Related Manuals for Aerotech ANT130LZ Series
Summary of Contents for Aerotech ANT130LZ Series
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Page 1: Ant130Lz Series Single-Axis Z Direct-Drive Nanopositioning Stage
ANT130LZ Series Single-Axis Z Direct-Drive Nanopositioning Stage HARDWARE MANUAL Revision 2.01... - Page 2 Global Technical Support Portal for information and support about your Aerotech, Inc. products. The website supplies software, product manuals, Help files, training schedules, and PC-to-PC remote technical support. If necessary, you can complete Product Return (RMA) forms and get information about repairs and spare or replacement parts.
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Page 3: Table Of Contents
Hardware Manual ANT130LZ Table of Contents ANT130LZ Series Single-Axis Z Direct-Drive Nanopositioning Stage Table of Contents List of Figures List of Tables EU Declaration of Incorporation UKCA Declaration of Incorporation Safety Procedures and Warnings Installation and Operation Electrical Warnings Motor-Related Warnings... -
Page 4: List Of Figures
ANT130LZ Motor and Feedback Wiring [-CN1 Option] Figure 3-2: ANT130LZ Motor and Feedback Wiring [-CN2 Option] Figure 3-3: Machine Direction Figure 3-4: Hall Phasing Diagram Figure 3-5: Encoder Phasing Reference Diagram (Standard/Square Wave) Figure 3-6: Digital Encoder Phasing Reference Diagram (Sine Wave) www.aerotech.com... -
Page 5: List Of Tables
List of Tables Table 1-1: Model Numbers and Ordering Options Table 1-2: Environmental Specifications Table 1-3: ANT130LZ Series Specifications Table 2-1: Stage Mounting Surface Flatness Requirement Table 2-2: Stage to Mounting Surface Hardware Table 2-3: Payload Mounting Surface Flatness Requirement... -
Page 6: Eu Declaration Of Incorporation
ANT130LZ Hardware Manual EU Declaration of Incorporation Manufacturer Aerotech, Inc. 101 Zeta Drive Pittsburgh, PA 15238-2811 herewith declares that the product: ANT130LZ stage is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC as amended; and that the following harmonized European standards have been applied:... -
Page 7: Ukca Declaration Of Incorporation
Hardware Manual ANT130LZ UKCA Declaration of Incorporation Manufacturer Aerotech, Inc. 101 Zeta Drive Pittsburgh, PA 15238-2811 herewith declares that the product: ANT130LZ stage To which this declaration relates, meets the essential health and safety requirements and is in conformity with the relevant UK Legislation listed below:... -
Page 8: Safety Procedures And Warnings
To find the newest information about this product, refer to www.aerotech.com. If you do not understand the information in this manual, contact Aerotech Global Technical Support. IMPORTANT: This product has been designed for light industrial manufacturing or laboratory environments. -
Page 9: Installation And Operation
WARNING: Trip Hazard! Route, house, and secure all cables, duct work, air, or water lines. Failure to do so could introduce trip hazards around the system that could result in physical injury or could damage the equipment. www.aerotech.com... -
Page 10: Electrical Warnings
It is the responsibility of the End User/System Integrator to make sure that stages are properly connected and grounded per Engineering Standards and applicable safety requirements. It is the responsibility of the End User/System Integrator to configure the system drive or controller within the Aerotech motor/stage electrical and mechanical specifications. www.aerotech.com... -
Page 11: Motor-Related Warnings
Hardware Manual ANT130LZ Motor-Related Warnings Aerotech motors are capable of producing high forces and velocities. Obey all warnings and all applicable codes and standards when you operate a system that incorporates Aerotech motors. DANGER: Mechanical Hazard! Personnel must be made aware of the mechanical hazards during set up or when you do service to the stage. -
Page 12: Pinch Points
(during normal operation, for example). when the system is moved manually (during the installation process or when you do maintenance, for example). Motors are capable of very high speeds and acceleration rates. Figure 1: Typical Pinch Point Locations www.aerotech.com... -
Page 13: Magnetic Hazards
Loose items such as metallic tools, watches, or keys could get drawn into and dam- age the magnet track assembly. IMPORTANT: Use non-magnetic tools when you install or do service to the stage. Figure 2: Exposed Magnet Locations www.aerotech.com... -
Page 14: Handling And Storage
To access the vertical mounting bracket, you must first remove the pneumatic cover. Refer to Fig- For multi-axis assemblies, always lift the system by the lower axis. Use a cart, dolly, or similar device to move the stage to a new location. www.aerotech.com... - Page 15 Before you operate the stage, let it stabilize at room temperature for at least 12 hours. This will ensure that all of the alignments, preloads, and tolerances are the same as they were when they were tested at Aerotech. Each stage has a label listing the system part number and serial number. These numbers contain information necessary for maintenance or system hardware and software updates.
