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Adjustments
2 Registration of a New Type of Inspection Wafer (Cassette to be Used and Wafer
Thickness)
2-1. Main Operating Procedure
Prepare the cassette and wafer to be registered, and adjust and register them using the following procedure.
1)
Activate adjustment test mode
2)
Test 24 wafer type setting registration
3)
Test 12 wafer mapping parameter setting registration
Items to prepare Insert the wafers to be registered in the lowest and highest slots of the cassette.
4)
Test 12 wafer mapping parameter confirmation
Items to prepare Insert the wafers of the same thickness to be confirmed into all slots of the cassette.
5)
Test 11 elevator height (arm insertion and removal height) setting registration
Items to prepare Insert the wafers of the same thickness to be confirmed into all slots of the cassette
6)
Quit adjustment test mode
2-2. Operating Procedure
1)
Activate adjustment test mode
Turn the main switch OFF.
Turn the main switch ON while pressing the Wafer No. selector buttons [1] and [2].
2)
Wafer type setting registration
Using Test 24, specify the wafer size, thickness, transfer speed, comment to be registered.
No |Size |Thick
|Speed
|comment
x1 | 200 |725-400 |High
|
2 | 200 |725-400 |High
|
3 | 200 |725-400 |High
|
4 | 200 |725-400 |High
|
5 | 200 |725-400 |High
|
6 | 200 |725-400 |High
|
OK
Cancel
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No |Size |Thick
|Speed
|comment
x1 | 200 |725-400 |High
|
2 | --- |
|
|
3 | --- |
|
|
4 | --- |
|
|
5 | --- |
|
|
6 | --- |
|
|
OK
Cancel
PageUp PageDn
*Indication example when
registering only one kind
2-2
Page
Press the Wafer No. selector button [24], then press the [Start] button.
The wafer types currently registered are displayed on the liquid crystal
panel.
Using the 4-way button, move the <x> to the item to add or change or
deletion, then press the 4-way button [RIGHT].
Specify the following items.
Wafer size <Size>
Wafer thickness <Thick> : Select one of 725-400/400-180/180-90
Transfer speed <Speed> : Select one of Fast/Middle/Slow/SP1–SP5
Comment <Comment>
*
Refer to Section 4 Test Mode for detailed procedures.
*
There is a limit to selectable items, depending on the specifications of
the loader.
*
When chose --- with a wafer size <size> column, the set point is
deleted, and it is not displayed to a wafer type screen at the time of the
inspection.
After settings are completed, press the [M1] button <Save> and store
setting, press the [Quit] button to terminate Test 24.
Maintenance manual
: Select one of 200/150/125/100/---
: Input of a maximum of 16 characters is
possible.
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