Agilent Technologies HS-16 User Manual page 41

High throughput diffusion pump
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Technical Information
To wire the pump:
1
Check the heater for correct supply voltage and find the appropriate wiring
diagram. The correct voltage is shown.
2
Check load balance by measuring the resistance of each branch. The heater
resistances are given on their respective wiring diagrams.
3
Make the connections to the terminals in the electrical main junction box at
the foreline shown in the appropriate outline drawing. Use flexible conduit to
make it easier to remove the pump for service.
4
Connect the earth ground wire directly to the aluminum set screw ground
lug.
5
Connect the input wires to the terminal block positions L1, L2 and L3 (& N).
For added safety, to prevent the wires from being disconnected, secure
these wires together with the earth ground wire inside the junction box with
a tie-wrap, similar to what has been done with the heater wires.
6
Wire the thermal switches to a control mechanism to ensure that power to
the pump is shut off if one of the switches opens. The thermal switch wires
can be found in the electrical box.
7
Complete the wiring of the pump and double-check that the proper terminal
arrangement has been used for the source voltage at the site.
High Throughput Diffusion Pumps User Manual
41

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