Olympus AL120-12 Series Operation Manual
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Olympus AL120-12 Series Operation Manual

Olympus AL120-12 Series Operation Manual

300mm semiconductor wafer loader
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Thank you for purchasing the Olympus AL120 Series Wafer Loader.
In order to fully utilize its performance and secure safety, please read this manual before operation.
Please also keep it at hand during operation as well as for future reference.
AL120-12
300mm Semiconductor Wafer Loader
Operation Manual
Wafer Loader
AL120-LMB12-LP3
AL120-LMB12-F
Wafer Loader Accessory
AL120-VS12
AL120-RC
Series
AM5059-01

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Summary of Contents for Olympus AL120-12 Series

  • Page 1 AL120-VS12 AL120-RC Thank you for purchasing the Olympus AL120 Series Wafer Loader. In order to fully utilize its performance and secure safety, please read this manual before operation. Please also keep it at hand during operation as well as for future reference.
  • Page 2 This page intentionally left blank.
  • Page 3 Introduction Operation/Maintenance Manual i Introduction Option Microscope MX61L MX63L Wafer Loader AL120-LMB12-F AL120-LMB12-LP3 Vacuum Stage AL120-VS12 Option Remote Controller AL120-RC AL120 Series Lineup This product is an auto loader to transfer the wafer from the cassette to the microscope. The macro observation is available while transferring wafers.
  • Page 4 2. Safety Precautions ＣＡＵＴＩＯＮ Always use the power cord provided by Olympus. If no power cord is provided , please select the power cord by referring to the section “PROPER SELECTION OF THE POWER SUPPLY CORD” at the end of this chapter. If the proper power cord is not used, Olympus can no longer warrant the electrical safety performance of the equipment.
  • Page 5 Safety Precautions or the buffer tank is not provided with this product. If you need them, contact Olympus. 11. Be careful, if you transfer the wafer in the down-flow status that may allow the wafer to sway, the risk may be caused in transferring the wafer.
  • Page 6 Introduction Operation/Maintenance Manual /Safety Precautions AL120-LMB12-F installation space Unit:mm Stage movement range installation space AL120-LMB12-F extermal view,eye point and center of gravity Unit:mm Eye Point Center of gravity Center of gravity Page...
  • Page 7 Introduction/ Operation/Maintenance Manual Safety Precautions AL120-LMB12-LP3 installation space Unit:mm Stage movement range installation space AL120-LMB12-LP3 extermal view,eye point and center of gravity Unit:mm Center of gravity Center of gravity Eye Point Page...
  • Page 8 Introduction Operation/Maintenance Manual /Safety Precautions Earthquake Protection Please fix the equipment to the supporting floor so as not to be moved by unexpected force such as an earthquake using stoppers or equivalent means as per the requirements. Quakeproof fixed parts (Option) Material: Stainless Steel Plate Thickness: 9mm Fixing bolts: M10...
  • Page 9 Each arm of this device is electric drive. The whole device movement is attention not to put a hand and a face in a device. If these symbols become dirty or peel off, contact your nearest OLYMPUS distributor for exchange and servicing.
  • Page 10 1. Never disassemble the loader unnecessarily. This could affect the performance and function of the loader. 2. Contact your nearest OLYMPUS distributor if you need MSDS. 3. Confirm and observe your local municipal ordinances or regulations when you dispose of the loader.
  • Page 11 1. Confirm the following points before operating the loader. (1) Vacuum supply pressure: -67KPa to -80KPa When there are not a vacuum gauge and a regulator, please contact it to the OLYMPUS distributor. (2) Clean dry air supply pressure : 0.5MPa to 0.6MPa. [AL120-LMB12-LP3] (3) Make sure that there are no wafers or tools inside the wafer loader 2.
  • Page 12 (1) This device may not cause harmful interference, and (2) this device must accept any interference received, including interference that may cause undesired operation. Responsible Party Name: Olympus Scientific Solutions Americas Corp. Address: 48 Woerd Ave Waltham, MA 02453, U.S.A.
  • Page 13 Introduction/ Operation/Maintenance Manual Conformity Standards Page i-11...
  • Page 14 Introduction Operation/Maintenance Manual /Conformity Standards i-12 Page...
  • Page 15 Operation Manual Table of Contents 1 Nomenclature 1-1 Wafer Loader Main Body ······················································ 1-１ 1-1-1 AL120-LMB12-F ··········································································· 1-１ 1-1-2 AL120-LMB12-LP3········································································· 1-2 1-1-3 B ][AL120-LMB12-F] ······························· 1-3 ACK PART ISCONNECTOR 1-1-4 B ][AL120-LMB12-LP3] ···························· 1-3 ACK PART ISCONNECTOR 1-1-5 O ·········································································· 1-4 PERATION ANEL 1-1-6 FOUP...

