Inficon XTC/3 Manuals

Inficon XTC/3 Manuals

Manuals and User Guides for Inficon XTC/3. We have 1 Inficon XTC/3 manual available for free PDF download: Operating Manual

Inficon XTC/3 Operating Manual

Inficon XTC/3 Operating Manual (210 pages)

thin film deposition controller

Brand: Inficon | Category: Controller | Size: 7 MB

Table of Contents

Table of Contents
5
Introduction and Specifications
12
Chapter 1 Introduction

12
- Related Manuals
  13
  - XTC/3 Safety
    13
  - Definition of Notes, Cautions and Warnings
    13
  - General Safety Information
    14
  - Earth Ground
    15
  - Main Power Connection
    15
    
    How to Contact INFICON
    16
  - Returning Sensor to INFICON
    16
    
    XTC/3 Specifications
    17
  - Measurement
    17
  - Screens and Parameters
    17
  - Process Recipe Storage
    18
- Film Parameters
  18
  - Display
    19
  - Source / Recorder Outputs
    20
  - Relays / Inputs
    20
  - Remote Communications
    21
  - Accessories
    21
  - Power
    21
  - Operating Environment
    22
  - Storage Temperature
    22
  - Warm up Period
    22
  - Size
    22
  - Connector Clearance Requirements
    22
  - Weight
    22
  - Cleaning
    22
    
    Base Configurations
    23
    
    Parts and Options Overview
    23
    
    Unpacking and Inspection
    23
    
    Accessories
    24
    
    Replacement Cables & Oscillators
    25
    
    Sensors
    25
    
    Initial Power on Verification
    27
    
    Installation and Interfaces
    29
Chapter 2 Location Guidelines

29
- Sensor Types
  29
- Sensor Installation
  30
- XTC/3 Installation
  32
- Source Control Connection
  35
- Input and Output Connections
  36
- System I/O Connector
  37
- Aux I/O Connector
  38
- Inputs
  38
  - RS-232C Communications
    39
  - TCP/IP Communications Connection (Optional)
    39
  - Network Connection
    39
  - Change the IP Address in XTC/3
    39
  - PC Setup
    39
    
    Operation
    40
Chapter 3

40
- Front Panel Controls
  40
- Rear Panel Interfaces
  41
- Displays
  43
- Menu Display
  44
- Operate Display
  44
- Crystal Life and Starting Frequency
  47
- Choosing the Right Crystal
  47
- Percent Life Auto-Zero
  47
  - Film Name Display
    48
  - Process List Display (XTC/3M Only)
    49
  - General Parameter Display
    50
  - I/O Map Display
    51
  - Diagnostics Display
    51
  - Sensor Information Display
    52
    
    Executing a Process
    53
    
    State Descriptions
    56
    
    Alarms and Stops
    62
- Alarms
  62
- Stops
  62
- Recovering from STOP
  63
  - Special Features
    63
  - Automating a Process
    63
  - Ion Assisted Deposition
    64
  - Control Delay
    64
  - Shutter Delay
    64
  - Rate Ramp Trigger of Final Thickness
    64
  - Transfer Sensor
    64
  - Crucible Switching
    65
- Bin Mode
  65
- BCD Mode (XTC/3M Only)
  65
  - Crystal Switching
    65
- Crystaltwo
  66
- Crystalsix
  67
- Crystal12
  67
- Rotary Sensor Crystal Switching
  68
- Dual Head
  68
- XTC/3S Sensor Shutter / Crystalswitch Output
  69
  - Start Layer Without Backup Crystal Configuration
    69
  - Ratewatcher
    70
  - Hand-Held Controller (Option)
    70
  - Lock Code
    71
  - Parameter Clear
    71
  - Datalog
    71
  - Tcp/Ip
    72
    
    XTC/3 Programming
    73
Chapter 4

73
- Overview
  73
- Film Set up Overview
  75
- Film Set up
  75
- Film Definition
  76
- Film Definition Parameters
  77
- Pre/Post Deposition Parameters
  77
- Deposit
  79
- Sensor Parameters
  80
- Setting S&Q Parameters (Soft Crystal Failures)
  81
- Stability
  81
- Quality
  82
  - Source Parameters
    83
  - Option
    86
    
    Process Set-Up Overview (XTC/3M Only)
    88
    
    Process Definition
    89
  - Process Number
    89
  - Process Name
    89
  - Building the Layer Sequence
    89
    
