Basic Specifications; Table 1-3: Eco225Lm Series Specifications (-0100 To -0300) - Aerotech ECO225LM Hardware Manual

Overview

1.3. Basic Specifications

N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual's release. Refer to www.aerotech.com for the most up-to-date information.
Table 1-3: ECO225LM Series Specifications (-0100 to -0300)
Travel
Standard
(1)
Accuracy
Calibrated
Resolution (Minimum
Incremental Motion)
Bidirectional Repeatability
Horizontal Straightness
(1)
Vertical Straightness
Pitch
Roll
Yaw
(2)
Maximum Speed
Maximum Acceleration
M1
Maximum Force,
Continuous
M2
Horizontal
(3)
Load Capacity
Side
Moving Mass
M1
Stage Mass
M2
Material
Mean Time Between Failure
1. Certified with the PL1 option.
2. Requires the selection of an appropriate amplifier with sufficient voltage and current.
3. Axis orientation for on-axis loading is listed.
4. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and
workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications.
14
-0100
100 mm
±6 μm
±1.5 μm
(1)
(1)
±2.5 μm
±2.5 μm
40 μrad
(8.2 arc sec)
40 μrad
(8.2 arc sec)
40 μrad
(8.2 arc sec)
(2)
18.6 kg
20.2 kg
Chapter 1
ECO225LM Hardware Manual
-0150 -0200
150 mm 200 mm
±8 μm ±10 μm
±1.5 μm ±2 μm
10 nm
±0.75 μm
±3 μm ±4 μm
±3 μm ±4 μm
40 μrad 50 μrad
(8.2 arc sec) (10.3 arc sec)
40 μrad 50 μrad
(8.2 arc sec) (10.3 arc sec)
40 μrad 50 μrad
(8.2 arc sec) (10.3 arc sec)
2 m/s
1.5 g
72.1 N
153 N
100 kg
100 kg
6.1 kg
20.0 kg 21.0 kg
21.8 kg 22.7 kg
Anodized Aluminum
20,000 Hours
-0250 -0300
250 mm 300 mm
±12 μm ±14 μm
±2 μm ±2 μm
±4.5 μm ±5 μm
±4.5 μm ±5 μm
55 μrad 60 μrad
(11.3 arc sec) (12.4 arc sec)
55 μrad 60 μrad
(11.3 arc sec) (12.4 arc sec)
55 μrad 60 μrad
(11.3 arc sec) (12.4 arc sec)
22.3 kg 23.6 kg
24.3 kg 25.9 kg
www.aerotech.com