Agilent Technologies HS-16 User Manual page 72

High throughput diffusion pump
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Technical Information
To reassemble the jet:
1
If the center jet rod was removed or loosened during disassembly, thread the
rod back into the boilerplate. The top of the rod should be roughly 1/16" to 1/8"
below the top surface of the inlet flange (inlet plane of the pump). Once
properly located, use the nut near the boilerplate to lock the rod in place.
2
Reverse steps 7 through 10 above to reassemble the lower jet assembly.
3
Using the two eyebolts and the appropriate lifting equipment, lower the lower
jet assembly into the pump body over the jet rod. The ejector should be aligned
directly across from the foreline. A locating slot on the jet base engages a block
in the pump body to ensure the ejector is properly aligned with the foreline.
The jet will not seat properly and the pump will not function unless the slot is
CAUTION
engaged on the locator block. Check the engagement by attempting to rotate
the jet once in place.
4
Reverse steps 1 through 5 above to reassemble the upper jet components.
The top jet orifice plug must be seated in the tube with the machined relief down
NOTE
into the tube. Ensure that the plug is not installed upside down.
The hex nut is installed such that the small diameter acts to center the cold cap
NOTE
or halo baffle. Ensure that the hex nut is not installed upside down.
72
High Throughput Diffusion Pumps User Manual

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