Table of Contents
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Nomenclature/
Operation Panel
1-2 Operation Panel
L type
Menu buttons
Wafer No.
selector buttons
Quit button
Loader stop
button
Wafer alignment
position control
LMB type
Menu buttons
Wafer No.
selector buttons
Quit button
Loader stop
button
Observation
setting buttons
Wafer alignment
position control
Inspection time
control
1-2
Page
Operation/Maintenance Manual
4-way button
Wafer unload
button
Start button
LED display
Inspection
mode button
Option button
Supporting
function buttons
4-way button
Wafer unload
button
Start button
Pause button
LED display
Inspection
mode button
Option button
Top macro spin
speed control
Top macro spin
direction control
Auxiliary function
buttons
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