Arm Vacuum Pad - Olympus AL120-6Series Maintenance Manual

Replacement of Consumables
6 L-arm Vacuum Pad


L-arm
L-arm
4-6
Page
/
Tools Phillips-head screwdriver (No. 2)
Accessories
1)
2)
3)
A-arm
Replacement Cycle Transfer of 350 thousand wafers
AL120-6 series
Standard Working Time 20 minutes
A-arm
AL120-86 series
Remove the two M3 cross recessed countersunk screws , and
remove the L-arm from the loader main body.
Put the L-arm on a flat surface and replace the vacuum pad .
After attaching the L-arm to the loader main body, check that the
clearance between the L-arm and the A-arm is uniform. If the
clearance is not uniform, check that the L-arm is properly
attached, and attach it again if necessary.
Maintenance Manual