Olympus AL120-6Series Maintenance Manual
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Olympus AL120-6Series Maintenance Manual

Olympus AL120-6Series Maintenance Manual

Wafer loader
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Thank you for purchasing the Olympus AL120 Series Wafer Loader.
In order to fully utilize its performance and secure safety, please read this manual before operation.
Please also keep it at hand during operation as well as for future reference.
This manual is exclusively for maintenance service engineer.
Please also keep it at hand during operation as well as for future reference.
Maintenance Manual
Wafer Loader
ＡＬ120-6
ＡＬ120-86
Series
Series
AX7834-05

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Summary of Contents for Olympus AL120-6Series

  • Page 1 ＡＬ120-86 Series Thank you for purchasing the Olympus AL120 Series Wafer Loader. In order to fully utilize its performance and secure safety, please read this manual before operation. Please also keep it at hand during operation as well as for future reference.
  • Page 2 This page intentionally left blank.
  • Page 3 Introduction Operation/Maintenance Manual i Introduction Option Tray Option AL120-TRY-M61-86 AL120-SLK8 Option Microscope MX61,MX63 Wafer Loader AL120-L6-150 AL120-LMB6-150 AL120-L86 Vacuum Stage AL120-L86-180 AL120-VS6 AL120-LMB86 AL120-VS8 AL120-LMB86-180 Option AL120-LMB8-90 Remote Controller AL120-RC AL120 Series Lineup AL120 series products consist of a model name and an applicable wafer size. Note that only the AL120 series products with the same wafer size can be combined.
  • Page 4 Introduction Operation/Maintenance Manual /Precautions The AL120 series consists of a wafer loader, a vacuum stage, and other products. This manual does not cover custom-order specifications or microscopes. To acquire a comprehensive understanding of both your loader and microscope, please refer to your microscope operation manual.
  • Page 5 Do not touch wafers during inspection. 11. Undergo maintenance training before attempting to do maintenance on the loader. 12. Consult your nearest OLYMPUS distributor if you need to move the loader. (The loader weight is approximately 44kg.) 13. Down flow that may cause a wafer to shake may cause the wafer transfer operation to be accompanied by physical danger.
  • Page 6 Introduction Operation/Maintenance Manual /Safety Precautions 15. To get the best performance from this loader, make sure that there is at least the space shown below (with dimensions in ) around the loader during assembly and installation. The dimensions indicated by the dot-dot-dash lines show the stage's movable range. You can get more working space during maintenance or other work by changing the observation tube mounting direction and moving the stage.
  • Page 7 Introduction/ Operation/Maintenance Manual Safety Precautions Position of the Center of Gravity AL120-6 Series Position of the center of gravity AL120-86 Series Position of the center of gravity Page...
  • Page 8 Introduction Operation/Maintenance Manual /Safety Precautions Working Environment Please prepare the table for the equipment at your side. This equipment is designed so as to show the best performance in being set on the table of which height is approx. 700mm and thickness of work surface is more than 22mm. This equipment is designed in accordance with the SEMI S8 standard.
  • Page 9 Introduction/ Operation/Maintenance Manual Safety Precautions AL120-86 Series Unit: mm Page...
  • Page 10 Introduction Operation/Maintenance Manual /Safety Precautions Earthquake Protection (1) This loader should be secured to prevent it from falling off the table when an earthquake occurs. 1.The fixation method of the microscope *The microscope fixes with an attached bolt. ・M5 hexagon socket head bolt  16 ・M5 spring washer ・M5 machine screw washer 4 points...
  • Page 11 Introduction/ Operation/Maintenance Manual Safety Precautions Fixed taps(M8) position dimensions AL 120-6 Series AL 120-86 Series Page...
  • Page 12 RESULT IN SEVERE INJURY. KEEP HANDS AND GARMENTS CLEAR OF MOVING PARTS. CONSULT MANUAL FOR PRECAUTIONS DURING MAINTENANCE. Position of warning indication label If this warning label becomes dirty or peels off, contact your nearest OLYMPUS distributor for replacement and servicing. i-10 Page...
  • Page 13 Periodically check the loader for wear (a wafer loading arm and deterioration of the drive mechanism), and replace the parts as needed. Contact your nearest OLYMPUS distributor for repair. 1. Never disassemble the loader unnecessarily. This could affect the performance and Caution function of the loader.
  • Page 14 1. Confirm the following points before operating the loader. (1) Vacuum supply pressure: -67KPa to -80KPa When there are not a vacuum gauge and a regulator, please contact it to the OLYMPUS distributor. (2) Make sure that there are no wafers or tools inside the wafer loader 2.
  • Page 15 Introduction/ Operation/Maintenance Manual Conformity Standards 6. Conformity Standards (1) This equipment is carrying out conformity or evaluation to the following standard. (2) Although this equipment aims at using in the industrial environment, since it may not satisfy a performance when not used by the right operation method, please carry out the proper handling according to this manual.
  • Page 16 Introduction Operation/Maintenance Manual /Conformity Standards i-14 Page...
  • Page 17 Introduction/ Operation/Maintenance Manual Conformity Standards i-15 Page...
  • Page 18 Introduction Operation/Maintenance Manual /Conformity Standards This page intentionally left blank. i-16 Page...

