Test Names And Functions - Olympus AL120-6Series Maintenance Manual

Wafer loader
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Test Programs

2 Test Names and Functions

1.
Test names and test functions are shown in Tables 2-1 and 2-2, respectively.
Button No.
1
Elevator vertical movement check
2
A-arm vertical movement check
3
A-arm horizontal movement check
4
A-arm rotation check
5
Macro table vertical movement check
6
L-arm vertical movement check
7
L-arm rotation check
8
Vacuum switch check
9
Stage lock check
10
Centering sensor count check
11
Elevator height adjustment
12
Mapping adjustment
13
A-arm origin sensor check
14
Centering transfer position check
15
Orientation flat and notch positions check
16
L-arm rotation origin sensor check
17
Stage transfer position adjustment
18
Unloading position adjustment
Centering adjustment (wafer unloading)
19
20
LED lamp check
21
Button operation check
22
Sensor check
23
Loader settings
24
Wafer type setting
Contact centering open/close movement check
25
26
Software version and error log display
The AL120-CC contact centering unit is required to execute test No. 25.
The optional AL120-SLK is required to execute test No. 9.
Special jigs must be used to execute test Nos. 10 and 19. Contact your Olympus distributor from
whom you purchased the loader.
3-2
Page
Table 2-1: Test Programs
Test Name
Maintenance Manual
Remarks
Applicable to all models
Applicable to all models
Applicable to all models
Applicable to all models
LMB
LMB
LMB
Applicable to all models
Applicable to models equipped
with AL120-SLK
Applicable to all models
Applicable to all models
Applicable to all models
Applicable to all models
Applicable to all models
Applicable to all models
LMB
Applicable to all models
Applicable to all models
Applicable to all models
Applicable to all models
Applicable to all models
Applicable to all models
Applicable to all models
Applicable to all models
Applicable to models equipped
with AL120-CC
Applicable to all models

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