control system overview and function Vacuum pressures are always absolute pressures unless explicitly specified as pressure differences. Valve Process chamber Gas inlet Pressure sensor(s) Sensor cable Controller and actuator Seff Cable to remote control unit Cable to power supply HV Pump Q / p...
Series 642 DESIGN AND FUNCTION 3.2.1.1 Way of operation The controller compares the actual pressure in the process chamber given by the pressure sensor with the preset pressure. The controller uses the difference between actual and set pressure to calculate the correct position of the control valve. The controller drives the control valve into the correct position and the actual pressure again equals the set pressure.
Make sure that the supplied products are in accordance with your order. • Inspect the quality of the supplied products visually. If it does not meet your requirements, please contact VAT immediately. • Store the original packaging material. It may be useful if products must be returned to VAT.
Series 642 INSTALLATION Installation into the system WARNING Valve opening Risk of serious injury. Human body parts must be kept out of the valve opening and away from moving parts. Do not connect the controller to power before the valve is installed complete into the system.
INSTALLATION Series 642 4.2.1 Installation space condition Install the valve with integrated controller with space for dismantling and air circulation as shown in figure below. (sample picture) Overview table: DN to required distance (d) for maintenance. 80 / 100 320 / 350 16/94 Edition 2017-11-24 605403ED...
Refer also to «Safety mode». 8. This valve may optionally be equipped with a heating device. Connect VAT heating device according to manual of respective heating device.
Series 642 INSTALLATION Tightening torque The torque values below are dependent on many factors, such as materials involved, surface quality, surface treatment, and lubrication. The torques below are valid if immersion depth of the mounting screws is at least once the thread diameter (min. 1d), and the friction coefficient of the screw-flange + µ...
2½ 1960 1960 2450 2940 2940 3430 3920 3920 7840 1760 In case of both kind of forces are occurring («FA» und «M»), the above shown values are invalid. Please contact VAT in this case. 605403ED Edition 2017-11-24 21/94...
INSTALLATION Series 642 4.4.1 Requirements to sensor connection To achieve fast and accurate pressure control a fast sensor response is required. Sensor response time: < 50ms. The sensor is normally connected to the chamber by a pipe. To maintain that the response time is not degraded by this connection it needs to meet the following requirements: •...
Series 642 INSTALLATION 4.5.1 Ground connection Recommendation for ground strap between controller ground and system chassis. ∅ ∅ Material L (Length max.) B1 (min.) B2 (min.) d1 ( d2 ( copper tinned 200 mm 25 mm 25 mm 4.5 mm customized Chassis (PE) (Protective Earth)
INSTALLATION Series 642 4.5.2 Sensor supply concepts Those valves offer 4 alternative concepts to supply the sensor(s) with power. This depends on the sensor type and valve version that is used. Concepts: • External +24 VDC supplied to POWER connector is feedthrough to SENSOR connector to supply 24 VDC sensors.
• VAT fuse recommendation: (a) 5AF, / (b) Safety switch 3A min. • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources.
Page 26
S C1 091 A • VAT fuse recommendation: (a) 5AF, / (b) Safety switch 3A min. • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources.
SC 1090 A • VAT fuse recommendation: (a) 5AF, / (b) Safety switch 3A min. • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. •...
Page 28
SC 1092 A • VAT fuse recommendation: (a) 5AF, / (b) Safety switch 3A min. • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. •...
You can use our Software (freeware) 'Control Performance Analyzer' which can be downloaded from: http://www.vatvalve.com/customer-service/informations-and-downloads/control-performance-analyzer. Alternatively the VAT Service Box2 can be connected to the service port for setup and local operation. The service port is not galvanic isolated. Therefore we recommend using this only for setup, testing and maintenance and not for permanent control.
INSTALLATION Series 642 4.5.6 Functions and Wiring Logic interface allows for remote operation by means of digital and analog signals. Digital inputs may be operated either by switches or by voltage sources. a) Configuration with switches for digital inputs: SC1096 A Do not connect other pins than indicated in the schematics above! Use only screws with 4-40UNC thread for fastening the DB-25 connector! 30/94...
