Agilent Technologies HS-16 User Manual page 67

High throughput diffusion pump
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Technical Information
To disassemble the jet assembly:
1
Remove the cold cap or halo baffle as described in "Cold Cap".
2
Unscrew the jet cap from the coupling assembly.
3
Remove the orifice plug.
4
Withdraw the central tube complete with the second stage jet and jet shield.
5
Remove the lower jet assembly from the pump, which consists of the third
stage jet, the jet shield, the fourth stage jet, and the jet base.
6
Remove the third stage shield from the lower jet assembly.
Before removing the securing screws in the following step, scribe a reference
NOTE
mark at the interface to assure that original holes are mated when reassembled.
7
Remove the securing screws between the third and fourth stage jets. Carefully
preserve the screws. Be sure that the jet spacers are not damaged in handling.
8
Remove the fourth stage jet from the jet base.
9
Clean all parts thoroughly.
To reassemble the jet assembly:
1
Replace the fourth stage jet on the jet base.
2
Replace and tighten the securing screws between the fourth stage and the jet
base uniformly and in a cyclical pattern.
Jet spacings are preset at the factory and controlled by the spacers secured to the
NOTE
respective stages.
3
Replace the third stage jet on the fourth stage.
4
Replace and tighten the securing screws between the third stage and fourth
stage uniformly and in a cyclical pattern.
5
Replace the third stage jet shield.
6
Install the lower jet assembly in the pump.
7
Check that the lower jet assembly is firmly seated on the pump with the ejector
correctly positioned. For proper alignment, a pin is provided in the base of the
pump; the large slot in the jet base must register on this pin.
High Throughput Diffusion Pumps User Manual
67

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