Connection Overview - VAT 616 Series Installation, Operating, & Maintenance Instructions

Series 616
4.4

Connection overview

Controller IC2-H3:
System:
1143687EA
2
1 M 6
9
Edition 10.08.2022
INSTALLATION
Ground (FE)
connection
1
3
2
3
4
4
5
5
6
7
7
8
8
9
Valve
Process chamber
Gas inlet
Pressure sensor(s)
Sensor cable(s)
Controller and actuator
Cable to remote control unit
Cable to power supply
Pump
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