Agilent Technologies HS-16 User Manual page 55

High throughput diffusion pump
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Technical Information
To add or change pump fluid:
1
Locate the fill and drain fittings in the appropriate outline drawing. Refer to Figure 7
through Figure 10. The fittings have special Viton® elastomer sealed plugs.
2
Assure that the power to the heaters is off.
Wait until the pump has cooled then vent it to the atmosphere.
CAUTION
3
Remove the drain plug and drain fluid into a suitable sized container.
Dispose of fluids in accordance with all appropriate regulations.
NOTE
4
Remove the plug from the filling port of the pump and pour the fluid in up to the
FULL COLD level on the sight glass as shown in the following figure.
The fluid can also be poured in from the pump inlet or foreline.
Figure 23 Sight Glass Assembly
5
Replace the fill plug with a new Viton gasket. Lubricate the O-ring with pump
fluid, put the O-ring in place, and reassemble the system.
6
Tighten the fill plug using maximum torque of 75 inches-pounds.
Once the pump is running, check that the fluid level is at the FULL HOT level in the
sight glass.
High Throughput Diffusion Pumps User Manual
55

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