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Summary of Contents for Aerotech ATS100 Series
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Page 1: Ats100 Hardware Manual
ATS100 Hardware Manual Revision: 1.03.00... - Page 2 This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and may be trademarks of their respective companies.
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Page 3: Table Of Contents
3.3. Motor and Feedback Specifications 3.4. Limits, Marker, and Machine Direction 3.5. Motor and Feedback Phasing Chapter 4: Maintenance 4.1. Service and Inspection Schedule 4.2. Cleaning and Lubrication 4.3. Troubleshooting Appendix A: Warranty and Field Service Appendix B: Revision History Index www.aerotech.com... -
Page 4: List Of Figures
Torque Required to Turn the Ball Screw Figure 3-1: Motor and Feedback Wiring [BM/BMS Motor] Figure 3-2: Motor and Feedback Wiring [Stepper Motor] Figure 3-3: Machine Direction Figure 3-4: Hall Phasing Figure 3-5: Analog Encoder Phasing Reference Diagram Figure 3-6: TTL Encoder Phasing Reference Diagram www.aerotech.com... -
Page 5: List Of Tables
Table of Contents List of Tables Table 1-1: ATS100 Model Numbering System Table 1-2: Environmental Specifications Table 1-3: ATS100 Series Specifications Table 2-1: Stage to Mounting Surface Hardware Table 2-2: Applied Load Coefficients Table 3-1: BM/BMS Motor Wiring Connector Pinout Table 3-2: BM/BMS Motor Feedback Wiring Connector Pinout... -
Page 6: Safety Procedures And Warnings
Read this manual in its entirety before installing, operating, or servicing this product. If you do not understand the information contained herein, contact an Aerotech representative before proceeding. Strictly adhere to the statements given in this section and other handling, use, and operational information given throughout the manual to avoid injury to you and damage to the equipment. -
Page 7: Eu Declaration Of Incorporation
ATS100 Hardware Manual Table of Contents EU Declaration of Incorporation Manufacturer: Aerotech, Inc. 101 Zeta Drive Pittsburgh, PA 15238-2811 herewith declares that the product: ATS100 Stage is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC as amended;... - Page 8 Table of Contents ATS100 Hardware Manual This page intentionally left blank. www.aerotech.com...
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Page 9: Chapter 1: Overview
Overview Chapter 1: Overview N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any time. All drawings and illustrations are for reference only and were complete and accurate as of this manual’s release. Refer to www.aerotech.com for the most up-to-date information. - Page 10 5 microns orthogonality for short travel stages. HDZ1 English right angle L-bracket (ATS100-050 and ATS100-100 only) HDZ1L English right angle L-bracket (ATS100-150 and ATS100-200 only) HDZ1M Metric right angle L-bracket (ATS100-050 and ATS100-100 only) HDZ1LM Metric right angle L-bracket (ATS100-150 and ATS100-200 only) Chapter 1 www.aerotech.com...
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Page 11: Environmental Specifications
Indoor use only 1.2. Accuracy and Temperature Effects Aerotech products are designed for and built in a 20°C (68°F) environment. Extreme temperature changes could cause a decrease in performance or permanent damage to the ATS100. At a minimum, the environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the ATS100 specifications are repeatable over an extended period of time. -
Page 12: Basic Specifications
ATS100 Hardware Manual 1.3. Basic Specifications N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any time. All drawings and illustrations are for reference only and were complete and accurate as of this manual’s release. -
Page 13: Vacuum Operation
ATS100 Hardware Manual Overview 1.4. Vacuum Operation If the -HV option is ordered, Aerotech specially prepares the ATS100 for operation in high vacuum environments (up to 10 torr). This preparation involves special precautions during cleaning, assembly, and packaging to ensure optimal performance in vacuum applications. - Page 14 Overview ATS100 Hardware Manual This page intentionally left blank. Chapter 1 www.aerotech.com...
