Olympus MX61A Manual
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Olympus MX61A Manual

Olympus MX61A Manual

Motorized 300 mm compatible semiconductor/fpd inspection microscope
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ASSEMBLY/SETUP
MANUAL
MX61A
MOTORIZED 300 mm COMPATIBLE
SEMICONDUCTOR/FPD INSPECTION
MICROSCOPE
This manual is for assembly and setup of the Olympus MX61A Semiconductor/FPD Inspection
Microscopes. To ensure the safety, obtain optimum performance and familiarize yourself fully with the
use of this microscope, we recommend that you study this manual thoroughly before operating the
microscope. As this manual will be needed when you replace the lamp or fuses or modify a setup,
retain it in an easily accessible place near the work desk for future reference.
A X 7 6 7 7

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Summary of Contents for Olympus MX61A

  • Page 1 SEMICONDUCTOR/FPD INSPECTION MICROSCOPE This manual is for assembly and setup of the Olympus MX61A Semiconductor/FPD Inspection Microscopes. To ensure the safety, obtain optimum performance and familiarize yourself fully with the use of this microscope, we recommend that you study this manual thoroughly before operating the microscope.

  • Page 3: Table Of Contents

    NOMENCLATURE 9-11 ASSEMBLY 12-25 2-1 Assembly Diagram ................................... 12 2-2 Detailed Assembly Procedures ........................... 13-24 2-3 Modules Installed by Olympus ............................25 SETUP OF MX-OPU61A OPERATION UNIT 26-36 Initialization USER Screen Setup CONFIG 1/6 Screen Setup CONFIG 2/6 Screen Setup...
  • Page 4 SAFETY PRECAUTIONS 1. Always use the power cord provided by Olympus. If no power cord is provided, please select the power cord by referring to the section “PROPER SELECTION OF THE POWER SUPPLY CORD” at the end of this instruction manual. If the proper power cord is not used, Olympus can no longer warrant the electrical safety performance of the equipment.
  • Page 5 }The following installation space is set according to the SEMI standard guidelines (SEMI S8-0705). It is recommended that you set the optimum installation space for each customer based on the SEMI standard guidelines (SEMI S8-0705). MX61A installation space: When the 14x12-inch stage is combined Unit: mm...
  • Page 6 Unit: mm MX61 Stage movement range Installation space MX61A external view, eye point and center of gravity: When the 14x12-inch stage is combined Unit: mm Eye point Position of center of gravity (Bottom view of microscope) (Note) The center of gravity is an approximate position when the microscope is equipped with the basic combination for reflected light oservation.
  • Page 7 MX61A MX61A external view, eye point and center of gravity: When the 8x8-inch stage is combined Unit: mm Eye point Position of center of gravity (Bottom view of microscope) (Note) The center of gravity is an approximate position when the microscope is equipped with the standard module combination for transmitted light observation.
  • Page 8 Caution indications are affixed at parts where special precaution is required when handling and using the microscope. Always heed the cautions. Lamp housing [High temperature caution] /power supply unit Light guide light source [High temperature caution] (LG-PS2) Caution indication positions Front of base [Caution against finger (MX61A) catching] Power supply unit [High voltage caution]...
  • Page 9 MX61A Getting Ready 1. Do not use the microscope where it is subjected to direct sunlight, high temperature and humidity, dust or vibrations. (For the operating conditions, refer to the INSTRUCTIONS manual’s chapter 8, “SPECIFICATIONS” on page 43.) 2. A microscope is a precision instrument. Handle it with care and avoid subjecting it to sudden or severe impacts.
  • Page 10 Applicable Standards 1. This device is in compliance with or certified by the following standards. 2. Although this device is designed for use in industrial environments, its full performances may not be manifested if it is not operated properly. Be sure to handle it properly as instructed in this manual. This device is designed for use in industrial environments (Class A device).
  • Page 11 MX61A If the microscope is used in a manner not specified by this manual, the safety of the user may be imperiled. In addition, the equipment may also be damaged. Always use the equipment as outlined in this instruction manual.
  • Page 12 }The modules shown below are examples of those used in a typical system. Certain modules are usable even when they are not mentioned below. For these modules, refer to the latest catalogues or contact Olympus. For the modules marked *, refer to their instruction manuals.
  • Page 13 MX61A 8x8-Inch Stage and Holder System Rotary Wafer Holder Plate MX-WHPR86 (For 6-8 inch wafers) 5-Inch Mask Holder BH3-MH5 4-Inch Mask Holder BH3-MH4 Black Plate BH3-SP6 Glass Plate BH3-SPG6 8x8-Inch Stage MX-SIC8R...
  • Page 14 14x12-Inch Stage and Holder System Rotary Wafer Holder for 8-inch 6-Inch Mask Holder Glass Plate and 12-inch wafers MX-MH6 MX-SPG1412 MX-WHPR128 14x12-Inch Stage MX-SIC1412R2...