  • Page 19: Table Of Contents

    Maintenance Manual Table of Contents 1 Nomenclature 1-1 Wafer Loader Main Body································································ 1-１ 1-2 Operation Panel ···············································································1-2 1-3 Remote Controller (Option) ····························································1-3 1-4 Vacuum Stage ··················································································1-4 2 Adjustments 1 Adjusting the Cassette Positioning Guide Position 2 Registration of a New Type of Inspection Wafer (Cassette to be Used and Wafer Thickness) 3 Test Programs 1 How to Use the Programs...
  • Page 20 Maintenance Manual Table of Contents This page intentionally left blank. Page...

  • Page 21: Nomenclature

    Nomenclature Operation/Maintenance Manual 1 Nomenclature Nomenclature 1-1 Wafer Loader Main Body Vacuum tube receptacle AC line receptacle Circuit breakers Stage vacuum Warning label tube connector Cassette guide Cassette table (elevator) A2-arm A1-arm Stage operation permission LED Hand guard Orientation flat alignment sensor Macro (center) table L-arm Liquid crystal panel...

  • Page 22: Operation Panel

    Nomenclature/ Operation/Maintenance Manual Operation Panel 1-2 Operation Panel L type 4-way button Menu buttons Wafer No. Wafer unload selector buttons button Start button Quit button LED display Loader stop button Inspection mode button Wafer alignment position control Option button Supporting function buttons LMB type 4-way button...

  • Page 23: Remote Controller (Option)

    Nomenclature /Remote Controller (Option) Operation/Maintenance Manual 1-3 Remote Controller (Option) Remote controller: AL120-RC Registration setting button (Macro) Registration setting button (Micro) Start button Wafer unload button Page...

  • Page 24: Vacuum Stage

    Nomenclature/ Operation/Maintenance Manual Vacuum Stage 1-4 Vacuum Stage Vacuum stage: AL120-VS6/AL120-VS8 Coarse adjustment grip Wafer rotating knob Y fine travel knob X fine travel knob Clutch lever Vacuum table Stage sensor plate Page...

  • Page 25: Adjustments

    Maintenance manual Adjustments 2 Adjustments The loader requires adjustments when the cassette is changed or the thickness of the wafers to be inspected is changed. If the loader is used without any adjustment to the proper state, it may give damage to wafers. Receive the training of loader maintenance before making adjustments.