  • Page 16: Table Of Contents

    Operation Manual Table of Contents 3 Top Macro Inspection 2-15 4 Back Macro Inspection and 2nd Back Macro Inspection: Setting the Back Macro Tilt Angle 2-15 5 Observation window for macro inspection （AL120-LMB12-LP3） 2-16 6 Transferring a Wafer onto the Vacuum Stage 2-17 7 Temporarily Registering the Inspection Results: [Registration] Button 2-18...
  • Page 17 Operation Manual Table of Contents 5-5 Power Failure ··································································· 5-12 5-6 Automatic Unloading ························································· 5-13 1 During the Top Macro Inspection 5-14 2 During the Back Macro Inspection 5-14 3 When a Wafer is on the F-arm 5-15 4 When a Wafer is on the A-arm 5-15 5 When a Wafer is on the Vacuum Stage 5-16...
  • Page 18 Operation Manual Table of Contents This page intentionally left blank. Page...
  • Page 19 Nomenclature Operation/Maintenance Manual 1 Nomenclature 1-1 Wafer Loader Main Body AL120-LMB12-F 1-1-1 Cover Warning label A-arm Stage operation permission LED F1-arm F2-arm Macro table Notch alignment sensor L-arm Hand guard Back Macro tilt angle control buttons Warning label Operation Panel Cassette base Joystick Lock ring...
  • Page 20 Nomenclature/ Operation/Maintenance Manual Wafer Loader Main Body AL120-LMB12-LP3 1-1-2 FOUP Opener FOUP opener operation LED Opening permission LED of the window Inspection view window Hand guard Page...
  • Page 21 Nomenclature/ Operation/Maintenance Manual Wafer Loader Main Body 1-1-3 Back part [Main Disconnector][AL120-LMB12-F] Stage Vacuum tube connector Circuit Breakers Vacuum tube receptacle AC line receptacle（Main Disconnector） 1-1-4 Back part [Main Disconnector][AL120-LMB12-LP3] Clean dry air tube receptacle Stage Vacuum tube connector Circuit Breakers Vacuum tube receptacle AC line receptacle（Main Disconnector）...