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Page 15: Chapter 2: Mechanical Specifications And Installation
Allowing it to stabilize to room temperature will ensure that all of the alignments, preloads, and tolerances are the same as they were when tested at Aerotech. Use compressed nitrogen or clean, dry, oil-free air to remove any dust or debris that has collected during shipping. -
Page 16: Dimensions
ATS100 Hardware Manual 2.2. Dimensions N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any time. All drawings and illustrations are for reference only and were complete and accurate as of this manual’s release. -
Page 17: Figure 2-2: Ats100 Mounting Plate Dimensions
ATS100 Hardware Manual Mechanical Specifications and Installation Figure 2-2: ATS100 Mounting Plate Dimensions www.aerotech.com Chapter 2... -
Page 18: Securing The Stage To The Mounting Surface
ATS100 series stages have a fixed mounting pattern. To secure the stage to a mounting surface, manually move the stage table so that the access holes on the stage table are aligned with any two of the mounting... -
Page 19: Figure 2-3: Ats100 Mounting Holes
ATS100 Hardware Manual Mechanical Specifications and Installation Figure 2-3: ATS100 Mounting Holes www.aerotech.com Chapter 2... -
Page 20: Attaching The Payload To The Stage
3 and the documentation delivered with the stage. N O T E : If your ATS100 was purchased with Aerotech controls, it might have been tuned with a representative payload based on the information provided at the time of order. If the ATS100 is started up without a payload, the servo gains provided by Aerotech with the shipment may not be appropriate and servo instability can occur. -
Page 21: Figure 2-4: Load Orientations
ATS100 Hardware Manual Mechanical Specifications and Installation Figure 2-4: Load Orientations Figure 2-5: Cantilevered Load Capabilities Load capacity and life expectancy are inversely related (that is, as loading increases, life expectancy will www.aerotech.com Chapter 2... -
Page 22: Figure 2-6: Travel Life
2-5, is approximately 13 pounds. The percentage ratio is: 10/13 × 100 = 3. Multiply the percentage ratio by the appropriate factor in the applied load coefficient table (Table 2-2). Table 2-2: Applied Load Coefficients Operating Conditions Factor Smooth operation (no shocks) Normal operating conditions Chapter 2 www.aerotech.com... -
Page 23: Figure 2-7: Torque Required To Turn The Ball Screw
Be sure to consider dynamic loading when using the ATS100 series stage for high-speed applications. The approximate amount of torque required to turn the ball screw of an ATS100 series stage can be found from... - Page 24 Mechanical Specifications and Installation ATS100 Hardware Manual This page intentionally left blank. Chapter 2 www.aerotech.com...
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Page 25: Chapter 3: Electrical Specifications And Installation
W A R N I N G : Electrical installation must be performed by properly qualified personnel. Aerotech motion control systems are adjusted at the factory for optimum performance. When the ATS100 is part of a complete Aerotech motion control system, setup usually involves connecting the ATS100 to the appropriate drive chassis with the cables provided. -
Page 26: Motor And Feedback Connectors
Stages equipped with standard motors and encoders come from the factory completely wired and assembled. N O T E : Refer to the other documentation accompanying your Aerotech equipment. Call your Aerotech representative if there are any questions on system configuration. -
Page 27: Table 3-1: Bm/Bms Motor Wiring Connector Pinout
Motor Phase A Motor Phase B Motor Phase C Reserved Reserved Reserved Reserved Reserved Frame Ground (motor protective ground) Mating Connector Aerotech P/N Third Party P/N Backshell ECK00656 Amphenol #17E-1726-2 Sockets [QTY. 4] ECK00659 ITT Cannon #DM53744-6 Connector ECK00657 ITT Cannon #DBM9W4SA197 www.aerotech.com... -
Page 28: Table 3-2: Bm/Bms Motor Feedback Wiring Connector Pinout
Sine Sine-N Reserved Common ground Common ground Reserved Reserved Reserved Brake + 1. BMS motors only (otherwise Reserved) 2. with brake option only Mating Connector Aerotech P/N Third Party P/N Backshell ECK00656 Amphenol #17E-1726-2 Connector ECK00300 FCI DB25S064TLF Chapter 3 www.aerotech.com... -
Page 29: Table 3-3: Stepper Motor Connector Pinout
Brake - (with the -BK Option) Brake + (with the -BK Option) Reserved Frame Ground (motor protective ground) Frame Ground (motor protective ground) Motor Phase B Return Mating Connector Aerotech P/N Third Party P/N Backshell ECK00656 Amphenol #17E-1726-2 Sockets [QTY. 4] ECK00659... -
Page 30: Table 3-4: Stepper Motor Feedback Connector Pinout
Reserved Reserved Reserved Reserved Reserved Cosine Cosine-N +5 V power supply Sine Sine-N Reserved Common ground Common ground Reserved Reserved Reserved Reserved Mating Connector Aerotech P/N Third Party P/N Backshell ECK00656 Amphenol #17E-1726-2 Connector ECK00300 FCI DB25S064TLF Chapter 3 www.aerotech.com... -
Page 31: Table 3-5: Limits With 9-Pin D-Connector (-Li1 Or -Li3)
Signal indicating maximum travel produced by positive/CW stage direction Reserved Signal indicating stage maximum travel produced by negative/CCW stage direction Reserved Reserved Reserved Reserved Mating Connector Aerotech P/N 3rd Party P/N Connector ECK00340 DE09S064TLF Backshell ECK01021 Amphenol #17E-1724-2 Table 3-6:... -
Page 32: Motor And Feedback Wiring
All motor and controller manufacturers have their own designations for motor phases A/B/C and Hall signals A/B/C (refer to Section 3.5. for motor phasing). Shielded cables are required for the motor and feedback connections. Figure 3-1: Motor and Feedback Wiring [BM/BMS Motor] Chapter 3 www.aerotech.com... -
