Related Manuals for Agilent Technologies HS-16
Summary of Contents for Agilent Technologies HS-16
- Page 1 Vacuum Products Division INSTRUCTION MANUAL High Throughput Diffusion Pumps HS-16 HS-20 HS-32 NHS-35 Part No. 699901140 Rev. E June 2014...
- Page 2 High Throughput Diffusion Pumps ® Viton is a registered trademark of E. I du Pont de Nemours and Company. Copyright 2014 Agilent, Inc.
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Page 3: Table Of Contents
High Throughput Diffusion Pumps Contents Diffusion Pump Hazards ..... . . 7 Explosion ....... 8 Pressurization Hazards . - Page 4 NHS-35 3-Phase Delta Series ... 35 HS-16 Jet Assembly ....44 Troubleshooting Guide ....52 HS-20 Jet Assembly .
- Page 5 High Throughput Diffusion Pumps Preface Agilent has no control over the use of this equipment and is not responsible for personal injury or damage resulting from its use. The safe use and disposal of hazardous or potentially hazardous materials of any kind is the sole Warranty responsibility of the user.
- Page 6 High Throughput Diffusion Pumps Instructions for Use This equipment is designed for use by professionals. The user should read this instruction manual and any other additional information supplied by Agilent before operating the equipment. Agilent will not be held responsible for any events that occur due to non-compliance with these instructions, improper use by untrained persons, non-authorized interference with the equipment, or any action contrary to that proved for by specific national standards.
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Page 7: Diffusion Pump Hazards
High Throughput Diffusion Pumps Diffusion Pump Hazards Designers of systems utilizing diffusion pumps must design out hazards wherever possible. For hazards that cannot be designed out, warnings, procedures, and instructions on proper use and servicing are provided. Please use guards, safety features, and interlocks as recommended. -
Page 8: Explosion
High Throughput Diffusion Pumps Explosion Table 2 Explosive Conditions ❑ Operation of the diffusion pump without continuous evacuation below 0.5 Torr (0.67 mbar), or without Explosion-Causing Prohibited Action Condition coolant and introducing a strong oxidizer (such as air) or explosive vapors or powders or materials Do not run pump without Overtemperature which may react with pumping fluids in a hot pump... -
Page 9: Pressurization Hazards
High Throughput Diffusion Pumps Pressurization Hazards Dangerous Substances ❑ ❑ Large vacuum pumps and their components are Chemical Dangers of Acetone and Alcohol: Diffusion designed for vacuum service; they are not designed pumps are typically cleaned with acetone or alcohol. to be pressurized which could cause them to burst Acetone, alcohol, and most other solvents are irri- possibly expelling shrapnel at lethal velocities. -
Page 10: High Temperatures
High Throughput Diffusion Pumps High Temperatures High Voltages ❑ ❑ Hot Surfaces: Boiler temperatures reach 530 °F Diffusion pump heaters operate at voltages high (275 °C) which can cause serious burns. Always enough to kill. Design systems to prevent personnel ensure that surfaces have cooled to near room contact with high voltages. -
Page 11: Diffusion Pump Basics
High Throughput Diffusion Pumps Diffusion Pump Basics Pump Operation Diffusion pumps are used where throughput for heavy gas loads is important. The diffusion pumps begin to work at The diffusion pump works by heating the pump fluid to its approximately 10 Torr after a mechanical backing boiling point. - Page 12 High Throughput Diffusion Pumps...
- Page 13 High Throughput Diffusion Pumps...
