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Technical Information
Table 25 Troubleshooting Guide (Continued)
Fault
High chamber contamination
of the pump fluid
Pump will not start
78
Probable Cause
Forepressure too high
Prolonged operation in overload range
Cutting over from the backing pump too
early in the pump down cycle
Improper system operation and air
release procedures
Safety circuits or protective devices
prevent contactor from staying closed
High Throughput Diffusion Pumps User Manual
Corrective Action
Check for leak in foreline, poor
mechanical pump performance,
breakdown of pump fluid, and incorrect
valve operation
Adhere to operating procedures
Cut over at a lower chamber pressure
Adhere to operating procedures
Check utilities, flow devices switches,
interlocks. Check thermostat operation
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