  • Page 26: Registration Of A New Type Of Inspection Wafer

    Adjustments Maintenance manual 2 Registration of a New Type of Inspection Wafer (Cassette to be Used and Wafer Thickness) 2-1. Main Operating Procedure Prepare the cassette and wafer to be registered, and adjust and register them using the following procedure. Activate adjustment test mode Test 24 wafer type setting registration Test 12 wafer mapping parameter setting registration...
  • Page 27 Maintenance manual Adjustments Wafer mapping parameter setting registration Using Test 12, set the wafer mapping parameters according to the cassette state and the wafer thickness.  Press the Wafer No. selector button [12], then press the [Start] button.  The submenu appears on the liquid crystal panel. M1:Mapping auto adjust M2:Mapping result display [M1]: Executes the automatic mapping parameter adjustment <Mapping...
  • Page 28 Adjustments Maintenance manual 4) Checking the wafer mapping parameters Check the wafer mapping parameters setting state using Test 12.  From the submenu on the liquid crystal panel, M1:Mapping auto adjust execute [M2] <Mapping result display>. M2:Mapping result display M3:Input parameter Press the [M2] button <Disp>.
  • Page 29 Maintenance manual Adjustments 5) Elevator height (arm insertion and removal height) setting registration Ｐｒｅｐａｒａｔｉｏｎ Tools Phillips-head screwdriver (No. 2) Hexagonal wrench (with an opposite side distance of 5.5 mm) Items to prepare The cassette and wafers to be registered  Turn the main switch OFF.
  • Page 30 Adjustments Maintenance manual Specify the elevator height by using Test 11.  Press the Wafer No. selector button [11], then press the [Start] button. M1:Wafer position setting  The menu appears on the liquid crystal panel. M2: A-E position search Execute [M1]: Wafer removal height adjustment <Wafer position setting>.

  • Page 31: Test Programs

    Maintenance Manual Test Programs 3 Test Programs Test programs are used to check and adjust the functions of each unit. Before initiating these programs, pay special attention to interference with the other units and make sure that there are no wafers left over from previous operations. 1 How to Use the Programs Turn the main switch OFF.