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Page 17: Chapter 1: Overview
Aerotech logo and the introduction of additive (3D-printed) parts. Refer to Figure 1-1. Contact Aerotech if you need a first generation manual. Figure 1-1: GEN2 vs GEN1 Visual Comparison Table 1-1: Model Numbers and Ordering Options... -
Page 18: Environmental Specifications
Indoor use only 1.2. Accuracy and Temperature Effects Aerotech products are designed for and built in a 20°C (68°F) environment. Temperature changes could cause a decrease in performance or permanent damage to the stage. At a minimum, the environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the stage specifications are repeatable over an extended period of time. -
Page 19: Basic Specifications
7. To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C per 24 hours. Consult the Aerotech factory for more information. 8. The air supply for the pneumatic counterbalance must be clean, dry to 0°F dewpoint, and filtered to 0.25 µm or better. -
Page 20: Air Requirements
If compressed air is used, it must be filtered to 0.25 microns, dry to 0º F dew point, and oil free. The maximum allowable input pressure specification is 0.6 MPa (87 psi). The low friction air cylinder consumes air as described in Figure 1-2. Figure 1-2: Counterbalance Air Flow vs. Counterbalance Pressure Figure 1-3: Air Inlet Location www.aerotech.com... -
Page 21: Chapter 2: Installation
IMPORTANT: The stage installation must be in accordance with the instructions provided by this manual and any accompanying documentation. Failure to follow these instructions could result in injury or damage to the equipment. 2.1. Dimensions Figure 2-1: ANT130LZ Dimensions www.aerotech.com... -
Page 22: Securing The Stage To The Mounting Surface
NOTE: Do not use the two mounting holes located directly below the pneumatics cylinder b. Refer to Table 2-2 for screw torque specifications. 4. Reattach the pneumatics cover by reversing steps used to remove it. WARNING: Mechanical Hazard! Do not operate the stage without the pneumatic cover in place. www.aerotech.com... -
Page 23: Figure 2-2: Mounting Hole Pattern (And Pneumatics Cylinder Clearance)
Refer to Section 2.1. for mounting locations and dimensions. Table 2-2: Stage to Mounting Surface Hardware Typical Screw Torque Mounting Hardware M6 x 0.7 SHCS 7.0 N·m [61 lb·in] Figure 2-2: Mounting Hole Pattern (and Pneumatics Cylinder Clearance) www.aerotech.com... -
Page 24: Setting Up The Pneumatic Counterbalance
Pc = Required counterbalance pressure in MPa (maximum 0.6 MPa allowed) mp = mass of external payload in kg. This relationship is shown graphically in Figure 2-3. Figure 2-3: Counterbalance Pressure vs. External Payload www.aerotech.com... - Page 25 2. Gently push the carriage down to the bottom of travel until the mechanical shock engages. 3. Turn off the counterbalance pressure. Once the counterbalance pressure has completely bled out, release the hand pressure on the carriage. To change the payload on the stage (add or remove mass), refer to Section 2.3. www.aerotech.com...