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Page 14: Pump Air Speed And Throughput
Figure 2 through Figure 5. Figure 4 HS-32 Speed and Throughput Curves Figure 2 HS-16 Speed and Throughput Curves, 8.1 kW Figure 5 NHS-35 Speed and Throughput Curves... -
Page 15: Physical Specifications
1/4 F.P.T. Water Connections (Typ.) Foreline Cooling Coil Sight Glass with Fill and Drain 1/4 F.P.T. Quick Cool Coils (optional) Figure 6 HS-16 Outline with ASA Flanges Table 6 HS-16 Flange Dimensions Units Inlet Foreline Inlet, 500 K Foreline, 100 K in (mm) 23.50 (596.9) -
Page 16: Hs-20: Dimensions And Weights
High Throughput Diffusion Pumps Table 7 HS-20: Dimensions and Weights Units HS-20 Height, minimum in (mm) 56 (1422) including clearance for heater access Weight lbs (kg) 600 (272.2) Connections: Body and Foreline 1/4 FPT Quick Cool coils 3/8 FPT Figure 7 HS-20 Outline with ASA Flanges Table 8 HS-20 Flange Dimensions Units Inlet... -
Page 17: Hs-32: Dimensions And Weights
High Throughput Diffusion Pumps Table 9 HS-32: Dimensions and Weights Units HS-32 Height, minimum in (mm) 74 (1879.6) including clearance for heater access Weight lbs (kg) 1500 (680.4) Connections: Body and Foreline 3/8 FPT Quick Cool coils 3/8 FPT Figure 8 HS-32 Outline with ASA Flanges Table 10 HS-32 Flange Dimensions Units Inlet... -
Page 18: Nhs-35: Dimensions And Weights
High Throughput Diffusion Pumps Table 11 NHS-35: Dimensions and Weights Units NHS-35 Height, minimum in (mm) 80 (2032) including clearance for heater access Weight lbs (kg) 1500 (680.4) Connections: Body and Foreline 3/8 FPT Quick Cool coils 3/8 FPT Foreline Cooling Coil Figure 9 NHS-35 Outline with ASA Flanges Table 12 NHS-35 Flange Dimensions... -
Page 19: Unpacking
High Throughput Diffusion Pumps Unpacking Setup WARNINGS ❑ Before lifting a pump, check the Assembly weight of the equipment in Table 4 1. Remove flange covers, blank plugs and protective on page 12. plugs from water connections. Do not to scratch or ❑... -
Page 20: Cleaning A New Pump
High Throughput Diffusion Pumps Cleaning a New Pump Disassembly for Initial Cleaning This procedure involves the cleaning of the following NOTE A new pump requires cleaning only elements: if the desired vacuum is below ❑ Jet assembly 1x10 Torr. ❑... -
Page 21: System And Utility Connections
Figure 9 on page 18. Apply light to medium torque, just enough to visually compress the gaskets. NOTE Over time, minute leaks may develop through the gaskets. These leaks may only be detectable with extremely sensitive mass spectrometer leak detectors. Return Figure 10 HS-16/20 Cooling Water Connections... - Page 22 High Throughput Diffusion Pumps Quick Cool Coil Connection To connect cooling water HS-32/NHS-35: 1. Connect all body and foreline cooling in series The Quick Cool coil at the boiler plate must be con- except the Quick Cool coil. Connect the Cold Cap nected to an open drain and the feed line must be con- cooling coil separately (Figure 11).
- Page 23 High Throughput Diffusion Pumps Obtaining High Vacuum on the NHS-35 NOTE This configuration decreases the When operating at low pressures (below 1x10 Torr), the maximum throughput capacity of ultimate pressure can be lowered by bypassing the por- the pump. Use this cooling tion of the cooling coils located at the bend of the foreline configuration only if the pump is as shown in Figure 9 on page 18.
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Page 24: Electrical Connections
Table 13 Wiring Diagram Locations Source Voltage HS-16 Wiring HS-20 Wiring HS-32 Wiring NHS-35 Wiring 200 Delta Figure 14 on page 28... -
Page 25: Overheating: Detection By Thermal Switches
Table 14 Thermal Cutout Temperatures 4. Connect the earth ground wire directly to the aluminum set screw ground lug. Units HS-16 HS-20 HS-32 NHS-35 5. Connect the input wires to the terminal block Water Switch °F... -
Page 26: Hs -16 3 Phase Delta
High Throughput Diffusion Pumps Figure 12 HS-16 3-Phase Delta Circuit Table 15 HS -16 3 Phase Delta NORMINAL HEATER RESISTANCE @ LINE TO LINE RESISTANCE (OHMS) ROOM TEMPERATURE (OHMS) L1-L2/L2-L3/L3-L1 LINE CURRENT (AMPS) 2700 W 3200 W 8100 WATTS 9600 WATTS... - Page 27 High Throughput Diffusion Pumps Figure 13 HS-16 3-Phase WYE Circuit Table 16 HS -16 3 Phase WYE NORMINAL HEATER RESISTANCE @ LINE TO LINE RESISTANCE (OHMS) ROOM TEMPERATURE (OHMS) L1-L2/L2-L3/L3-L1 LINE CURRENT (AMPS) 2700 W 3200 W 8100 WATTS 9600 WATTS...