  • Page 32: Test Names And Functions

    The AL120-CC contact centering unit is required to execute test No. 25. The optional AL120-SLK is required to execute test No. 9. Special jigs must be used to execute test Nos. 10 and 19. Contact your Olympus distributor from whom you purchased the loader.
  • Page 33 Maintenance Manual Test Programs Table 2-2: Test Functions Test No./ Function Outline Test Name No. 1 <Elevator movement check> Do not continue the operation for longer than 5 minutes. Wait for longer Elevator than one minute before restarting the operation. vertical This program can be used to check the elevator vertical movement.
  • Page 34 Test Programs Maintenance Manual Test No./ Function Outline Test Name Moves the elevator to the first wafer removal height Raises the A-arm to the cassette height M→E E→M M→E standby position E standby position →E E→E standby position E standby position→M The loader then repeats steps •...
  • Page 35 Maintenance Manual Test Programs Test No./ Function Outline Test Name No. 6 <L-arm vertical movement check> Do not continue the operation for longer than 5 minutes. Wait for L-arm longer than one minute before restarting the operation. vertical This program can be used to check the L-arm vertical movement. movement Press the [Start] button.
  • Page 36 Test Programs Maintenance Manual Test No./ Function Outline Test Name No. 7 <L-arm rotation check> Do not continue the operation for longer than 5 minutes. Wait for longer than L-arm one minute before restarting the operation. rotation This program can be used to check the L-arm rotation. check Press the [Start] button.
  • Page 37 Maintenance Manual Test Programs Test No./ Function Outline Test Name <Vacuum switch check> No. 8 This program can be used to turn each vacuum electromagnetic valve ON/OFF and check the ON/OFF Vacuum state of the corresponding vacuum switch. switch check Press the [Start] button.
  • Page 38 Test Programs Maintenance Manual Test No./ Function Outline Test Name No. 10 <Centering sensor count check> Centering This program can be used to check the centering sensor count state. sensor count check Press the [Start] button. Initialized1 Lowers the elevator Raises the A-arm and turns the horizontal drive motor OFF Set a wafer on the A-arm so that it is in virtually the same position as during transfer.
  • Page 39 Maintenance Manual Test Programs Test No./ Function Outline Test Name No. 11 <Elevator height check> Elevator This program can be used to check and adjust the elevator height. height adjustment Press the [Start] button. If the loader has not been initialized, initialization starts. Select the item to adjust by using the menu buttons on the liquid crystal panel.
  • Page 40 Test Programs Maintenance Manual Test No./ Function Outline Test Name For the 2nd and 25th wafer, confirm by performing the steps through , and • Whether a wafer is outside its detection range of the wafer out sensor can be confirmed by viewing the LED inside the[Option] button If detected, the LED lights up.
  • Page 41 Maintenance Manual Test Programs Test No./ Function Outline Test Name <Mapping parameter check> No. 12 This program can be used to adjust the mapping sensor. Wafer mapping Press the [Start] button, and select the item to adjust by using the menu buttons on the liquid crystal adjustment panel.
  • Page 42 Test Programs Maintenance Manual Test No./ Function Outline Test Name [M3]: Manual input of mapping parameters <Input parameter> This program can be used to modify mapping parameters. Using the 4-way button, select the number of the wafer type to modify from the list of wafer type numbers displayed on the liquid crystal panel, and then press the [Start] button.
  • Page 43 Maintenance Manual Test Programs Test No./ Function Outline Test Name [M4]: Check the mapping sensor <Mapping sensor check> You can confirm ON or OFF of the mapping sensor. Press the [M4] button to move the elevator down. • ON or OFF of the mapping sensor <Switch display> When the mapping sensor is performing the detection operation, the LED inside the [Wafer No.] button is on.
  • Page 44 Test Programs Maintenance Manual Test No./ Function Outline Test Name • [M2]: Moves to the retracted position in front of cassette (Standby position) <Standby> The A-arm moves vertically up to the cassette height. The A-arm moves horizontally to the retracted position before cassette. •...
  • Page 45 Maintenance Manual Test Programs Test No./ Function Outline Test Name [M3]: A-arm rotation direction <A rotation> Select the position to check, from the submenu. [M1]: Origin position <A Rotation origin> [M2]: Adjust the A1 sensor position <A1 Sensor> [M3]: Adjust the A2 sensor position <A2 Sensor> --------------------------------------------------------------------------------------------------------------------------------- •...
  • Page 46 Test Programs Maintenance Manual Test No./ Function Outline Test Name [M4]: Elevator<Elevator origin> 4-way button [UP]: Move upward by one pulse 4-way button [DOWN]: Move downward by one pulse [M1]: Initialize [M2]: Alternately move to the initialization position and a position 0.5 mm lower [M3]: Turn excitation OFF The sensor and motor origin signal states are indicated by the LEDs on the Wafer No.
  • Page 47 Maintenance Manual Test Programs Test No./ Function Outline Test Name No. 15 <Orientation flat alignment adjustment> Orientation This program can be used to check and adjust the orientation flat and notch positions for each wafer flat and diameter. notch positions Insert a wafer into any slot of a cassette.
  • Page 48 Test Programs Maintenance Manual Test No./ Function Outline Test Name The sensor state is indicated by the Wafer No. selector button. • The LED on the Wafer No. selector button lights up on the detection of the sensor. [No. 1]: Origin sensor detection •...
  • Page 49 Maintenance Manual Test Programs Test No./ Function Outline Test Name <Retracted position adjustment> No. 18 Wafer This program can be used to adjust the position where wafers are unloaded into the cassette to the near side (cassette opening side). unloading This prevents unloaded wafers from hitting against the inside of the cassette.
  • Page 50 Test Programs Maintenance Manual Test No./ Function Outline Test Name Put the centering jig on the macro table in a way that the hole at the center of the centering jig is set at a position +3 mm from the hole at the center of the macro table. Press the [M4] button to register the +3 mm position.
  • Page 51 Maintenance Manual Test Programs Test No./ Function Outline Test Name No. 22 <Sensor, button input check> Sensor This program can be used to check the sensor input states. check Press the [Start] button. • The LEDs on the Wafer No. selector buttons light up in accordance with the sensor input states. •...
  • Page 52 Test Programs Maintenance Manual Test No./ Function Outline Test Name No. 23 <Condition setting> Loader This program can be used for detailed loader settings. settings Press the [Start] button. Setting items are displayed on the liquid crystal panel. Change the settings using the 4-way button. Use the menu buttons on the liquid crystal panel for registration, cancellation, and page feed.
  • Page 53 Maintenance Manual Test Programs Test No./ Function Outline Test Name <Inspection wafer classification setting> No. 24 Wafer This program can be used to register wafer types, and set and change the size, thickness and transfer type speed for each wafer type. setting Press the [Start] button.
  • Page 54 Test Programs Maintenance Manual Test No./ Function Outline Test Name Transfer speed <Speed> SP1 to SP5 • A-arm horizontal speed <A-arm linier speed> ..... High speed <Fast> / Medium speed <Middle> / Low speed <Slow> A-arm rotation speed <A-arm rotation speed> ....High speed <Fast> / Medium speed <Middle> / Low speed <Slow> A-arm vertical speed <A-arm up down speed>...
  • Page 55 Maintenance Manual Test Programs Test No./ Function Outline Test Name [M2]: Set date <Date> Parameters to be set are displayed on the liquid crystal panel. Select the parameters to be changed using the 4-way buttons. [M2]: Save <Save> [M3]: Delete <Back space> [M4]: Exit the display <Exit>...
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  • Page 57: Replacement Of Consumables