  • Page 15: Assembly

    MX61A ASSEMBLY 2-1 Assembly Diagram }The diagram below shows where the various modules should be Tools Used (Provided with the microscope frame) mounted. Study the assembly instructions for only the modules to be employed. Allen screwdriver (3 mm) For the connection of cables and power cord, see page 21.

  • Page 16: Detailed Assembly Procedures

    2-2 Detailed Assembly Procedures }If the stage is expected to carry a heavy load, use the support spring unit (to be installed by Olympus dealer). The system contains motorized parts. Do not plug in the power cord until all of the assembly procedures have completed.
  • Page 17 The levelness of the stage travel (movement) and the top surface of the wafer holder have been adjusted at the factory. If finer adjustment is required or when using a holder from a manufacturer other than Olympus, apply drops of alcohol on the three adjustment screws ƒ to loosen the screw lock, then adjust the heights of the screws by inserting a flat-bladed screwdriver from below.
  • Page 18 Attaching the Objectives (Fig. 8) # Never attempt to rotate the motorized revolving nosepiece by hand. Rotating by hand may cause malfunction or damage. Remove the cap from each objective mount hole. 1. Following the order of numbers 1 to 5 or 6 indicated on the objective mount thread @, screw objectives into the objective mount threads by starting with the objective with the lowest power.
  • Page 19 MX61A Attaching the Eyepieces (Fig. 11) Fit and insert gently an eyepiece into each eyepiece sleeve. # Both the left and right eyepiece sleeves have the eyepiece posi- tioning grooves ². Be sure to fit the positioning pin @ of the eye- piece into the positioning groove ²...
  • Page 20 ² Attaching the Lamp Housing (Fig. 15) ³ 1. Fit the lamp housing @ all the way into the lamp housing mount on the rear of the microscope arm. Attach the lamp housing so that the heat radiating fins ² face up- ward.
  • Page 21 MX61A Resetting the Burner Hour Counter 1. Press the center section @ of the reset switch ² on the front panel to reset the counter reading to “000.0”. }The hour counter shows elapsed time in hours. The service life of a mercury burner is 300 hours.
  • Page 22 Make sure that the main switch is set to “ ” (OFF) before connect- ³ ing cords and cables. Always use the power cord provided by Olympus. If no power cord is provided, please select the power cord by referring to the sec- Fig. 20 tion “PROPER SELECTION OF THE POWER SUPPLY CORD”...
  • Page 23 MX61A Attaching the Breath Shield ³ (Fig. 23) (MX-BSH or MX-BSH-ESD-2) 1. Attach the two breath shield mounting brackets @ on the breath shield ² using the provided screws (shorter ones). For the present, tighten the screws temporarily using the Allen screw- driver.
  • Page 24 Cables and cords are vulnerable to bend or twist. Do not apply excessive force to them. Always connect the module designated by Olympus to each connector. Insert each connector in the correct orientation and tighten the clamping screws if these are provided.
  • Page 25 MX61A Setting the DIP Switches (Fig. 24) }The following table shows the details of DIP switch settings. # Set the main switch @ of the microscope to “ ” (OFF) before setting the DIP switch. ² This is because the DIP switch settings are read and entered only at the moment the microscope is turned ON.
  • Page 26 Attaching the AF Control Board (Fig. 25) ² # Be sure to set the main switch of the BX-UCB control box to “ ” (OFF) before mounting the U-ZPCB or U-AFA2M-CB auto focusing control board in it. CAUTION If any Z-focus control board is mounted in the BX-UCB, remove it before proceeding.
  • Page 27 “PROPER SELECTION OF THE POWER SUPPLY CORD” at the end of ² ³ this manual. If the proper power cord is not used, Olympus can no longer warrant the electrical safety performance of the equipment. Fig. 26 1. Connect the power cord plug ² to the AC receptacle ³.

