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Maintenance manual
2 Adjustments
The loader requires adjustments when the cassette is changed or the thickness of the wafers to be
inspected is changed.
If the loader is used without any adjustment to the proper state, it may give damage to wafers.
Receive the training of loader maintenance before making adjustments. To prevent danger, be
sure to turn the main switch OFF and disconnect the power cord before removing the cover
for adjustment work.
1 Adjusting the Cassette Positioning Guide Position
AL120-6 series
AL120-8 series
AL120-8 series
for 150mm wafers
AL120-8 series
for metal cassette
Tools
Phillips-head screwdriver (No. 2)
The clearance between the cassette guide and your cassette may be
inappropriate. Adjust the guide as appropriate for your cassette.
* If a cassette is used with insufficient clearance between the
cassette and the cassette guide, the cassette will lift up and wafers
may interfere with the arms during inspection.
* If a cassette is used with too great a clearance between the
cassette and the cassette guide, the cassette may interfere with
wafers.
Proper clearance between cassettes and the guide: Approx. 0.5 mm
(Adjust clearance to a value that takes into account variations of the
cassettes to be used.)
1)
Loosen the cassette guide fixing screws.
Caution: Do not remove the screws. If all screws are removed,
the fixing nuts will drop into the loader.
2)
Set the cassette at the center of the cassette table so that the
wafer is positioned in the cassette as shown at the left.
3)
Move the guide so that the clearance between the cassette
guide and the cassette is approx. 0.5 mm, and tighten the guide
fixing screws.
Adjustments
Page
2-1
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