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Page 28: Hs -20 3-Phase Delta Parallel
High Throughput Diffusion Pumps Figure 14 HS-20 3-Phase Delta Parallel Circuit Table 17 HS -20 3-Phase Delta Parallel NORMINAL HEATER RESISTANCE @ ROOM TEMPERATURE (OHMS) LINE TO LINE RESISTANCE (OHMS) L1-L2/L2-L3/L3-L1 LINE CURRENT (AMPS) 2000 W 12000 Watts 12000 Watts 200 V = 19 200 V = 6.3 34.6... -
Page 29: Hs -20 3-Phase Wye Parallel
High Throughput Diffusion Pumps Figure 15 HS-20 3-Phase WYE Parallel Circuit Table 18 HS -20 3-Phase WYE Parallel NORMINAL HEATER RESISTANCE @ ROOM TEMPERATURE (OHMS) LINE TO LINE RESISTANCE (OHMS) L1-L2/L2-L3/L3-L1 LINE CURRENT (AMPS) 2000 W 12000 Watts 12000 Watts 220 V = 22.9 380 V = 22.8 18.2... -
Page 30: Hs -32 3-Phase Delta Parallel
High Throughput Diffusion Pumps Figure 16 HS-32 3-Phase Delta Parallel Circuit Table 19 HS -32 3-Phase Delta Parallel NORMINAL HEATER RESISTANCE @ ROOM TEMPERATURE (OHMS) LINE TO LINE RESISTANCE (OHMS) L1-L2/L2-L3/L3-L1 LINE CURRENT (AMPS) 4000 W 24000 Watts 24000 Watts 220 V = 11.5 220 V = 3.8 240 V = 13.7... -
Page 31: Hs -32 3-Phase Wye Parallel
High Throughput Diffusion Pumps Figure 17 HS-32 3-Phase WYE Parallel Circuit Table 20 HS -32 3-Phase WYE Parallel NORMINAL HEATER RESISTANCE @ ROOM TEMPERATURE (OHMS) LINE TO LINE RESISTANCE (OHMS) L1-L2/L2-L3/L3-L1 LINE CURRENT (AMPS) 4000 W 24000 Watts 24000 Watts 240 V = 13.7 415 V = 13.6 33.4... -
Page 32: Hs -32 3-Phase Delta Series
High Throughput Diffusion Pumps Figure 18 HS-32 3-Phase Delta Series Circuit Table 21 HS -32 3-Phase Delta Series NORMINAL HEATER RESISTANCE @ ROOM TEMPERATURE (OHMS) LINE TO LINE RESISTANCE (OHMS) L1-L2/L2-L3/L3-L1 LINE CURRENT (AMPS) 4000 W 24000 Watts 24000 Watts 240 V = 13.7 480 V = 18.2 28.9... -
Page 33: Nhs-35 3-Phase Delta Parallel
High Throughput Diffusion Pumps Figure 19 NHS-35 3-Phase Delta Parallel Circuit Table 22 NHS-35 3-Phase Delta Parallel NORMINAL HEATER RESISTANCE @ ROOM TEMPERATURE (OHMS) LINE TO LINE RESISTANCE (OHMS) L1-L2/L2-L3/L3-L1 LINE CURRENT (AMPS) 4000 W 24000 Watts 24000 Watts 220 V = 11.5 220 V = 3.8 240 V = 13.7 240 V = 4.5... -
Page 34: Nhs-35 3-Phase Wye Parallel
High Throughput Diffusion Pumps Figure 20 NHS-35 3-Phase WYE Parallel Circuit Table 23 NHS-35 3-Phase WYE Parallel NORMINAL HEATER RESISTANCE @ ROOM TEMPERATURE (OHMS) LINE TO LINE RESISTANCE (OHMS) L1-L2/L2-L3/L3-L1 LINE CURRENT (AMPS) 4000 W 24000 Watts 24000 Watts 240 V = 13.7 415 V = 13.6 33.4... -
Page 35: Nhs-35 3-Phase Delta Series
High Throughput Diffusion Pumps Figure 21 NHS-35 3-Phase Delta Series Circuit Table 24 NHS-35 3-Phase Delta Series NORMINAL HEATER RESISTANCE @ ROOM TEMPERATURE (OHMS) LINE TO LINE RESISTANCE (OHMS) L1-L2/L2-L3/L3-L1 LINE CURRENT (AMPS) 4000 W 24000 Watts 24000 Watts 240 V = 13.7 480 V = 18.2 28.9... -
Page 36: Initial Vacuum Test
High Throughput Diffusion Pumps Initial Vacuum Test Before charging the pump with fluid, carry out this initial To perform the initial vacuum test: vacuum test to establish the tightness of the system and its 1. Confirm the vacuum ultimate pressure characteristics vacuum connections. -
Page 37: Adding Or Changing Pump Fluid
High Throughput Diffusion Pumps Adding or Changing Pump Fluid The recommended fluid charge for each pump is given in Table 4 on page 12. WARNINGS The risk of explosion on large vacuum Fluids must be stored in clean, tightly closed containers diffusion pumps is increased by these and should be clearly identified in accordance with their factors:... - Page 38 High Throughput Diffusion Pumps To add or change pump fluid: 4. Remove the plug from the filling port of the pump and pour the fluid in up to the FULL COLD level on 1. Locate the fill and drain fittings in the appropriate the sight glass as shown in Figure 22.