  • Page 22: Inspection

    Nomenclature/ Operation/Maintenance Manual 1-1-5 Operation Panel 4-way button Menu buttons Wafer unload Wafer No. button selector buttons Start button Quit button Pause button Observation setting buttons LED display Inspection Wafer alignment mode button position control Inspection time control Option button Top macro spin speed control Top macro spin...
  • Page 23 Nomenclature Operation/Maintenance Manual /Remote Controller (Option) 1-2 Remote Controller (Option) Remote controller: AL120-RC Registration setting button (Macro) Registration setting button (Micro) Start button Wafer unload button Page...
  • Page 24 Nomenclature/ Operation/Maintenance Manual Remote Controller (Option) Vacuum Stage Vacuum stage: AL120-VS12 Coarse adjustment grip Wafer rotating knob Y fine travel knob X fine travel knob Clutch lever Stage sensor plate Vacuum table Page...
  • Page 25 Operation Manual Outline of Operation Procedure 2 Outline of Operation Procedures 1 Description of Symbols The meanings of the symbols used in Chapter 2 and are explained below. [ ]: Indicates the name which is shown on the operation panel Names in parentheses are the names shown on the wafer loader operation panel.
  • Page 26 Outline of Operation Procedure Operation Manual Operation Flow Controls/Units Reference page section Turn the main switch ON Main switch Set a cassette in place on the cassette table Cassette guide and cassette setting 2-3 ----- Select the type of inspection wafer 4-way button ----- Set the sequence (type of inspection) [Observation] setup buttons...
  • Page 27 When setting a cassette in position, make sure to see if the cassette rattles due to deformation.  We take no responsibility for the breakage of wafers or any other problems in setting the cassette.  AL120-LMB12-F is dedicated to FOSB. If you cannot set the cassette to Kinematic coupling pins, contact Olympus. Page...
  • Page 28 Outline of Operation Procedure Operation Manual AL120-LMB12-LP3 Please set the cassette to Kinematic coupling pins 3 FOUP OPENER(AL120-LMB12-LP3) When the cassette is set to the correct position, “PRESENCE” “PLACEMENT” of “FOUP OPENER OPERETION LED” light is [PRESENCE] [PLACEMENT] When the start button of the Operation panel of is pushed, inspection starts.
  • Page 29 Operation Manual Outline of Operation Procedure 4 Selecting the Type of Inspection Wafer: 4-way button The initial menu appears on the liquid crystal panel . ② ① To change the type of inspection wafer shown on the liquid ③ ④ crystal panel , press the [M2] ...
  • Page 30 Outline of Operation Procedure Operation Manual 5 Setting the Sequence (Inspection Type: [Observation] Button The [Observation] setting buttons are used to specify an inspection sequence. Specify the inspection sequence before initiating inspection. The selected sequence cannot be changed once inspection is started. The LEDs in the selected [Observation] setting buttons light up.
  • Page 31 Operation Manual Outline of Operation Procedure 6 Setting the Inspection Mode The following three inspection modes can be chosen. Inspection mode button  All (100%) inspection   Sampling transfer P1 to P10 (Transfer pattern registration)  Sampling inspection L1 to L10 (Inspection pattern registration) (1) All (100%) inspection: Press the inspection mode button to turn on the [All] LED .
  • Page 32 Outline of Operation Procedure Operation Manual selected Wafer No. selector button lights up.) The button is alternately selected and deselected each time it is pressed. After the setting is completed, press the [M4] <Memory>  button. A buzzer sounds to indicate that registration is complete.
  • Page 33 Operation Manual Outline of Operation Procedure The [Wafer No.] buttons are on for the numbers of wafers whose inspection sequences are already specified. If you press the [Wafer No.] button for a wafer for which the inspection sequence is already specified, the LED in the specified inspection sequence button lights up.
  • Page 34 Outline of Operation Procedure Operation Manual 8 Setting the Orientation Flat and Notch Positions on the Microscope: [Wafer alignment] Position Control The orientation flat alignment position can be set to either four different points at intervals of 90 degrees (top, bottom, left and right), or to none.
  • Page 35 Operation Manual Outline of Operation Procedure 11 Setting Wafer Alignment when Unloading a Wafer When putting an inspected wafer into a cassette, the position of its orientation flat can be specified. (1) Displaying the setup screen AL120-LM12-LP3 1) When you are in the initial menu of the liquid crystal panel, Press Start button press the [M3] <Setting>...
  • Page 36 Outline of Operation Procedure Operation Manual 4) Press the [M1]: <Save> button to register the wafer alignment setting. This completes the wafer alignment setting at unloading. To exit without registering the wafer alignment setting (without changing the current setting), press the [M2]: <Cancel>...
  • Page 37 Operation Manual Outline of Operation Procedure 2-2 Vacuum Stage 1 How to Move the Vacuum Stage The vacuum stage can be moved by rotating the X fine travel knob   and the Y fine travel knob  in the lower right section of the stage. ...
  • Page 38 Outline of Operation Procedure Operation Manual 2-3 Start of Transfer 1 Start of Transfer: [Start] Button Press the [Start]  button to start inspection.   You can also start inspection using the remote controller.  Inspection starts when the stage is set to the wafer transfer position, even if the Microscope operation is not selected.
  • Page 39 Operation Manual Outline of Operation Procedure 3 Top Macro Inspection By tilting the joystick wafer is tilted in surface macro inspection. ① The wafer can be tilted to Omni direction. maximum 20 degree The joystick is locked when its lock ring  is rotated clockwise. (Use the lock ring to continue inspection at the same tilt angle.) ②...
  • Page 40 Outline of Operation Procedure Operation Manual Observation window for macro inspection （AL120-LMB12-LP3） The macro observation window can be open during macro inspection. Make sure to close the macro observation window after macro inspection. ① If it remains open error code “W0003” shows. Do not get a hand caught in the lid of FOUP opener, it may cause serious ＣＡＵＴＩＯＮ...
  • Page 41 Operation Manual Outline of Operation Procedure 6 Transferring a Wafer onto the Vacuum Stage To transfer a wafer onto the vacuum stage during the Microscope inspection, move the vacuum stage to the loader. ① Stage Operation Permission LED turns green on the detection sensor of the stage when F-arm finished descended.
  • Page 42 Outline of Operation Procedure Operation Manual 7 Temporarily Registering the Inspection Results: [Registration] Button The [Macro]  and [Micro]  buttons are used to register defective wafers. The registered wafers can be confirmed by pressing the  [Recall]  button after the inspection is completed. ...

