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Technical Information
Unpacking
Before lifting a pump, check the weight of the equipment in Table 4.
•
WARNING
Use power-assisted equipment, and trained moving and installation
•
personnel to avoid dropping, slipping, and overturning the pump and
severely injuring personnel.
Do not stand under equipment being moved.
•
Agilent large diffusion pumps are shipped in sturdy containers that permit prolonged
storage in suitably protected areas without special precautions, however, care must be
taken when moving the crated pump with a fork lift to avoid excessive shock.
Carefully remove the outer shipping container. Visually inspect the pump for
damage that may have occurred during shipping and notify the carrier immediately
if damage is suspected. If damage is noticed, save the crate and the internal
packing for inspection.
Setup
Assembly
1
Remove flange covers, blank plugs and protective plugs from water
connections. Do not to scratch or otherwise damage the sealing surface
(the O-ring groove on top of the inlet flange).
2
Check the internal jet assembly. It should be concentric and firmly seated on
the bottom of the pump. Use a flashlight to verify that the ejector nozzle is
opposite the foreline (the pump outlet connection). The jet assembly should not
rotate; it is held by an indexing pin at the bottom of the assembly.
3
If the expected vacuum level is below 10
procedure outlined in the next section. Otherwise make sure that there are no
foreign materials inside the pump, and proceed with attaching the pump to the
system as instructed in "System and Utility Connections".
High Throughput Diffusion Pumps User Manual
Torr, clean the pump using the
-7
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