Table Of Contents - Olympus AL120-6Series Maintenance Manual

1 Nomenclature
1-1 Wafer Loader Main Body································································ 1-１
1-2 Operation Panel ···············································································1-2
1-3 Remote Controller (Option) ····························································1-3
1-4 Vacuum Stage ··················································································1-4
2 Adjustments
1 Adjusting the Cassette Positioning Guide Position
2 Registration of a New Type of Inspection Wafer (Cassette to be Used and Wafer
Thickness)
3 Test Programs
1 How to Use the Programs
2 Test Names and Functions
4 Replacement of Consumables
1 Macro (Center) Table: If a vacuum error has occurred or the table has become damaged 4-1
2 Macro (Center) Table Oil Seal: If a vacuum error has occurred
3 A-arm: If a vacuum error has occurred or the A-arm has become damaged
4 Vacuum Table: If a vacuum error has occurred or the table has become damaged
5 Oil Seal for Vacuum Table: If a vacuum error has occurred
6 L-arm Vacuum Pad
7 Rubber Microscope Legs: If wafer transfer sound has increased

Table of Contents

Maintenance Manual
1-1
2-1
2-1
2-2
3-1
3-1
3-2
4-1
4-1
4-3
4-4
4-4
4-6
4-7
Page
C-1