When Error Codes Are Displayed - Olympus AL120-6 Series Operation Manual

Operation Manual

5-2 When Error Codes Are Displayed

E0101
OFF
Troubles and Countermeasures
When an error occurs, the loader detects the error and stops all
operations. At the same time, a blinking error code appears on the liquid

crystal panel  and a buzzer sounds.
Press the [M1] menu button  to silence the buzzer.
When there are no wafers in the transfer path, turn the main switch OFF

and then turn it back to ON.
When there are wafers in the transfer path, turn the main switch OFF,
remove the wafer(s) using tweezers or similar tools, and ensure that the
cause is dealt with.
When an adsorption error has occurred, the loader may be unable to
Caution
hold wafers securely. Take care not to perform automatic unloading
without dealing with the cause. Wafers may be damaged.
If any similar errors occur during operation, please contact the OLYMPUS
distributor for your loader.
Please give the distributor the following information:
Product name:
Serial No.:
Error code:
Phenomenon:
/ When Error Codes Are Displayed
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