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Page 26: Attaching The Payload To The Stage
If you start the ANT130LZ without a payload, the servo gains provided by Aerotech with the shipment may not be appropriate and servo instability can occur. Refer to the controller help file for tuning assistance. - Page 27 This will allow the tabletop to fall a small amount. 8. Adjust the air supply pressure until the tabletop reaches equilibrium. 9. Completely remove the shipping clamp, and verify the stage is at equilibrium. Make adjustments as necessary. 10. Reconnect the electrical power. www.aerotech.com...
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Page 28: Figure 2-4: Load Orientations
ANT130LZ Hardware Manual Figure 2-4: Load Orientations Figure 2-5: Cantilevered Load Capabilities www.aerotech.com... -
Page 29: Chapter 3: Electrical Installation
Aerotech motion control systems are adjusted at the factory for optimum performance. When the ANT130LZ is part of a complete Aerotech motion control system, setup should only require that you connect the stage to the appropriate drive chassis with the cables provided. Labels on the system components should indicate the appropriate connections. -
Page 30: Motor And Feedback Connectors
Stages equipped with standard motors and encoders come from the factory completely wired and assembled. IMPORTANT: Refer to the other documentation accompanying your Aerotech equipment. Call your Aerotech representative if there are any questions on system configuration. IMPORTANT: If you are using standard Aerotech motors and cables, motor and encoder connection adjustments are not required. -
Page 31: Table 3-1: 25-Pin Motor And Feedback Connector Pinout (-Cn1)
Hall Effect Sensor (Phase B) Frame Ground and Shield Connection Motor Phase A Motor Phase B Motor Phase C Table 3-2: 25-Pin Mating Connector Part Numbers Mating Connector Aerotech P/N Third Party P/N 25-Socket D-Connector ECK00300 FCI DB25S064TLF Backshell ECK00656 Amphenol 17E-1726-2... -
Page 32: Table 3-3: 4-Pin Motor Connector Pinout (-Cn2 Option)
Motor Phase C Reserved Reserved Reserved Reserved Reserved Frame Ground (motor protective ground) Table 3-4: 4-Pin Motor Mating Connector Part Numbers Mating Connector Aerotech P/N Third Party P/N Backshell ECK00656 Amphenol #17E-1726-2 Sockets [QTY. 4] ECK00659 ITT Cannon #DM53744-6 Connector ECK00657 ITT Cannon #DBM9W4SA197 www.aerotech.com... -
Page 33: Table 3-5: 25-Pin Feedback Connector Pinout (-Cn2 Option)
-/CCW LMT (End-of travel limit signal that indicates maximum permitted stage travel in the “machine negative” or “machine counter-clockwise” direction.) Reserved Table 3-6: 25-Pin Feedback Mating Connector Part Numbers Mating Connector Aerotech P/N Third Party P/N 25-Socket D-Connector ECK00300 FCI DB25S064TLF Backshell... -
Page 34: Motor And Feedback Wiring
ANT130LZ Hardware Manual 3.2. Motor and Feedback Wiring Shielded cables are required for the motor and feedback connections. Figure 3-1: ANT130LZ Motor and Feedback Wiring [-CN1 Option] www.aerotech.com... -
Page 35: Figure 3-2: Ant130Lz Motor And Feedback Wiring [-Cn2 Option]
Hardware Manual ANT130LZ Figure 3-2: ANT130LZ Motor and Feedback Wiring [-CN2 Option] www.aerotech.com... -
Page 36: Motor And Feedback Specifications
20 micron 5 nm [-E3] w/ x16000 Interpolation 20 micron 1.25 nm [-E4] w/ x4000 Interpolation 4 micron 1 nm [-E4] w/ x16000 Interpolation 4 micron 0.25 nm (1) 78 nm resolution for absolute encoder track used for initialization. www.aerotech.com... -
Page 37: Table 3-11: Limit Switch Specifications
5. All performance and electrical specifications ±10%. 6. Maximum winding temperature is 125°C. 7. Ambient operating temperature range 0 °C - 25 °C; consult Aerotech for performance in elevated ambient temperatures. 8. All Aerotech amplifiers are rated Apk; use force constant in N·m/Apk when sizing. -
Page 38: Limits, Marker, And Machine Direction
ANT130LZ Hardware Manual 3.4. Limits, Marker, and Machine Direction Aerotech stages have both a positive and negative Machine Direction and a positive and negative Programming Direction. Machine Direction: The machine direction is defined by how the encoder and motor are mounted and the electrical wiring connections in the stage. -