Page 31
Series 642 INSTALLATION a) Configuration with voltage source for digital inputs: SC1097A Do not connect other pins than indicated in the schematics above! Use only screws with 4-40UNC thread for fastening the DB-25 connector! 605403ED Edition 2017-11-24 31/94...
INSTALLATION Series 642 4.5.7 Digital inputs Function Signal Description Priority type This pin selects the control mode. This valve may either be operated as pressure controller or as position controller. PRESSURE CONTROL is activated as long as optocoupler is ‘on’. CONTROL Digital The PID controller controls the chamber pressure according to...
Page 33
Series 642 INSTALLATION Function Signal Description Priority type This function compensates the pressure gauge offset voltage and sets the pressure value to zero. In case of a 2 sensor system both sensor inputs will be adjusted. This function is initiated by the ‘off’ to ‘on’ transition of the optocoupler.
INSTALLATION Series 642 4.5.8 Digital outputs Function Signal Description type This output is active in all operation modes and indicates either that the valve is open or that a service is requested. VALVE A service request is indicated when the valve requires cleaning due OPEN Digital to contamination.
Series 642 INSTALLATION 4.5.9 Analog inputs and outputs Function Signal Description type The meaning of the setpoint input depends on the operation mode. LEARN: A voltage of 0-10V shall be applied to this input as pressure limit for learn. The limit pressure is in linear relation to the applied voltage. 10V relates to sensor full scale.
For ease setup (in Local mode) of ‘Interface’, ‘Valve’, ‘Sensor’, ‘Senor ZERO’, ‘LEARN’ and ‘PRESSURE CONTROL COFIGURATION’ it is possible to use the CPA 3.0, The free download is available on the VAT homepage: http://www.vatvalve.com/customer- service/informations-and-downloads/control-performance-analyzer To enable the valve for pressure control setup steps 1 to 6 must be performed.
Series 642 INSTALLATION • Functionality of digital inputs CLOSE VALVE and OPEN VALVE must be selected. These may be configured as ‘not inverted‘ or ‘inverted‘. Default is ‘not inverted‘. • LEARN range configuration for remote operation must be selected. This may either be ‘full range’ or pressure limit according of analog SETPOINT input. Default is ‘full range‘.
INSTALLATION Series 642 4.6.4 Sensor configuration Basic sensor configuration must be adapted according to application needs. • ZERO function: This may be ‘disabled’ or ‘enabled’. Default is ‘enabled‘. Refer also to chapter «ZERO». • Sensor configuration with 2 sensor version [642 . . - . . . E - ..]. Refer also to chapter: «Pressure control operation with 2 sensors».
Series 642 INSTALLATION 4.6.1 LEARN (adaptive) LEARN adapts the PID controller of the valve to the vacuum system and its operating conditions. LEARN must be executed only once during system setup. The LEARN routine determines the characteristic of the vacuum system. Based on this, the PID controller is able to run fast and accurate pressure control cycles.
Page 40
INSTALLATION Series 642 Gasflow calculation for LEARN: Do not apply a different gasflow for learn than determined below. Otherwise pressure control performance may be insufficient. Required pressure / flow regime must be known to calculate the most suitable learn gas flow for a specific application. At first it is necessary to find out about the required control range respectively its conductance values.
Series 642 INSTALLATION 4.6.2 Pressure control algorithem Select the configuration what your application needs. Constant gas flow available Constant gas flow System Configuration not available Tv*<= 500 sec Tv* > 500 sec Downstream Adaptive pressure Process controller Fixed pressure controller chamber (Refer to chapter: (Refer to chapter: Pressure controller)
Page 42
3 = Soft pump For easy setup (Local operation) of ‘Pressure controller’ and ‘Pressure control parameter’ please use the VAT “Control Performance Analyzer” CPA 3.0. There is a free download on the VAT home page, refer to: http://www.vatvalve.com/customer-service/informations-and-downloads/control- performance-analyzer 4.6.2.1 With CPA 3.0 direct setup (standard)
Page 43
Series 642 INSTALLATION 1.1.1.2 Pressure control parameter Local operation: Remote operation: (‘Control View’ or ‘Control Performance Analyzer’) • Open CV or CPA • Go to «Tools» > «Terminal» and send setup command s:02 according to application needs. (possibility of adjustment see below) Acknowledgement Command (within 10ms after reception of...