    If any noise occurs in the operation of a part, please contact your OLYMPUS distributor. This loader uses specialized clean grease. Improper greasing may cause a malfunction.
  • Page 58 Replacement of Consumables Maintenance Manual Pulley side Wind the clean wiper around the flat-blade screwdriver. Moisten Axis it with commercially available absolute alcohol and clean the shaft and the pulley side. Never put absolute alcohol near flames as it is CAUTION highly flammable.

  • Page 59: Arm: If A Vacuum Error Has Occurred Or The A-Arm Has Become Damaged

    Maintenance Manual Replacement of Consumables Remove the special oil seal mounting jig and check that the oil Pulley top seal lip does not protrude from the pulley top surface. surface 10) After the check, attach the macro (center) table. Replacement Cycle 5 years Standard Working Time 20 minutes 3 A-arm: If a vacuum error has occurred or the A-arm has become damaged Tools...

  • Page 60: Vacuum Table: If A Vacuum Error Has Occurred Or The Table Has Become Damaged

    Replacement of Consumables Maintenance Manual 4 Vacuum Table: If a vacuum error has occurred or the table has become damaged Tools Phillips-head screwdriver (No. 0)  Accessories M2 cross recessed pan head machine screws Remove the three M2 cross recessed pan head machine screws , and replace the macro (center) table.
  • Page 61 Maintenance Manual Replacement of Consumables Wind the clean wiper around the flat-blade screwdriver. Moisten Oil seal insertion part it with commercially available absolute alcohol and clean the oil seal insertion part of the vacuum table and the axis of the vacuum stage.

  • Page 62: Arm Vacuum Pad

    Replacement of Consumables Maintenance Manual 6 L-arm Vacuum Pad Tools Phillips-head screwdriver (No. 2)  Accessories Remove the two M3 cross recessed countersunk screws , and remove the L-arm from the loader main body. Put the L-arm on a flat surface and replace the vacuum pad . ...

  • Page 63: Rubber Microscope Legs: If Wafer Transfer Sound Has Increased

    7 Rubber Microscope Legs: If wafer transfer sound has increased Remove the stage and replace the rubber blocks on the underside of the microscope. Since the wafer transfer position must be checked and other related work must be done, please contact your Olympus distributor.  ...
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  • Page 66 Woerd Avenue Waltham, MA 02453, U.S.A. OLYMPUS SINGAPORE PTE LTD. 491B River Valley Road,#12-01/04 Valley Point Office Tower, Singapore 248373 OLYMPUS KOREA CO.,LTD. 8F Olympus Tower, 446 Bongeunsa-ro, Gangnam-gu, Seoul, 06153 Korea This publication is printed on clean paper. Printed in Japan...

This manual is also suitable for:

Al120-86seriesAl120-l6-150Al120-lmb6-150Al120-l86Al120-l86-180Al120-lmb86 ... Show all

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