Avoiding Process Metal Deposition - Inficon Transpector XPR 3+ Operating Manual

9
If the optional Pirani Gauge Interlock and/or the optional Isolation Valve were
purchased with the Transpector XPR 3+ attach the Heating Jackets, see
section 1.16.11 on page 1-25
10
Install the Software.

1.16.1 Avoiding Process Metal Deposition

The sensor is installed on a vacuum system with a 2.75 in. DN40 ConFlat flange.
ConFlat flanges, and similar compatible types made by other manufacturers, are
used for attaching devices to ports on high vacuum systems. If there are no
concerns with the installation of this type of flange, proceed to
Attaching the Sensor to the Vacuum Chamber, on page
NOTE: If the system does not have a port with a compatible mating flange, an
To install these flanges without leaks, follow proper operating procedures. These
flanges are sealed with a metal gasket and can be heated for bakeout to
temperatures of up to 200°C. For bakeout temperatures when a sensor is installed,
see Table 1-1 on page
1.16.1.1 Assembling ConFlat Flanges
To assemble a pair of ConFlat flanges:
1
Wipe the sealing areas of the flanges with a laboratory towel using a clean
solvent, such as water free alcohol. These areas must be clean and free of
particulate matter.
CAUTION
Conductive deposits on the ceramic ion source plate
from the process can cause electrical short circuits and
a general failure of Transpector XPR 3+. The use of a 90
valve between the process and the sensor will alleviate
this condition. The installation of a 90
in ConFlat Flanges.
adapter will be necessary.
1-21.
CAUTION
Do not touch any surface on the gasket and flange faces
with bare fingers. If it is necessary to touch any of these
parts, always wear clean linen, nylon, powder free latex
or vinyl laboratory gloves.
Transpector XPR 3+ Operating Manual
o
o
valve is described
section 1.16.5.1,
1-19.
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