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Maintenance Manual
3 Test Programs
Test programs are used to check and adjust the functions of each unit.
Before initiating these programs, pay special attention to interference with the other units and make sure that
there are no wafers left over from previous operations.
1 How to Use the Programs
1.
Turn the main switch OFF.
2.
Turn the main switch ON, while pressing the Wafer No. selector buttons [1] and [2].
The vacuums for the A-arm and the wafer on the stage are released.
If there is a wafer on the macro table or L-arm, a warning is displayed and the vacuum is maintained.
(Macro table: W0005, L-arm: W0006)
Press the [Start] button to turn the vacuum OFF. Use wafer tweezers to prevent the wafer from falling.
3.
Select a test number with a Wafer No. selector button.
4.
Press the [Start] button to initiate the test.
The menu appears on the liquid crystal panel. Select specific items in the menu by manipulating the menu
buttons, 4-way buttons, [Wafer No.] buttons, etc.
Menu buttons
[M1]～[M4]
Wafer No.
selector buttons
Quit button
5.
Press the [Quit] button test to terminate the test. (The loader enters the state in step 3.)
6.
Turn the main switch OFF to terminate all the tests.
Test Programs
Liquid
crystal
4-way button [UP]
4-way button [DOWN]
4-way button [RIGHT]
4-way button [LEFT]
Start button
Page
3-1
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