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Page 39: Operation
High Throughput Diffusion Pumps Operation During initial installation, the newly installed pump fluid CAUTIONS ❑ Do not turn on the heater without may be subjected to degassing. This may result in foreline fluid in the pump. This may ruin pressure fluctuations that are considered normal. the heaters and damage the pump. -
Page 40: Startup Procedure
High Throughput Diffusion Pumps Startup Procedure Shutdown Procedure To start the pump: 1. Evacuate the diffusion pump using a mechanical WARNING 1. Releasing or admitting air to a roughing pump to below 0.5 Torr (0.67 mbar). The pump with a hot boiler, especially diffusion pump will not function unless the discharge when it is under vacuum, permits a pressure is less than the tolerable forepressure. -
Page 41: Maintenance
High Throughput Diffusion Pumps Maintenance Perform these periodic checks to assure trouble-free operation. This maintenance prevents costly down-time and cleaning procedures. Maintain a day-to-day log of pump and system performance to identify marked variations that require correc- tive action. Periodic Inspections The maximum interval between inspection of the pump is To perform general maintenance, do the following: established on the basis of experience. -
Page 42: Cleaning
High Throughput Diffusion Pumps Cleaning Cleaning Safety Cleaning a diffusion pump involves the use of acetone Complete cleaning of the pump may be required due to and alcohol, both of which are toxic and explosive. Take gradual deterioration of pump fluids. Removal of the careful note of the following warnings before starting a pump from the system is then necessary. -
Page 43: Disassembly And Reassembly Procedures
High Throughput Diffusion Pumps Disassembly and Reassembly Procedures Cold Cap To disassemble the cold cap, refer to Figure 23 and take To reassemble the cold cap: the following steps. 1. Insert the end of the cold cap water line into the cold cap port opening at the side of the pump before NOTE The halo baffle is disassembled in the... -
Page 44: Jet Assemblies
If the jet coupling loosens from the jet rod during disassembly, position it so that the top of the jet coupling is flush with the bottom orifice plug as can be seen in Figure 26. Figure 24 HS-16 Jet Assembly... - Page 45 High Throughput Diffusion Pumps HS-20 Jet Assembly To disassemble the jet assembly: 1. Remove the cold cap or halo baffle as described in “Cold Cap” on page 43. 2. Unscrew the jet cap from the coupling assembly. 3. Remove the orifice plug. 4.
- Page 46 High Throughput Diffusion Pumps To reassemble the jet assembly: 5. Replace the third stage jet shield. 1. Replace the fourth stage jet on the jet base. 6. Install the lower jet assembly in the pump. 2. Replace and tighten the securing screws between the 7.
- Page 47 High Throughput Diffusion Pumps HS-32 Jet Assembly To disassemble the jet: 1. Unscrew and remove the hex nut holding the cold cap in place. Note its orientation prior to removal Cold Cap 2. Remove the cold cap (or halo baffle) as described in “Cold Cap”...
- Page 48 High Throughput Diffusion Pumps To reassemble the jet: 7. Using the cross member and the appropriate lifting equipment, lower the entire jet assembly into the 1. If the center jet rod was removed or loosened during pump body, over the center jet rod. disassembly, thread the rod back into the boilerplate.
