Agilent Technologies HS-16 User Manual page 61

High throughput diffusion pump
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Technical Information
Complete cleaning of the pump may be required due to gradual deterioration of
pump fluids. Removal of the pump from the system is then necessary.
To clean an installed pump:
1
Disconnect all water cooling lines and break the primary circuit supplying power
to the pump heaters.
2
Unbolt the inlet and foreline connections and remove the pump from the
system.
3
Drain the pump of all fluid.
4
Remove the cold cap as described in "Cold Cap".
5
Remove the jet assembly as described for the specific pump model in "Jet
Assemblies".
6
Thoroughly clean the pump body interior using acetone followed by an
isopropyl alcohol rinse and then dry the pump with clean, dry, oil-free
compressed air.
7
Thoroughly clean the jet assembly using acetone. Wipe all surfaces with
isopropyl alcohol, and dry with clean, dry, oil-free compressed air.
8
Reinstall the jet and cold cap in the pump body. Be sure that the ejector is
properly aligned with the foreline.
9
Check the condition of the O-rings. Replace O-rings that show any sign of wear
or compression.
10 Attach the pump in the system.
High Throughput Diffusion Pumps User Manual
61

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