Heraeus HS 9 Service Manual page 183

Test Report Clean Air Cabinets
Customer
Measure grid 3 points/qm filter surface (measuring points not under lights and filter frame)
Fill in positon measuring points
Air velocity Mean air velocity
80% of the values between + 20% from mean value
100 % oft the values between + 30 % from mean value
Meet all requirements
Remark:
Test equipment Laser particle counter 0.5µm
Measure plane 300 mm in front of filter surface
Measure grid No. of measurements: square of filter surface; at least 2
Fill in positon measuring point
Max allowed no. of Particles sice 0.5µm
Max. measured no. of Particles sice 0.5µm
Meet all requirements
Remark:
Date Tested by
Date Approved by
- In case of a leakages marke the position -
Yes
6. Clean Room Class
Yes
Signature Service Technican
Signature Customer
Page 2
[m/s]
No
No
VDI 2083_FED 209_engl.xls