Page 39: Motor And Feedback Phasing
Hardware Manual ANT130LZ 3.5. Motor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point. Figure 3-4: Hall Phasing Diagram www.aerotech.com... -
Page 40: Figure 3-5: Encoder Phasing Reference Diagram (Standard/Square Wave)
ANT130LZ Hardware Manual Figure 3-5: Encoder Phasing Reference Diagram (Standard/Square Wave) Figure 3-6: Digital Encoder Phasing Reference Diagram (Sine Wave) www.aerotech.com... -
Page 41: Chapter 4: Maintenance
Visually inspect the stage and cables. Re-tighten loose connectors. Replace or repair damaged cables. Clean the ANT130LZ and any components and cables as needed. Repair any damage before operating the ANT130LZ. Inspect and perform an operational check on all safeguards and protective devices. www.aerotech.com... -
Page 42: Cleaning And Lubrication
5. We recommend that you do not disassemble the stage beyond the instructions given in this manual. Proper assembly and calibration can only be done at the factory. Contact Aerotech for more information. - Page 43 4. Apply a thin, continuous film of lubricant to the exposed v-channels of the cross rollers on both ends of the stage. Aerotech recommends that you use a good quality, natural bristle artist's brush for the applicator. Do not use any applicator that could scratch or otherwise damage the v-channels.
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Page 44: Counterbalance Maintenance
Section 2.2.1. Setting up the Pneumatic Counterbalance The mechanical components are aligned at the factory during assembly and are not intended to be user-adjustable. The only adjustable component is the integrated pressure regulator. www.aerotech.com... -
Page 45: Troubleshooting
Chapter 3: Electrical Installation and Controller documentation). Stage moves uncontrollably Motor Connections (refer to Chapter 3: Electrical Installation and the Controller documentation). Gains misadjusted (refer to the Controller documentation). Stage oscillates or squeals Encoder signals (refer to the Controller documentation). www.aerotech.com... - Page 46 ANT130LZ Hardware Manual This page intentionally left blank. www.aerotech.com...
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Page 47: Appendix A: Warranty And Field Service
All Other Repairs - After Aerotech's evaluation, the buyer shall be notified of the repair cost. At such time the buyer must issue a valid purchase order to cover the cost of the repair and freight, or authorize the product(s) to be shipped back as is, at the buyer's expense. - Page 48 Aerotech's approval. On-site Warranty Repair If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts, and cannot be returned to the Aerotech service center for...
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Page 49: Appendix B: Revision History
2.01 Encoder options updated. Declaration of Conformity updated Product update to Gen 2 version 2.00 Safety information updated. The pneumatic counterbalance has been updated to account for pressure drop across 1.01 the regulator. 1.00 New manual / Product update www.aerotech.com... - Page 50 ANT130LZ Hardware Manual This page intentionally left blank. www.aerotech.com...
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Page 51: Index
Directive 2006/42/EC Possible Cause Protection Rating protective ground connection Electrical Installation Electrical Warnings EN 60204-1 2010 Repeatability EN ISO 12100 2010 Resolution Encoder Specifications Roll EU 2015/863 serial number 14-15 Flatness shimming Solution solvents Hall-Effect Sensors Specifications Handling Humidity www.aerotech.com... -
Page 52: Warnings
Index ANT130LZ Hardware Manual Specifications Encoder Hall-Effect Sensors Limit Switch Thermistor Specifications Speed stabilizing stage stage distortion stabilizing Storage Symptom Table of Contents Temperature Effects Thermistor Specifications Travel Troubleshooting Vibration Warnings Warranty and Field Service www.aerotech.com...