Page 44
INSTALLATION Series 642 Pressure control algorithem • Local operation only: With CPA direct setup, see chapter: With CPA 3.0 direct setup (standard). With CPA, go to «Tools» > «Terminal» and send setup commands according to application needs. See next tables. 4.6.2.2 Adaptive control algorithm (downstream) Parameter...
Page 45
Series 642 INSTALLATION In the adaptive pressure controller mode, the RAMP TIME parameter also can be a value to minimize over- / undershooting. The ramp could be used to harmonize the adaptive control algorithm. GAIN FACTOR The GAIN FACOTR is a control parameter to adapt the performance of the pressure control algorithm. A higher gain results in faster response, higher over- / undershoot of pressure.
Page 46
INSTALLATION Series 642 4.6.2.3 Fixed 1 control algorithm Parameter Command Request Data Type Values s:02B01c s:02 c = 0.00…1 000.0 ’ ’ RAMP TIME FLOAT Default is: 0.00 i:02B01 i:02B01c c = 0 or 1 s:02B02c s:02 0 = constant time RAMP MODE UINT 1 = constant slope...
Page 47
Series 642 INSTALLATION Example: Set RAMP MODE of the Fixed 1 pressure controller to the value 0 (fixed time) Command Pressure Parameter selection variable Parameter value controller s:02 B (a) 02 (bb) 0 (c) s:02B020 To optimize Fixed 1 control algorithm, refer to chapter «Tuning of control performance».
Pressure / flow / gas conditions to be controlled • Chamber volume • Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 605403ED Edition 2017-11-24 49/94...
Page 50
INSTALLATION Series 642 4.7.1.1 Gain factor adjustment The gain factor effects: Stability, Response time Default value is 1. Adjustment range is from 0.0001 to 7.5. Higher gain results in: faster response higher over- / undershoot of pressure Lower gain results in: slower response lower over- / undershoot of pressure Adjustment procedure:...
Page 51
Series 642 INSTALLATION 4.7.1.2 Sensor delay adjustment Sensor delay adjustment effects: Stability Default value is 0sensorDeay0. Adjustment range is from 0 to 1.0s. Pipes and orifices for sensor attachment delay response time and so badly impact pressure control stability. By adapting this parameter to the approximate delay time stability problems can be reduced. But control response time will be slowed down by this measure.
Page 52
INSTALLATION Series 642 4.7.1.3 Setpoint ramp adjustment Setpoint ramp effects: Undershoot of pressure, Response time Default value for Setpoint Ramp is 0. Adjustment range for Setpoint Ramp is from 0 to 10 s. This parameter defines the time that is used to decrease / raise pressure between 2 setpoints. Especially in pressure decrease situations at low flows pressure response can be improved much by adapting setpoint ramp time.
Page 53
Series 642 INSTALLATION 4.7.1.4 Valve speed adjustment Valve speed effects: Response time Default value is 1000. Adjustment range is from 1 to 1000. This parameter effects valve plate actuating speed. Speed adjustment is effective for PRESSURE CONTROL and POSITION CONTROL. Normally best pressure control response is achieved with max.
INSTALLATION Series 642 4.7.2 Tuning of pressure control performance with fixed PI control 4.7.2.1 Optimizing P gain and I gain This valve may be used for downstream or upstream pressure control depending on configuration. The PI parameters of the pressure controller require correct adjustment. These parameters must be set once during system setup and are stored in the device memory which is power fail save.
Page 55
Series 642 INSTALLATION Optimizing P gain While optimizing P gain, the gas flow determined above has to be constant all the time. Start optimization with P gain set to 1.0 and I gain set to 0.0. Set chamber pressure to SP2, wait until the pressure is stable. Set pressure to SP1. If the transition from SP2 to SP1 results in a significant pressure over shoot or even does not stabilize at all, the P gain is too high.
Page 56
Pressure / flow / gas conditions to be controlled • Chamber volume • Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 56/94 Edition 2017-11-24 605403ED...