  • Page 43: Stoppage Of Transfer

    Operation Manual Outline of Operation Procedure 2-4 Stoppage of Transfer 1 Temporarily Stopping the Loader during Inspection: [Pause] Button The [Pause] ① button stops the wafer in the inspection position and cancels the inspection time setting.  The LED in the [Pause]  button blinks during a pause. The loader will proceed to the next inspection when the [Start] ...

  • Page 44: Automatic Unloading

    Outline of Operation Procedure Operation Manual 3 Unloading a Wafer during Inspection: [Unload] Button The [Unload]  button is used to unload a wafer from the transfer  path in the loader (in the Top or Back Macro inspection position) into the cassette and transfer the next wafer.

  • Page 45: Inspections

    Operation Manual Inspections 3 Inspections 3-1 Preparations Make sure that there are no wafers in the transfer path or on the vacuum stage. If there are any wafers in the transfer path, return them to the cassette using tweezers or similar. Turn the main switch ON.
  • Page 46 Inspections Operation Manual The first wafer is transferred from the cassette. After the notched alignment (when it is selected), the wafer is transferred onto the vacuum stage. Do not move the stage until the wafer has completely transferred onto the vacuum stage. After the transfer is completed, the loader is able to perform the Microscope inspection of the first wafer.
  • Page 47 Operation Manual Inspections 3-2-2 Top Macro Inspection ⑥ ① ⑤ ④ ② ③ Set a cassette on the cassette table. Make sure that only the [Top Macro] LED in the Observation button is lit...........  If the [Top Macro] LED is not lit, press the button to turn on the LED. If LEDs for other types of inspection are lit, turn them off by pressing their buttons.
  • Page 48 Inspections Operation Manual 3-2-3 Back Macro Inspection ⑥ ⑤ ① ④ ③ ② Set a cassette on the cassette table. Make sure that only the [Back Macro] LED in the Observation button is lit.......... If the [Back Macro] ED is not lit, press the button to turn on the LED. If LEDs for other types of inspection are lit, turn them off by pressing their buttons.
  • Page 49 Operation Manual Inspections 3-2-4 Back Macro Inspection + 2nd Back Macro Inspection ⑥ ⑤ ① ④ ③ ② Set a cassette on the cassette table. Select the [Back Macro] and [2nd Back Macro] Observation buttons............ When the buttons are selected, the LEDs in the buttons light up. If the [Back Macro] and [2nd Back Macro] LEDs are not lit, press the buttons to turn on the LEDs.
  • Page 50 Inspections Operation Manual 3-2-5 Top Macro Inspection + Microscope Inspection ⑦ ① ⑥ ② ⑤ ③ ④ Set a cassette to the cassette table. Select the [Top Macro] and [Microscope] Observation buttons.............. When the buttons are selected, the LEDs in the buttons light up. If the [Top Macro] and [Microscope] LEDs are not lit, press the buttons to turn on the LEDs.
  • Page 51 Operation Manual Inspections By setting the vacuum stage to the wafer transfer position during Top Macro inspection, Top Macro observation is terminated before the inspection time is completed. Microscope inspection is given preference and the wafer is transferred onto the vacuum table. If Microscope inspection is not required, press the [Unload] button.
  • Page 52 Inspections Operation Manual 3-2-6 Back Macro Inspection + Microscope Inspection ⑦ ⑥ ① ⑤ ② ④ ③ Set a cassette on the cassette table. Select the [Back Macro] and [Microscope] Observation buttons.............. When the buttons are selected, the LEDs in the buttons light up. If the [Back Macro] and [Microscope] LEDs are not lit, press the buttons to turn on the LEDs.
  • Page 53 Operation Manual Inspections If Microscope inspection is not required, press the [Unload] button. The first wafer is unloaded into the cassette and the second wafer is transferred to the Back Macro inspection position. Subsequent wafers are transferred automatically and sequentially. After the last wafer is unloaded into the cassette, the operating units return to their initial positions and the loader stops.
  • Page 54 Inspections Operation Manual 3-2-7 Top Macro Inspection + Back Macro Inspection ⑦ ⑥ ① ⑤ ④ ② ③ Set a cassette on the cassette table. Select the [Top Macro] and [Back Macro] Observation buttons.............. When the buttons are selected, the LEDs in the buttons light up. If the [Top Macro] and [Back Macro] LEDs are not lit, press the buttons to turn on the LEDs.
  • Page 55 Operation Manual Inspections 3-2-8 Microscope Inspection + Top Macro Inspection + Back Macro Inspection + 2nd Back Macro Inspection ⑧ ⑦ ⑥ ① ② ⑤ ③ ④ Set a cassette on the cassette table. Select the [Top Macro], [Back Macro], [2nd Back Macro] and [Microscope] Observation buttons. All the Observation buttons are normally turned on (the LEDs are lit) when the power is turned on.
  • Page 56 Inspections Operation Manual After the specified inspection time has elapsed for the Top Macro inspection of the second wafer, the macro table is lowered and the loader starts the Back Macro inspection of the second wafer. 10. After the specified inspection time has elapsed for the Back Macro inspection of the second wafer, the L-arm is lowered.

