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Technical Information
Table 27 HS-20 Accessories and Spare Parts (Continued)
Part Number
K7107001
L6514001
84497001
L9223001
K0377165
82
Description
Clamping plate
Insulation for heaters, Cerablanket 0.50" thick
Heater cover plate
Sight glass (for pumps built after October 1994)
O-ring kit; includes:
❑ 1 butyl O-ring for ASA inlet flange (84349002)
❑ 1 butyl foreline flange O-ring (660893432)
❑ 8 Viton fill and drain O-rings (660892213)
❑ 1 Sight glass O-ring (660892240)
❑ 1 Graphite sight glass gasket (L9228001)
High Throughput Diffusion Pumps User Manual
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