  • Page 28: Modules Installed By Olympus

    2-3 Modules Installed by Olympus Assembly and adjustment of the following modules will be performed by Olympus personnel. Installation of the Support Spring Unit Setup of the OP Light Path (installation of the Mirror Unit) Installation of the Reflected Neutral Density Filter ND 0.5/ND3/ND6...

  • Page 29: Setup Of Mx-Opu61A Operation Unit

    MX61A SETUP OF MX-OPU61A OPERATION UNIT }To operate the control panel, touch the desired switch on the screen with a fingertip (a glove acceptable or a commer- cially available touch pen also acceptable). · Select switch: When this kind of switch is touched, the switch is displayed in green to indicate that it is selected. (The STAGE ESC switch is displayed in red when it is selected.)

  • Page 30: Initialization

    Initialization }Be sure to set DIP SW1 bit 7 of the BX-UCB control box to “ON”. }Do not alter the settings of the DIP switches of the Z-board and AF board. 1. Set the main switches of the BX-UCB control box and MX-OPU61A op- eration unit to “...

  • Page 31: Config 1/6 Screen Setup

    MX61A CONFIG 1/6 Screen Setup }When any of the CONFIG screens is displayed, the MX-HS61A hand switch cannot be used except for the jog dial. ƒ }The CONFIG 1/6 screen is used to set the basic configuration of the microscope.
  • Page 32 Setting the AS preset values (AS PRESET) }After the objective names and magnifications have been set up, the rec- ommended AS preset values are set automatically. The preset values extend in the range from 1 to 13 (aperture iris diaphragm fully open to fully closed).
  • Page 33 MX61A Setting the Focus Step (FOCUS SETUP) }The recommended focus step values for the objective magnifications are displayed as the default values. The focus step refers to the Z-stage displacement per touch of the focus fine adjustment switch. 1. If it is required to modify a recommended focus step value, touch the switch @ below the preset value to open the focus step selection screen.
  • Page 34 Setting the Option Cube (OP CUBE) }An option cube (mirror unit) is necessary. (The default setting for this item is “Nothing”.) · When a DIC prism unit is used, “DIC/Nothing” can be selected. · When no DIC prism unit is used, “Nothing/PO/FL” can be selected. 1.

  • Page 35: Config 2/6 Screen Setup

    MX61A CONFIG 2/6 Screen Setup }The CONFIG 2/6 screen is used to set the upper and lower limits of the … focusing mechanism. ² The objective for use in the limit setting is the one with the highest mag- nification or the one with the shortest WD (Working Distance) among the ƒ...

  • Page 36: Config 3/6 Screen Setup

    CONFIG 3/6 Screen Setup }The CONFIG 3/6 screen is used to set the light intensity ratios according to objectives. ² The default values are the light intensity ratios for BF observation. The values are corrected automatically when other observation light path is selected.

  • Page 37: Config 4/6 Screen Setup

    MX61A CONFIG 4/6 Screen Setup }The CONFIG 4/6 screen is used to set the parfocal correction values of the objectives. The default values are “0” for all objectives. 1. Touch the objective No. switch @ for the objective with the lowest magni- ³...

