Agilent Technologies HS-16 User Manual page 45

High throughput diffusion pump
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Figure 15 HS-20 3-Phase Delta Parallel Circuit
Table 17 HS-20 3-Phase Delta Parallel
NORMINAL HEATER RESISTANCE @
ROOM TEMPERATURE (OHMS)
2000 W
200 V = 19
208 V = 20.5
220 V = 22.9
240 V = 27.3
265 V = 33.3
380 V = 68.5
400 V = 75.8
420 V = 83.6
430 V = 87.6
440 V = 91.8
460 V = 100.3
480 V = 109.2
575 V = 156.7
High Throughput Diffusion Pumps User Manual
LINE TO LINE RESISTANCE (OHMS)
L1-L2/L2-L3/L3-L1
12000 Watts
200 V = 6.3
208 V = 6.8
220 V = 8.1
240 V = 9.1
265 V = 11.1
380 V = 22.8
400 V = 25.3
420 V = 27.8
430 V = 29.2
440 V = 30.6
460 V = 33.4
480 V = 36.4
575 V = 52.2
LINE CURRENT (AMPS)
12000 Watts
34.6
33.3
31.5
28.9
26.1
18.2
17.3
16.5
16.1
15.8
15.1
14.4
12.1
45

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