  • Page 57: Special Operations

    Operation Manual Inspections 3-3 Special Operations 3-3-1 Changing the Wafer Selection Setting ② ① You can change the inspection wafer number settings after inspection has started. The wafer numbers can be changed when the [Pause] button is pressed, or while the wafers wait for a start command input when the inspection time is set to ∞.
  • Page 58 Inspections Operation Manual This page intentionally left blank. 3-14 Page...

  • Page 59: Specifications

    The ∞ setting maintains the inspection state. Inspection time setting Time can be set in 1 second steps. Common time setting for the Top Macro and Back Macro inspections 4. Microscope Inspection OLYMPUS MX61L/ MX63L Applicable microscope AL120-VS12 Applicable microscope stage Microscopic observation...
  • Page 60 Specifications Operation Manual Item AL120-LMB12-F AL120-LMB12-LP3 Microscopic observation φ300 mm range Up and down from observation position by 1 mm Stage height stroke Standard inspection Up to 50X objective magnification Conductive PEEK resin Wafer table Vacuum adsorption (Vacuum supplied by the loader) Wafer holding method Approx.
  • Page 61 Operation Manual Specifications Item AL120-LMB12-F AL120-LMB12-LP3 9. Cassette setting 900mm±10mm Installation height KINEMATIC COUPLING USED system to SEMI E57-0600 Cassette positioning Nothing Automatic Cassette clamp Automatic Cassette door Opening and Nothing (manual) *hand-open type FOSB can be mounted by closing opening its lid.
  • Page 62 Specifications Operation Manual This page intentionally left blank. Page...

