Rubber Microscope Legs: If Wafer Transfer Sound Has Increased - Olympus AL120-6Series Maintenance Manual

Maintenance Manual

7 Rubber Microscope Legs: If wafer transfer sound has increased

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1) Remove the stage and replace the rubber blocks on the
underside of the microscope.
Since the wafer transfer position must be checked and other
related work must be done, please contact your Olympus
distributor.
Standard Working Time 60 minutes
Replacement of Consumables
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