Arm: If A Vacuum Error Has Occurred Or The A-Arm Has Become Damaged - Olympus AL120-6Series Maintenance Manual

Wafer loader
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Maintenance Manual
3 A-arm: If a vacuum error has occurred or the A-arm has become damaged
9)
Remove the special oil seal mounting jig and check that the oil
Pulley top
seal lip does not protrude from the pulley top surface.
surface
10) After the check, attach the macro (center) table.
Replacement Cycle 5 years
Standard Working Time 20 minutes
AL120-L6-150
AL120-LMB6-150
AL120-L86
AL120- L86-180
AL 120-LMB86
AL 120- LMB 86-180
AL120- LMB 8-90
Replacement of Consumables
Tools
Hexagonal wrench (with an opposite side
distance of 2.5 mm)
Accessories M2 hexagon socket head bolts
1) Remove the M2 hexagon socket head bolts (four for
each arm).
2) Replace the arm.
Align surface A with surface A' and surface B with
surface B' as shown below.
A
Arm
3) Set the hold plate  and secure it with the M2
hexagon socket head bolt .
Standard Working Time 20 minutes
* For the AL120-LMB8-90, replace the arm with the
tube connected to the hold plate .
A'
B
B'
4-3
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