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Olympus Manuals
Laboratory Equipment
AL120-6Series
Maintenance manual
Vacuum Stage - Olympus AL120-6Series Maintenance Manual
Wafer loader
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Nomenclature/
Vacuum Stage
1-4 Vacuum Stage
Vacuum stage: AL120-VS6/AL120-VS8
Coarse
adjustment grip
Wafer rotating knob
Vacuum table
Stage sensor plate
1-4
Page
Operation/Maintenance Manual
Y fine travel knob
X fine travel knob
Clutch lever
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This manual is also suitable for:
Al120-86series
Al120-l6-150
Al120-lmb6-150
Al120-l86
Al120-l86-180
Al120-lmb86
...
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Al120-lmb86-180
Al120-lmb8-90
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