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Technical Information
Poor Pump or System Performance
The following table lists the faults, the probable causes and corrective actions to
take if you have a problem with a large diffusion pump.
Table 25 Troubleshooting Guide
Fault
Poor system pressure
Poor ultimate pressure
Slow pumpdown
Inlet pressure surges
High Throughput Diffusion Pumps User Manual
Probable Cause
Leaks in system, virtual or real
High process gas load
System dirty
Contaminated pump fluid
Low heat input
Inadequate cooling water flow
Cooling water is too cold
Cooling water flow is too high
High forepressure
Water in Quick Cool coil
Low heat input
Low fluid level
Malfunctioning pump assembly
Improperly located jets
Damaged jet system
Incorrect heater input
Fluid outgassing
Leak in system ahead of pump inlet
Corrective Action
Locate and repair
Measure gas load, eliminate cause
Clean system to reduce outgassing
Examine and clean pump; replace fluid
Check voltage. Check for continuity,
burned-out element, poor thermal contact
Check water pressure. Check tubing for
obstructions and backpressure
Check temperature
Adjust water flow
Check for leak in foreline, poor mechanical
pump performance, breakdown of
mechanical pump fluid
Check and remove cause
Check heaters
Add fluid
Check and repair or replace
Check and correct
Condition fluid by operating the pump for a
few hours
Check and correct
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