Basic Specifications; Table 1-3: Ant130Lz Series Specifications - Aerotech ANT130LZ-035 Hardware Manual

ANT130LZ Hardware Manual

1.3. Basic Specifications

N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual's release. Refer to www.aerotech.com for the most up-to-date information.
Resolution is dependent on encoder resolution and controller interpolation.
Table 1-3: ANT130LZ Series Specifications
Travel
-PL1
(1)
Accuracy
-PL2
Resolution (Minimum Incremental
Motion)
-PL1
Bidirectional
(1)
Repeatability -PL2
Unidirectional Repeatability
(1)
Straightness
(1)
Flatness
Pitch
Roll
Yaw
Maximum Speed
Maximum Acceleration (No Load)
(2)
In-Position Stability
Maximum Force (Continuous)
Load Capacity (Vertical)
Moving Mass
Stage Mass
Material
Mean Time Between Failure
1. Certified with each stage.
2. In-Position Jitter listing is 3 sigma value.
3. Axis orientation for on-axis loading is listed (refer to
4. Requires the use of an Aerotech controller.
Specifications are for single-axis systems ; performance of multi-axis system is payload and workpoint dependent. Consult the
Aerotech factory for multi-axis or non-standard applications.
www.aerotech.com
±3 µm (±120 µin)
(4)
±300 nm (±12 µin)
2 nm (0.08 µin)
±100 nm (±4 µin)
(4)
±75 nm (±3 µin)
±50 nm (±2 µin)
±2.0 µm (±80 µin)
±2.0 µm (±80 µin)
200 mm/s (8 in/s)
1 g -10 m/s
<2 nm (<0.08µin)
(3)
10.0 kg (22 lb)
1.2 kg (2.6 lb)
4.3 kg (9.6 lb)
Section .
Chapter 1
-035
35 mm
10 arc sec
10 arc sec
5 arc sec
2
23 N
Aluminum Body/Black Hardcoat Finish
30,000 Hours
for offset loading behavior).
Overview
-060
60 mm
±3 µm (±120 µin)
±300 nm (±12 µin)
2 nm (0.08 µin)
±100 nm (±4 µin)
±75 nm (±3 µin)
±50 nm (±2 µin)
±2.0 µm (±80 µin)
±2.0 µm (±80 µin)
10 arc sec
10 arc sec
5 arc sec
200 mm/s (8 in/s)
2
1 g -10 m/s
<2 nm (<0.08µin)
23 N
10.0 kg (22lb)
1.4 kg (3.1 lb)
5.2 kg (11.5 lb)
11