Agilent Technologies HS-16 User Manual page 8

High throughput diffusion pump
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Technical Information
Electrical Connections
Overheating: Detection by Thermal Switches
Initial Vacuum Test
Adding or Changing Pump Fluid
Operation
Startup Procedure
Humid Environments
Shutdown Procedure
Maintenance
Periodic Inspections
Cleaning
Cleaning Safety
Disassembly and Reassembly Procedures
Cold Cap
Jet Assemblies
Heater Replacement Procedure
Troubleshooting
Leakage
Outgassing
Poor Pump or System Performance
Accessories and Spare Parts
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