Replacement Of Consumables; Macro (Center) Table: If A Vacuum Error Has Occurred Or The Table Has Become Damaged; Macro (Center) Table Oil Seal: If A Vacuum Error Has Occurred - Olympus AL120-6Series Maintenance Manual

Wafer loader
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Maintenance Manual

4 Replacement of Consumables

Consult your nearest OLYMPUS distributor for the inquiry about consumables.
Please give the distributor the product name and serial No.
The tools and accessories required are indicated with Tools and Accessories in this text. Tools are not
included with this product.
Replacement cycles are indicated with Replacement Cycle.
The standard time required for replacement work is indicated with Standard Working Time.
Be sure to turn the main switch OFF and unplug the power cord before replacing
consumables.
Use the right tool for the right accessory when assembling this product. If the tools are not
used properly or this manual is not followed during assembly, parts may be damaged and
product safety cannot be guaranteed.
If any noise occurs in the operation of a part, please contact your OLYMPUS distributor.
This loader uses specialized clean grease. Improper greasing may cause a malfunction.

1 Macro (Center) Table: If a vacuum error has occurred or the table has become damaged

2 Macro (Center) Table Oil Seal: If a vacuum error has occurred

Tools Phillips-head screwdriver (No. 0)
Accessories M2 cross recessed pan head machine screws
1)
Standard Working Time 10 minutes
Tools
Flat-blade
Accessories Oil seal
screwdriver
1)
2)
Remove the three M2 cross recessed pan head machine screws
 and replace the macro (center) table.
Phillips-head screwdriver (No. 0)
Flat-blade screwdriver (No. 2.6-30)
Special oil seal mounting jig (guide, shaft and collar)
Clean wiper and absolute alcohol
Remove the three M2 cross recessed pan head machine screws
using the Phillips-head screwdriver, and remove the macro
(center) table.
Insert the flat-blade screwdriver into the oil seal groove. Remove
the oil seal by lifting it from the outside (pulley side).
Replacement of Consumables
Page
4-1

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