Page 33: Figure 3-2: Motor And Feedback Wiring [Stepper Motor]
ATS100 Hardware Manual Electrical Specifications and Installation Figure 3-2: Motor and Feedback Wiring [Stepper Motor] www.aerotech.com Chapter 3... -
Page 34: Motor And Feedback Specifications
Note: If the ATS100 is driven beyond the electrical limit, it will encounter a mechanical stop. Impacting the mechanical stop could cause damage to the stage even at low speeds. Brake Specifications Supply Voltage 24 VDC Supply Current (typical) 250 mA (Current required to release the brake and allow motion.) Chapter 3 www.aerotech.com... -
Page 35: Table 3-8: Motor Specifications [Bms60]
5. All performance and electrical specifications ±10% 6. Maximum winding temperature is 100 °C (thermistor trips at 100 °C) 7. Ambient operating temperature range 0 °C - 25 °C; consult Aerotech for performance in elevated ambient temperatures 8. All Aerotech amplifiers are rated A ;... -
Page 36: Table 3-9: Motor Specifications [Bm75]
5. Torque constant and motor constant specified at stall 6. Maximum winding temperature is 130 °C 7. Ambient operating temperature range 0 °C - 25 °C; consult Aerotech for performance in elevated ambient temperatures 8. All Aerotech amplifiers are rated A ;... -
Page 37: Table 3-10: Motor Specifications [Sm60]
-M3, -M4, -M7, -M8 with 1000x Interpolation 5 µm 1.25 nm (1000-line 1 Vpp amplified sine signal) 1. 250x interpolation + 4x controller interpolation = 1000x total 2. 1000x interpolation + 4x controller interpolation = 4000x total www.aerotech.com Chapter 3... -
Page 38: Limits, Marker, And Machine Direction
ATS100 Hardware Manual 3.4. Limits, Marker, and Machine Direction Aerotech stages are configured to have positive and negative "machine" directions. The machine direction defines the phasing of the feedback and motor signals and is dictated by the stage wiring (refer to Section 3.5. -
Page 39: Motor And Feedback Phasing
ATS100 Hardware Manual Electrical Specifications and Installation 3.5. Motor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point. Figure 3-4: Hall Phasing www.aerotech.com Chapter 3... -
Page 40: Figure 3-5: Analog Encoder Phasing Reference Diagram
Electrical Specifications and Installation ATS100 Hardware Manual Figure 3-5: Analog Encoder Phasing Reference Diagram Figure 3-6: TTL Encoder Phasing Reference Diagram Chapter 3 www.aerotech.com... -
Page 41: Chapter 4: Maintenance
Re-tighten loose connectors. Replace or repair damaged cables. Clean the ATS100 and any components and cables as needed. Repair any damage before operating the ATS100. Inspect and perform an operational check on all safeguards and protective devices. www.aerotech.com Chapter 4... -
Page 42: Cleaning And Lubrication
Cleaning If a solvent is necessary for cleaning the stage, Aerotech recommends using isopropyl alcohol. Harsher solvents, such as acetone, may damage the plastic and rubber seals on the ball screw and LMG trucks. If acetone is required, avoid contact the ball screw and bearing seals. - Page 43 9. Repeat steps 3 through 7 for any areas covered by the original table position. 10. Refasten the hardcover. Torque the hardcover screws to 36 - 42 in-lbs to ensure proper support. 11. Restore power to the stage, and drive the stage table back to its original position to redistribute lubricants. www.aerotech.com Chapter 4...
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Page 44: Troubleshooting
Chapter 3 and Controller Stage moves uncon- documentation). trollably Motor Connections (refer to Chapter 3 and the Controller documentation). Stage oscillates or Gains misadjusted (refer to the Controller documentation). squeals Encoder signals (refer to the Controller documentation). Chapter 4 www.aerotech.com... -
Page 45: Appendix A: Warranty And Field Service
Aerotech makes no warranty that its products are fit for the use or purpose to which they may be put by the buyer, whether or not such use or purpose has been disclosed to Aerotech in specifications or drawings previously or subsequently provided, or whether or not Aerotech’s... - Page 46 Aerotech's approval. On-site Warranty Repair If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts, and cannot be returned to the Aerotech service center for repair, and if Aerotech determines the problem could be warranty-related, then the following policy applies:...
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Page 47: Appendix B: Revision History
ATS100 Hardware Manual Revision History Appendix B: Revision History Revision Description Dimension updates (Section 2.2.) 1.03.00 Motor wiring updates (Section 3.2.) Product update 1.02.00 General revision 1.01.00 Not available 1.00.00 New Manual www.aerotech.com Appendix B... - Page 48 Revision History ATS100 Hardware Manual This page intentionally left blank. Appendix B www.aerotech.com...
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Page 49: Index
Protection Rating protective ground connection EN 60204-1 2010 EN ISO 12100 2010 serial number Encoder Specifications shimming EU 2015/863 SM60-VT2 Solution Global Technical Support stabilizing stage grease stage distortion Hall-Effect Sensors Specifications stabilizing Humidity Support Symptom Inspection Schedule www.aerotech.com Index... - Page 50 Index ATS100 Hardware Manual Technical Support thermal expansion coefficient Thermistor Specifications vacuum vacuum guidelines Vibration Warranty and Field Service Index www.aerotech.com...
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