- Page 49 High Throughput Diffusion Pumps NHS-35 Jet Assembly To reassemble the jet: 1. If the center jet rod was removed or loosened during disassembly, thread the rod back into the boilerplate. Water-Cooled The top of the rod should be roughly 1/16" to 1/8" Cold Cap below the top surface of the inlet flange (inlet plane of the pump).
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Page 50: Heater Replacement Procedure
High Throughput Diffusion Pumps Heater Replacement Procedure 5. Spray heater clamp nuts with penetrating oil. 6. Remove the nuts holding down the clamping plate. Figure 29 shows the components of the heater element assembly. The heater replacement procedure is the same 7. -
Page 51: Troubleshooting
High Throughput Diffusion Pumps Troubleshooting Leakage Outgassing If leakage is the suspected cause of poor system perfor- High-vacuum systems, even without external leakage, mance, first check the following items: can have high gas loads due to outgassing from internal surfaces or processes. The pressure in the system is a ❑... -
Page 52: Poor Pump Or System Performance
High Throughput Diffusion Pumps Poor Pump or System Performance Table 25 lists the faults, the probable causes and corrective actions to take if you have a problem with a large diffusion pump. Table 25 Troubleshooting Guide Fault Probable Cause Corrective Action Poor system pressure Leaks in system, virtual or real Locate and repair... -
Page 53: Replacement Parts
Cold cap fitting, Imperial flex fitting #66-FL, 1/2" OD tube x 3/8" FPT K8475001 Sight glass L6367301 Jet coupling assembly X3900-68000 HS-16/20 heater wire, 120" 10 AWG X3900-68006 HS-16/20 thermo switch wire, 14 AWG, 80" length 648056329 Ni lug, 14 AWG... -
Page 54: Hs-20 Replacement Parts
Upper thermal switch, Temperature setting: 185 °F K9050002 Lower thermal switch, Temperature setting: 390 °F 656118114 Nickel wire, No. 14 AWG X3900-68006 HS-16/20 thermo switch wire, 14 AWG, 80" length 648056329 Ni lug, 14 AWG X3900-68000 HS-16/20 heater wire, 120" 10 AWG 647320025... -
Page 55: Hs-32 Replacement Parts
High Throughput Diffusion Pumps Table 27 HS-20 Replacement Parts (Continued) Part Number Description K0377165 O-ring kit; includes: ❑ 1 butyl O-ring for ASA inlet flange (84349002) ❑ 1 butyl foreline flange O-ring (660893432) ❑ 8 Viton fill and drain O-rings (660892213) ❑... -
Page 56: Nhs-35 Replacement Parts
High Throughput Diffusion Pumps Table 28 HS-32 Replacement Parts (Continued) Part Number Description K0377167 O-ring kit; includes: ❑ 1 butyl O-ring for ASA inlet flange (45390001) ❑ 1 butyl O-ring foreline flange (2-443) ❑ 8 Viton fill and drain O-rings (2-213) ❑... - Page 57 High Throughput Diffusion Pumps Table 29 NHS-35 Replacement Parts (Continued) Part Number Description X3900-68003 HS-32/35 heater wire, 196" 10 AWG...
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- Page 59 Please follow these instructions whenever one of our products needs to be returned. 1) Complete the attached Request for Return form and send it to Agilent Technologies (see below), taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials.
- Page 60 This page intentionally left blank. 4) HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS, RADIOACTIVE MATERIAL, OR MERCURY AT ITS FACILITY. Call Agilent Technologies to discuss alternatives if this requirement presents a problem.
- Page 61 Shipping Regulations (IATA, DOT, etc.) and carrier requirements. Customers receiving an Advance Exchange product agree to return the defective, rebuildable part to Agilent Technologies within 15 business days. Failure to do so, or returning a non-rebuildable part (crashed), will result in an invoice for the non-returned/non-rebuildable part.
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- Page 64 Service & Support North America India Southeast Asia Agilent Technologies Agilent Technologies India Pvt. Ltd. Agilent Technologies Sales Sdn Bhd Vacuum Products Division Vacuum Products Division Vacuum Products Division 121 Hartwell Avenue G01. Prime corporate Park, Unit 201, Level 2 uptown 2,...