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Technical Information
Table 13 Wiring Diagram Locations
Source Voltage
200 Delta
208 Delta
220 Delta
240 Delta
265 Delta
380 Delta
380 Wye
400 Delta
415 Wye
430 Delta
440 Delta
460 Delta
480 Delta
575 Delta
Do not operate the pump at more than 5% over its rated voltage.
CAUTION
All electrical connections must be made by qualified personnel in accordance
with all applicable laws and industrial codes.
For overcurrent protection, the pump must be installed with appropriate branch
circuit protection.
To guarantee electrical safety, ensure the diffusion pump is bonded to the earth
ground system.
The pump must be installed in an installation that meets the pumps operating
environment.
The end user must ensure the product has a connection from a correctly sized
roughing pump on the diffusion pump's vacuum inlet, and that the end product
has an appropriately sized and certified mains voltage disconnecting device
and/or mains power switch.
40
HS-16 Wiring
HS-20 Wiring
Figure 15
Figure 13
Figure 15
Figure 15
Figure 13
Figure 15
Figure 15
Figure 13
Figure 15
Figure 16
Figure 13
Figure 15
Figure 14
Figure 16
Figure 13
Figure 15
Figure 13
Figure 15
Figure 13
Figure 15
Figure 13
Figure 15
Figure 13
Figure 15
HS-32 Wiring
Figure 17
Figure 17
Figure 17
Figure 18
Figure 17
Figure 19
High Throughput Diffusion Pumps User Manual
NHS-35 Wiring
Figure 20
Figure 20
Figure 20
Figure 21
Figure 20
Figure 22
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