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Technical Information
Dangerous Substances
Chemical Dangers of Acetone and Alcohol: Diffusion pumps are typically
cleaned with acetone or alcohol. Acetone, alcohol, and most other solvents are
irritants, narcotics, and depressants, and/or carcinogenic. Their inhalation and
ingestion may produce serious effects. Even absorption through the skin can
result in moderate toxicity. Always ensure that cleaning operations are
performed in large, well-ventilated rooms. Use of self-contained breathing
apparatus may be necessary, depending upon the solvent type and vapor
concentration in surrounding air.
Poisonous and Corrosive Compounds: When pumping poisonous, reactive,
and/or corrosive gas, vapors, or chemicals, proper operation and regeneration
do not always ensure that all hazardous materials have been totally removed. If
hazardous gas, vapors, chemicals, or combustible mixtures are pumped,
sufficient quantities may exist during operation or remain after regeneration to
cause severe injury or death.
Pump Fluids: Overheating the pump fluid, exposing it to air or reactive
materials, or over-pressurizing it above the normal operating range,
approximately 1x10
makes it toxic. This is especially true of backstreamed mechanical pump fluids
which are more volatile (unstable). Overheating of accidentally introduced or
backstreamed mechanical pump fluids cannot be protected against by thermal
switches which are set for diffusion pump fluid.
Process Gases: Process gases are frequently toxic, flammable, corrosive,
explosive, or otherwise reactive. Agilent has no control over the types of gasses
passing through the user's diffusion pump as these are entirely under the
control of the process user and/or the hardware systems integrator. Since
these gasses can cause serious injury or death, it is very important to plumb
the exhaust of the pump to the facility's hazardous gas exhaust system which
incorporates appropriate filters, scrubbers and similar components to ensure
that the exhaust meets all air and water pollution control regulations.
High Throughput Diffusion Pumps User Manual
-3
Torr (1.3x10
-3
mbar) decomposes the fluid and possibly
21
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