The VAT soft pump controller requires a pump down time shorter than 10 sec. for good control results. If the required pump down time is longer than 10 sec., the pump down curve has to be partitioned into sections shorter than 10 sec.
Page 58
INSTALLATION Series 642 Optimizing P gain WE start by setting the P gain to 1.0 as a trial value and adjust according to the response. The pump down routine has to be controlled as follows: Move control valve into close position Start pump down by opening the pump isolation valve or starting the pump and sending the first pressure set point to the valve controller.
Page 59
Pressure / flow / gas conditions to be controlled • Chamber volume • Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 605403ED Edition 2017-11-24 59/94...
OPERATION Series 642 Operation WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. WARNING Valve opening Risk of serious injury. Human body parts must be kept out of the valve opening and away from moving parts. Do not connect the controller to power before the valve is installed complete into the system.
Local operation means that the valve is operated via the service port using a computer or the Service Box 2. When using a computer, a service cable and a software from VAT is required. You can use our Software (freeware) 'Control Performance Analyzer' which can be downloaded from: http://www.vatvalve.com/customer-service/informations-and-downloads/control-performance-analyzer.
OPERATION Series 642 5.1.2 Remote operation This product is equipped with a Logic interface to allow for remote operation. See section «Logic interface» for details. 'Control Performance Analyzer' software or 'Service Box 2' may be used for monitoring during remote control. 'Control Performance Analyzer' software 'Service Box 2' In case ‘Control Performance Analyzer’...
Series 642 OPERATION Close valve Local operation: Remote operation: (‘Control View’, ‘Control Performance Analyzer’ or (Refer to chapter «Digital inputs» for details) ‘Service Box 2‘) Push CLOSE button Send CLOSE VALVE Open valve Local operation: Remote operation: (‘Control View’, ‘Control Performance Analyzer’ or (Refer to chapter «Digital inputs»...
OPERATION Series 642 5.5.1 Operation with 2 sensors [applicable with 612 . . - . . . E - ..version only] If 2 sensor operation is enabled, changeover between the sensors is done automatically during pressure control.
Series 642 OPERATION Display information There is a 4 digit display located on the panel. It displays configuration, status and position information. For details see following tables. 1 2 3 4 Display 5.6.1 Power up Description Digit 1 Digit 2 Digit 3 Digit 4 ●...
1). Default is closed. Display indicates F. 1) Provide that battery pack of the VAT controller is charged. Charging time after power up is 2 minutes max.. All parameters are stored in a power fail save memory.
TROUBLE SHOOTING Series 642 Trouble shooting Failure Check Action No dots lighted on display - 24 V power supply ok? - Connect valve to power supply according to «Electrical connection» and make sure that power supply is working. Remote operation does not - Local operation via - Switch to remote operation.
Page 69
TROUBLE SHOOTING Series 642 Failure Check Action Pressure reading is wrong - Sensor(s) connected? - Refer to «Electrical connection». - 2 sensor version present - Check valve version on page 1. Verify pressure reading is negative at valve controller? configuration. Refer to «Setup procedure». - ZERO done? - Perform ZERO when base pressure is reached.
Before carrying out any maintenance, please contact VAT. It has to be individually decided whether the maintenance can be performed by the customer or has to be carried out by VAT. Please write down the fabrication number of the valve before contact VAT. Refer to chapter «Identification of product»...
Replacement of gate seal (gate and bonnet seal) and valve cleaning Required frequency of cleaning and replacement of seals is depending on process conditions. VAT can give the following recommendations for preventive maintenance: Replacement of Recommendation Gate seal (gate and bonnet seal) Every 100’000 cycles...
MAINTENANCE Series 642 7.2.1 Replacement of gate seals and valve cleaning 7.2.1.1 Required tools • • Allen Wrench 4 mm (Allen torque wrench 4 mm) Isopropyl alcohol • • 2 × Open end wrench 13 mm Vacuum grease (see chapter spare parts) •...
Page 73
Series 642 MAINTENANCE Description Required tool Pull out the gate until the crank bolt can be reached 10. Loosen and remove the crank bolt Allen wrench 4 mm screw 11. Remove the crank bolt from lever 12. Pull out the gate assembly complete Caution! Take care that gate is not scratching at lever while pulling out...