  • Page 38: Config 5/6 Screen Setup

    CONFIG 5/6 Screen Setup }The CONFIG 5/6 screen is used to fine tune the aperture iris diaphragm ³ (AS) values. }If the AS preset values set in the CONFIG 1/6 screen cannot be varied, touch the NEXT switch. }If “- - -” was set in the CONFIG 1/6 screen, the fine tuning value cannot be set.

  • Page 39: Config 6/6 Screen Setup

    MX61A CONFIG 6/6 Screen Setup }The CONFIG 6/6 screen is used to set the position of the color aberration correction lens for the objective during autofocusing. ³ }The recommended values for the objectives are set as the default values. Since the color aberration must be fine adjusted according to the indi- vidual characteristic of each objective.

  • Page 40: Centration Of Reflected Light Aperture Iris Diaphragm

    CENTRATION OF REFLECTED LIGHT APERTURE IRIS DIAPHRAGM 1. Touch the BF switch to select the BF light path. 2. Engage the 10X objective in the light path and bring the specimen into approximate focus using the coarse and fine up/down adjustment switches.

  • Page 41: Centration Of Mercury/Xenon Burner

    MX61A CENTRATION OF MERCURY/XENON BURNER Turning the Burner ON Set the main switch of the power supply unit for mercury burner to “ ” (ON). The arc will stabilize in 3 to 5 minutes after the burner is ignited. # A discharge-type mercury or xenon burner may not turn on by the first try due to the characteristics of the burner.
  • Page 42 Precise Centering of the Mirror }The position of the mirror has been adjusted and locked before shipment. ³ Only if you want more precise adjustment of the mirror position, proceed to the following steps immediately after the procedure in the previous paragraphs.

  • Page 43: External Control Of Revolving Nosepiece

    MX61A EXTERNAL CONTROL OF REVOLVING NOSEPIECE Connector Used DX10G1M-14SE (Hirose Electric) Compatible plug DX30AM-14P Pin Layout and Signal Names All of the input/output signals are at the TTL level. The pin layout is shown on each connector. Table 1 Signal Names...

  • Page 44: Maintenance Parts List

    MAINTENANCE PARTS LIST Light source bulbs/burners Bulb/Burner Model Average Life · 12V100WHAL-L (Long life type) Halogen bulb 2000 hrs. (PHILIPS 7724) · 12V100HAL (High-resolution type) 50 hrs. (PHILIPS 7023) · USH-103OL Mercury burner 300 hrs. (USHIO) · HBO103W/2 300 hrs. (OSRAM) ·...

  • Page 45: Proper Selection Of The Power Supply Cord

    If no power supply cord is provided, please select the proper power supply cord for the equipment by referring to “ Specifications ” and “ Certified Cord ” below: CAUTION: In case you use a non-approved power supply cord for Olympus products, Olympus can no longer warrant the electrical safety of the equipment.
  • Page 46 Table 2 HAR Flexible Cord APPROVAL ORGANIZATIONS AND CORDAGE HARMONIZATION MARKING METHODS Alternative Marking Utilizing Printed or Embossed Harmoniza- Black-Red-Yellow Thread (Length tion Marking (May be located on Approval Organization of color section in mm) jacket or insulation of internal wir- ing) Black Yellow...
  • Page 48 Shinjuku Monolith, 3-1, Nishi Shinjuku 2-chome, Shinjuku-ku, Tokyo, Japan Wendenstrasse 14-18, 20097 Hamburg, Germany One Corporate Drive, Orangeburg, NY 10962, U.S.A. 2-8 Honduras Street, London, EC1Y OTX, U.K. 31 Gilby Road, Mount Waverley, VIC., 3149, Australia 5301 Blue Lagoon Drive, Suite 290 Miami, FL 33126, U.S.A. This publication is printed on recycled paper.

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