  • Page 63: Problems During Use And Solutions

    Operation Manual Troubles and Countermeasures/ When Warning Codes Are Displayed 5 Problems during Use and Solutions 5-1 When Warning Codes Are Displayed While not a malfunction, if the loader determines that there is the possibility that normal wafer loading operations will be hindered, it issues W0001 a warning code on the liquid crystal panel , and halts operations.
  • Page 64 Troubles and Countermeasures Operation Manual / When Warning Codes Are Displayed Warning Causes and Solutions Code No. • The foreign object (wafer) is detected on the macro table during initialization. Cause • The wafer is detected as a foreign object due to vacuum pressure being too high.
  • Page 65 Operation Manual Troubles and Countermeasures / When Warning Codes Are Displayed ＮＯＴＩＣＥ If the loader is used at a low pressure (-53 KPa or lower) and with sudden changes in the vacuum pressure, the loader may be unable to detect any wafers remaining in the transfer path and may cause damage to the wafer(s).
  • Page 66 ＮＯＴＩＣＥ securely. Take care not to perform automatic unloading without dealing with the cause. Wafers may be damaged. If any similar errors occur during operation, please contact the OLYMPUS distributor for your loader. Please give the distributor the following information: Product name: Serial No.:...
  • Page 67 Operation Manual Troubles and Countermeasures / When Error Codes Are Displayed Error Codes 1. FOSB Table Unit Wafer Mapping Sensor Vertical Movement Control Error * AL120-LMB12-F Error No. Error Status Note The motor stepout is detected during operation. E0601 U105,U106 Origin sensor cannot be detected within the set time during initialization.
  • Page 68 Troubles and Countermeasures Operation Manual / When Error Codes Are Displayed Error No. Error Status E151A Mapping sensor action error Sensor cannot be completed within the set time E151B Mapping sensor return action error Sensor cannot be returned within the set time E1520 Initialize (origin return action) error Initialize cannot be completed within the set time...
  • Page 69 Operation Manual Troubles and Countermeasures / When Error Codes Are Displayed Error No. Error Status E15E2 Z axis encoder error Absolute data of vertical axis servo driver is improper E15E3 Z axis servo driver alarm Alarm of the vertical axis servo driver generates E15E4 Z axis over run error Vertical axis is at the over run area...
  • Page 70 Troubles and Countermeasures Operation Manual / When Error Codes Are Displayed 4. Window lock action control Error Error No. Error Status Note E1201 Both lock and release sensors are detected simultaneously U702,U703 E1202 Lock cannot be made within the set time U702 E1203 Lock release cannot be made within the set time...
  • Page 71 Operation Manual Troubles and Countermeasures / When Error Codes Are Displayed 7. A-arm Horizontal Movement Control Error Error No. Error Status Note E0301 The unit cannot be initialized within the set time. U208 The A-arm position is specified exceeding the motion range in the software. E0302 The origin sensor cannot detect the A-arm position during initialization.
  • Page 72 Troubles and Countermeasures Operation Manual / When Error Codes Are Displayed 10. L-arm Rotation Movement Control Error Error No. Error Status Note E0501 None of the origin and limit sensors detects any error. U601 The unit cannot be initialized within the set time. E0502 U601 The condition of the origin sensor does not change within the set time.
  • Page 73 Operation Manual Troubles and Countermeasures / When Error Codes Are Displayed 13. F-arm Horizontal Movement /Vacuum Control Error Error No. Error Status Note E1401 Both of the lower-end/upper- sensors is detected. U504 The stage side sensor cannot be detected within set time. U507 E1402 U506...
  • Page 74 Troubles and Countermeasures Operation Manual / How to Reset the Circuit Breaker 5-3 How to Reset the Circuit Breaker Turn the main switch OFF, disconnect the power cord on the back side of the loader, and press the reset button  (protruding part) of the circuit breaker that has tripped.
  • Page 75 Operation Manual Troubles and Countermeasures / Automatic Unloading 5-6 Automatic Unloading When the power is cut off with a wafer left in the transfer path in events E1004 such as an emergency halt, power failure, or occurrence of error, the wafer left in the transfer path can be unloaded automatically into the ...

  • Page 76: During The Top Macro Inspection

    Troubles and Countermeasures Operation Manual / Automatic Unloading 1 During the Top Macro Inspection When the loader has stopped with a wafer held on the macro table, the ② ③ ① vacuum remains on. Unload the wafer according to the following procedure.

  • Page 77: When A Wafer Is On The F-Arm

    Operation Manual Troubles and Countermeasures / Automatic Unloading 3 When a Wafer is on the F-arm When the loader stops with a wafer held on the F-arm, the wafer on the F-arm is vacuumed. Unload the water according the following procedures. If two wafers are held on the F-arm, unload the wafer that is on the macro table first.

  • Page 78: When A Wafer Is On The Vacuum Stage

    Troubles and Countermeasures Operation Manual / Automatic Unloading Press the [Unload] button. After wafer mapping is completed, the wafer is automatically unloaded into the specified slot. 5 When a Wafer is on the Vacuum Stage When the loader has stopped with a wafer held on the vacuum stage, the vacuum remains on.
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  • Page 80 Manufactured by OLYMPUS CORPORATION Shinjuku Monolith, 2-3-1 Nishi-Shinjuku, Shinjuku-ku, Tokyo 163-0914, Japan Distributed by OLYMPUS SCIENTIFIC SOLUTIONS AMERICAS CORP. Woerd Avenue Waltham, MA 02453, U.S.A. OLYMPUS SINGAPORE PTE. LTD. 438B Alexandra Road #03-07/12, Alexandra Technopark Blk B, Singapore 119968 OLYMPUS KOREA CO., LTD.

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