Page 74
MAINTENANCE Series 642 Description Required tool Clean room wiper a 15. Clean the o-ring groove and the gate little soaked with assembly isopropyl alcohol 16. Install the new o-ring equally in o-ring groove (for new o-ring refer to chapter: «Spare parts») Cleaning tool a little soaked with isopropyl alcohol...
Page 75
Series 642 MAINTENANCE Description Required tool 20. Insert the crank bolt at lever If necessary use a new crank bolt (for new crank bolt refer to chapter: «Spare parts»). 21. Fasten the crank bolt screw Allen torque wrench adequately 4 mm 22.
Page 76
MAINTENANCE Series 642 Description Required tool 26. Reassemble the bonnet and bonnet seal with valve DN 63 / 100 1 × Open end torque wrench 13 mm 1 × Open end wrench 13 mm 27. Fasten the bonnet screws with: •...
Series 642 MAINTENANCE 7.2.2 Replacement of Option board NOTICE Electrostatic discharge Electronic components could be damage. All work on the control and actuating unit has to be done under ESD protected environment to prevent electronic components from damage. NOTICE Burned connector pins (spark) Connector pins or electronic parts could damage, if plugged and unplugged under power.
Page 78
MAINTENANCE Series 642 7.2.2.1 Durability of power fail battery The curves in the graph show the estimated life of Ultra Cap PFO in the worst condition (max. sensor load = 1 A, valve heating temperature = 150 °C). If the SPS is not fully loaded (< 1 A) or heating temperature of valve body is lower than 150 °C, the corresponding life time curve will be somewhere in between the upper and the lower curve.
Series 642 MAINTENANCE 7.2.3 Retrofit / replacement procedure Top view on control and actuating unit with panel removed: Master board Connector board Option board Interface board Motor driver board All boards have a fixed position into control and actuating unit. It is not possible to fit a board in other position as shown in picture above! 7.2.3.1 Required tools...
Page 80
MAINTENANCE Series 642 Description Required tools Attention to ESD protection! Disconnect all electrical connections Pozidriv screw driver size1 at controller. Open end wrench 7 mm Remove the panel screws. Pozidriv screw driver size1 Remove this screws and the cover. Screw driver size 2 Remove female screw locks from Open end wrench 4.5 mm connectors.
Page 81
Series 642 MAINTENANCE Description Required tools Remove or replace option board. (sample picture) Reassemble all parts in reverse order (see steps 6…3). Tighten panel screws with 1.1 Nm (see step 3). Pozidriv screw driver size1 Connect all electrical connections. Open end wrench 7 mm If you need any further information, please contact one of our service centers.
Series 642 Repairs Repairs may only be carried out by the VAT service staff. In exceptional cases, the customer is allowed to carry out the repairs, but only with the prior consent of VAT. Please contact one of our service centers. You will find the addresses on our website www.vatvalve.com.
Series 642 DISMOUNTING AND STORAGE Dismounting and Storage WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Dismounting NOTICE Contamination Gate and other parts of the valve must be protected from contamination. Always wear clean room gloves when handling the valve.
DISMOUNTING AND STORAGE Series 642 Storage NOTICE Wrong storage Inappropriate temperatures and humidity may cause damage to the product. Valve must be stored at: – relative humidity between 10% and 70% – temperature between +10 °C and +50 °C – non-condensing environment NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used.
If products are radioactively contaminated, the VAT form «Contamination and Radiation Report» must be filled out. Please contact VAT in advance. • If products are sent to VAT in contaminated condition, VAT will carry out the decontaminating procedure at the customer's expense. 10.1...
10.2 Transport NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used. Always use the original packaging material and handle product with care. VAT disclaims any liability for damages resulting from inappropriate packaging. 86/94 Edition 2017-11-24 605403ED...
Series 642 DISPOSAL Disposal WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. 605403ED Edition 2017-11-24 87/94...
«Identification of product». This is to ensure that the appropriate spare parts are supplied. • VAT makes a difference between spare parts that may be replaced by the customer and those that need to be replaced by the VAT service staff. •...
Need help?
Do you have a question about the 642 Series and is the answer not in the manual?
Questions and answers