    General Parameters
    90
    
    Process Parameters
    91
    
    Hardware Parameters
    93
  - XTC/3S Film Select Option
    95
    
    Comm Info
    96
  - Remote Communication Parameters
    97
    
    I/O Overview
    98
    
    XTC/3S Inputs and Outputs
    99
    
    XTC/3M Inputs
    100
    
    XTC/3M Outputs
    101
    
    Clear Input or Output
    103
    
    Remote Communications
    104
Chapter 5 Remote Communications Overview

104
- Message Protocols
  104
- Physical Connections
  105
- RS-232C Serial Port
  105
- TCP/IP Ethernet Port
  105
- Network Connection
  105
- How to Set up the Network Protocol on the PC
  106
  - Standard Protocol Message Format
    109
  - Standard Protocol
    109
- Standard Command Packet (Host to XTC/3 Message)
  109
- Standard Response Packet (XTC/3 to Host Message)
  111
  - Standard Communication Commands
    113
- Standard ECHO Command
  113
- Standard HELLO Command
  113
- Standard QUERY Commands
  114
- Query Block
  114
- Standard Query Film Name (XTC3/M Only)
  116
- Standard Query Film Parameters
  116
- Standard Query General Parameter
  116
- Standard Query Input Definition (XTC/3M Only)
  117
- Standard Query Output Definition (XTC/3M Only)
  118
- Standard Query Output Type Definition (XTC/3M Only)
  121
- Standard Query Process Parameters (XTC/3M Only)
  121
  - Standard UPDATE Commands
    122
- Update Block
  122
- Standard Update Film Name (XTC/3M Only)
  123
- Standard Update Film Parameters
  124
- Standard Update General Parameters
  128
- Standard Update Input Definition (XTC/3M Only)
  130
- Standard Update Output Definition (XTC/3M Only)
  130
- Standard Update Output Type Definition (XTC/3M Only)
  130
- Standard Update Process Parameters (XTC/3M Only)
  131
  - Standard STATUS Commands
    131
  - Standard REMOTE Commands
    137
    
    Basic Command Structure
    139
    
    XTC/2 Protocols
    139
    
    XTC/2 Serial Communication with Checksum
    140
    
    XTC/2 Serial Communications - no Checksum
    140
    
    XTC/2 Error Codes
    141
    
    XTC/2 Message Strings
    142
  - XTC/2 ECHO Command
    142
  - XTC/2 HELLO Command
    142
  - XTC/2 QUERY Command
    142
  - XTC/2 UPDATE Command
    144
  - XTC/2 STATUS Command
    145
  - XTC/2 REMOTE Commands
    149
  - XTC/2 Sample Host Programs
    151
- XTC/2 Program Without Checksum
  151
- XTC/2 Program with Checksum
  152
  - Troubleshooting, Status and Error Messages
    154
Chapter 6

154
- Status and Error Messages
  154
- XTC/3 Diagnostics
  159
- Troubleshooting Guide
  161
- Troubleshooting XTC/3
  162
- Troubleshooting Transducers/Sensors
  165
- Verifying Crystal Switching and Rotation
  165
- Verifying Sensor Shutter Operation
  165
  - Troubleshooting Computer Communications
    171
- TCP/IP Module LED Diagnostics
  171
  - Replacing the Crystal
    172
  - Front Load Single Sensors
    172
  - Shuttered Front Load Single and Front Load Dual Sensors
    173
  - Cool Drawer Sensor
    173
  - Bakeable Sensor
    175
  - Sputtering Sensor
    176
  - Crystal Snatcher
    177
  - Crystalsix
    177
  - Crystal12
    177
    
    Crystal Sensor Emulator PN 760-601-G2
    178
  - Diagnostic Procedures
    179
- Measurement System Diagnostic Procedure
  179
- Feed-Through or In-Vacuum Cable
  180
  - Diagnostic Procedure
    180
- Sensor Head or Monitor Crystal Diagnostic Procedure
  181
- System Diagnostics Pass but
  182
  - Crystal Fail Message Remains
    182
  - XTAL Life
    182
  - Sensor Cover Connection
    183
- Compatible Sensor Heads
  183
- Incompatible Sensor Heads
  183
  - Specifications
    184
    
    Calibration Procedures
    185
Chapter 7

185
- Importance of Density, Tooling and Z-Ratio
  185
- Determining Density
  185
- Determining Tooling
  186
- Laboratory Determination of Z-Ratio
  187
- Estimating Z-Ratio
  188
  - Measurement and Control Theory
    189
Chapter 8 Basics

189
- Monitor Crystals
  190
- Period Measurement Technique
  192
- Z-Match Technique
  193
- Active Oscillator
  194
- Modelock Oscillator
  195
- Control Loop Theory
  197
  - Material Table
    201

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